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    • 1. 发明授权
    • Spot size converter and method of manufacturing the same
    • 点尺寸转换器及其制造方法
    • US06684011B2
    • 2004-01-27
    • US09948555
    • 2001-09-10
    • Jong Sool JeongYong Soon BaekKwang Ryong Oh
    • Jong Sool JeongYong Soon BaekKwang Ryong Oh
    • G02B626
    • G02B6/305G02B2006/12173G02B2006/12176G02B2006/12195
    • The present invention relates to a spot size converter and a method of fabricating the same, which provides efficient coupling between an optical fiber and integrated devices of optical waveguide. The spot size converter has an input and output optical waveguides formed in a vertical double-layer structure. Integrated to the output optical waveguide, an unidirectional side-tapered optical waveguide is formed. Due to the tapered structure of the optical waveguide, the effective refective index gradually changes along the length of the waveguide. Thus, the spot size of the optical signal gradually changes while the optical signal travels within the tapered optical waveguide. Therefore, the present invention effectively eliminates or minimizes the coupling loss and the reflection loss between the optical fiber and the devices connected to the spot size converter. In particular, the present invention provides method for easily fabricating a tapered and narrow optical waveguide structure using low-resolution photolithography technique and reducing the manufacturing cost and increasing the manufacturing yield at the same time.
    • 光斑尺寸转换器及其制造方法技术领域本发明涉及一种光斑尺寸转换器及其制造方法,其提供光纤与光波导的集成器件之间的有效耦合。 光斑尺寸转换器具有以垂直双层结构形成的输入和输出光波导。 集成到输出光波导中,形成单向侧锥形光波导。 由于光波导的锥形结构,有效的反射指数沿波导的长度逐渐变化。 因此,光信号的光斑尺寸在光信号在锥形光波导内行进时逐渐变化。 因此,本发明有效地消除或最小化光纤与连接到光斑尺寸转换器的器件之间的耦合损耗和反射损耗。 特别地,本发明提供了使用低分辨率光刻技术容易地制造锥形和窄光波导结构并同时降低制造成本和提高制造产量的方法。