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    • 4. 发明授权
    • Method for forming metal pattern by using metal nanocrystals
    • 使用金属纳米晶体形成金属图案的方法
    • US07205096B2
    • 2007-04-17
    • US11117431
    • 2005-04-29
    • Jong Jin ParkSang Yeol KimTae Woo LeeLyong Sun Pu
    • Jong Jin ParkSang Yeol KimTae Woo LeeLyong Sun Pu
    • C23C18/30
    • G03F7/405G03F7/0392Y10T428/31678
    • Disclosed herein is a method for forming a metal pattern by using metal nanocrystals. The method comprises the steps of: (i) coating a photosensitive compound having a substituent, which is converted into a free carboxyl group by light exposure, on a substrate to form a photosensitive film; (ii) selectively exposing the photosensitive film to light in the presence of a photoacid generator to form a latent pattern for crystal growth having a free carboxyl group; and (iii) treating the latent pattern for crystal growth with a nanometallic solution in which metal nanocrystals can be formed to grow the metal nanocrystals on the latent pattern. According to the method, a metal wiring pattern can be formed in a cost-effective and relatively simple manner. Further, the metal pattern formed by the method can be useful in the manufacture of an electromagnetic interference filter for flat panel display devices or an electrode, and can thus be applied to devices, e.g., organic light-emitting devices (OLED) and organic thin-film transistors (OTFT).
    • 本文公开了通过使用金属纳米晶体形成金属图案的方法。 该方法包括以下步骤:(i)通过曝光将具有取代基的感光性化合物转化成游离羧基,形成感光膜; (ii)在光致酸产生剂的存在下将感光膜选择性曝光以形成具有游离羧基的晶体生长的潜在图案; 和(iii)用可以形成金属纳米晶体的纳米金属溶液处理潜在图案以进行晶体生长,以在潜在图案上生长金属纳米晶体。 根据该方法,可以以成本有效且相对简单的方式形成金属布线图案。 此外,通过该方法形成的金属图案可用于制造用于平板显示装置或电极的电磁干扰滤光器,并且因此可以应用于诸如有机发光器件(OLED)和有机薄膜 - 薄膜晶体管(OTFT)。