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    • 3. 发明授权
    • Tactile sensor for curved surface and manufacturing method thereof
    • 曲面触觉传感器及其制造方法
    • US08049591B2
    • 2011-11-01
    • US12310526
    • 2007-05-25
    • Jong-Ho KimHyun-joon KwonYon-kyu ParkMin-seok KimDae-im KangJae-hyuk Choi
    • Jong-Ho KimHyun-joon KwonYon-kyu ParkMin-seok KimDae-im KangJae-hyuk Choi
    • H01C10/10
    • G01L1/205G01L5/228
    • A tactile sensor for curved surfaces applicable to objects with multi-dimensional curvature and a small radius of curvature and a manufacturing method thereof are disclosed. The tactile sensor for curved surfaces includes a lower pattern including a plurality of lower polymer film layers spaced at specified intervals in a lower direction, lower metal layers disposed on the lower polymer film layers, and a number of lower resistors disposed on the lower metal layers, an upper pattern including a plurality of upper polymer film layers spaced at specified intervals in a direction perpendicular to the lower direction, upper metal layers disposed on the upper polymer film layers, and a number of upper resistors disposed below the upper metal layers to be electrically connected to the lower resistors, and a lower polymer layer and an upper polymer layer to bond the lower pattern and the upper pattern to each other.
    • 公开了一种适用于具有多维曲率和小曲率半径的物体的弯曲表面的触觉传感器及其制造方法。 用于弯曲表面的触觉传感器包括下部图案,该下部图案包括在下部方向上以规定间隔隔开的多个下部聚合物膜层,设置在下部聚合物膜层上的下部金属层和设置在下部金属层上的多个下部电阻器 ,上部图案包括在垂直于下方向的方向上以规定间隔隔开的多个上部聚合物膜层,设置在上部聚合物膜层上的上部金属层和设置在上部金属层下方的多个上部电阻器 电连接到下电阻器,以及下聚合物层和上聚合物层,以将下图案和上图案彼此粘合。
    • 5. 发明申请
    • Tactile sensor for curved surface and manufacturing method thereof
    • 曲面触觉传感器及其制造方法
    • US20100176825A1
    • 2010-07-15
    • US12310526
    • 2007-05-25
    • Jong-Ho KimHyun-joon KwonYon-kyu ParkMin-seok KimDae-im KangJae-hyuk Choi
    • Jong-Ho KimHyun-joon KwonYon-kyu ParkMin-seok KimDae-im KangJae-hyuk Choi
    • G01R27/08H01B13/00
    • G01L1/205G01L5/228
    • A tactile sensor for curved surfaces applicable to objects with multi-dimensional curvature and a small radius of curvature and a manufacturing method thereof are disclosed. The tactile sensor for curved surfaces includes a lower pattern including a plurality of lower polymer film layers spaced at specified intervals in a lower direction, lower metal layers disposed on the lower polymer film layers, and a number of lower resistors disposed on the lower metal layers, an upper pattern including a plurality of upper polymer film layers spaced at specified intervals in a direction perpendicular to the lower direction, upper metal layers disposed on the upper polymer film layers, and a number of upper resistors disposed below the upper metal layers to be electrically connected to the lower resistors, and a lower polymer layer and an upper polymer layer to bond the lower pattern and the upper pattern to each other.
    • 公开了一种适用于具有多维曲率和小曲率半径的物体的弯曲表面的触觉传感器及其制造方法。 用于弯曲表面的触觉传感器包括下部图案,该下部图案包括在下部方向上以规定间隔隔开的多个下部聚合物膜层,设置在下部聚合物膜层上的下部金属层和设置在下部金属层上的多个下部电阻器 ,上部图案包括在垂直于下方向的方向上以规定间隔隔开的多个上部聚合物膜层,设置在上部聚合物膜层上的上部金属层和设置在上部金属层下方的多个上部电阻器 电连接到下电阻器,以及下聚合物层和上聚合物层,以将下图案和上图案彼此粘合。
    • 7. 发明授权
    • Method of manufacturing a tactile sensor
    • 触觉传感器的制造方法
    • US07313854B2
    • 2008-01-01
    • US11024316
    • 2004-12-28
    • Jong-ho KimDae-im KangYon-kyu ParkMin-seok Kim
    • Jong-ho KimDae-im KangYon-kyu ParkMin-seok Kim
    • G01R3/00
    • G01L5/162Y10T29/42Y10T29/49002Y10T29/49007Y10T29/49155
    • A method of manufacturing a tactile sensor, which is capable of implementing a wide range of senses, including sensing contact pressure (vertical force and horizontal force) with an external object and heat caused by the contact pressure, comprises forming a side block formation pattern of a force sensor and forming a piezo-resistor formation pattern of a heat sensor; forming a piezo-resistor and depositing an oxide film on the piezo-resistor; forming contact holes and forming a line hole formation pattern; forming a metal line, a temperature measurement metal line, and a heater; depositing an oxide film on the metal line, the temperature measurement metal line, and the heater, and forming a load block on the oxide film; and forming a side block by etching a bottom surface of the wafer on which the load block is formed.
    • 一种制造能够实现宽范围感觉的方法,其包括感测与外部物体的接触压力(垂直力和水平力)和由接触压力引起的热量,包括形成侧块形成图案 力传感器,形成热传感器的压阻电阻形成图案; 形成压电电阻并在压电电阻器上沉积氧化膜; 形成接触孔并形成线孔形成图案; 形成金属线,温度测量金属线和加热器; 在金属线,温度测量金属线和加热器上沉积氧化膜,并在氧化膜上形成负载块; 以及通过蚀刻形成有所述负载块的所述晶片的底面来形成侧块。
    • 8. 发明申请
    • Tactile sensor and method of manufacturing the same
    • 触觉传感器及其制造方法
    • US20050262676A1
    • 2005-12-01
    • US11024316
    • 2004-12-28
    • Jong-ho KimDae-im KangYon-kyu ParkMin-seok Kim
    • Jong-ho KimDae-im KangYon-kyu ParkMin-seok Kim
    • G01L1/18B81B1/00B81C1/00G01D21/02G01K7/16G01L1/00G01L5/16H01L29/84H04R17/00
    • G01L5/162Y10T29/42Y10T29/49002Y10T29/49007Y10T29/49155
    • Disclosed are a tactile sensor and a method of manufacturing the same, which are capable of implementing a wide range of senses, including sensing contact pressure (vertical force and horizontal force) with an external object and heat caused by the contact pressure. The method comprises forming a side block formation pattern of a force sensor and forming a piezo-resistor formation pattern of a heat sensor; forming a piezo-resistor and depositing an oxide film on the piezo-resistor; forming contact holes and forming a line hole formation pattern; forming a metal line, a temperature measurement metal line, and a heater; depositing an oxide film on the metal line, the temperature measurement metal line, and the heater, and forming a load block on the oxide film; and forming a side block by etching a bottom surface of the wafer on which the load block is formed. Accordingly, remarkable improvement of sensitivity can be achieved. The tactile sensor of the present invention can be appropriately used in various industries including medical treatment, diagnosis, and administration, such as intravascular microscopic operation and cancer diagnosis, and moreover, can be effectively applied to tactile presentation technologies, which are important for the future of virtual environment implementation technology.
    • 公开了一种触觉传感器及其制造方法,其能够实现宽范围的感测,包括感测与外部物体的接触压力(垂直力和水平力)以及由接触压力引起的热量。 该方法包括形成力传感器的侧块形成图案并形成热传感器的压阻电阻器形成图案; 形成压电电阻并在压电电阻器上沉积氧化膜; 形成接触孔并形成线孔形成图案; 形成金属线,温度测量金属线和加热器; 在金属线,温度测量金属线和加热器上沉积氧化膜,并在氧化膜上形成负载块; 以及通过蚀刻形成有所述负载块的所述晶片的底面来形成侧块。 因此,可以实现显着的灵敏度提高。 本发明的触觉传感器可以适用于血管内微观操作和癌症诊断等医疗,诊断,管理等各种行业,并且可以有效地应用于未来重要的触觉呈现技术 的虚拟环境实现技术。