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    • 10. 发明授权
    • Vacuum compatible colleting spindle
    • 真空兼容主轴
    • US4589667A
    • 1986-05-20
    • US661544
    • 1984-10-16
    • Robert J. Lawton
    • Robert J. Lawton
    • C23C14/50F16D17/00B23B31/40
    • F16D17/00C23C14/505Y10T279/1033Y10T279/1074Y10T279/18
    • Apparatus is provided in which a colleting and spindle assembly for lifting and rotating a substrate mounting chassis within a high vacuum sputtering chamber is mounted. Lifting and clamping action is accomplished utilizing rolling contact between surfaces produced by rotating a minor shaft with an eccentrically mounted bearing within and relative to a major shaft. A pneumatically-actuated piston mounted on one end of the major shaft drives an internally mounted high helix screw which is prevented from rotating relative to the major shaft thereby producing linear motion of the helix screw in a helix nut resulting in rotational motion of the helix nut relative to the major shaft. The rotational motion of the helix nut is coupled to the minor shaft causing it to rotate relative to the major shaft. Once the spindle assembly has been coupled to the substrate mounting chassis, the major shaft couples rotational motion to the substrate mounting chassis from outside the chamber to inside the chamber.
    • 提供了一种装置,其中安装用于在高真空溅射室内提升和旋转衬底安装底座的集合和主轴组件。 利用通过使小轴与偏心安装的轴承旋转并且相对于主轴产生的表面之间的滚动接触来实现提升和夹紧动作。 安装在主轴的一端的气动活塞驱动内部安装的高螺旋螺钉,其被防止相对于主轴旋转,从而在螺旋螺母中产生螺旋螺钉的直线运动,从而导致螺旋螺母的旋转运动 相对于主轴。 螺旋螺母的旋转运动联接到小轴,使得其相对于主轴旋转。 一旦主轴组件已经联接到基板安装底盘,则主轴将旋转运动从腔室外部耦合到基板安装底盘到室内。