专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US07433043B2 Two-dimensional spectral shearing interferometry for ultrafast pulse characterization 有权
标题翻译：用于超快速脉冲表征的二维光谱剪切干涉测量
公开(公告)号：US07433043B2
公开(公告)日：2008-10-07
申请号：US11608683
申请日：2006-12-08
申请人： Jonathan R. Birge , Richard Ell , Franz X. Kaertner
发明人： Jonathan R. Birge , Richard Ell , Franz X. Kaertner
IPC分类号： G01B9/02
CPC分类号： G01J9/0215 , G01J3/4535 , G01J11/00
摘要： The phase spectrum of an ultrashort pulse is measured based on two-dimensional spectral shearing interferometry with zero delay. The measurement is performed utilizing an optical source pulse from which is extracted a short pulse and from which a chirped component is generated. The chirped component is split into first and second chirped pulses. The first and second pulses are then mixed with the short pulse in a nonlinear medium to produce up-converted and spectrally sheared copies of the first and second chirped pulses, which are measured in a spectrometer. A plurality of path lengths for the first second chirped pulses is provided to shift the relative phases of the first and second chirped pulses for additional measurements. The apparatus and methods are uniquely suited for characterizing single-cycle pulses.
摘要翻译：基于具有零延迟的二维频谱剪切干涉测量来测量超短脉冲的相位谱。使用从其提取短脉冲的光源脉冲进行测量，并从其产生啁啾分量。啁啾分量被分成第一和第二啁啾脉冲。然后将第一和第二脉冲与非线性介质中的短脉冲混合，以产生在光谱仪中测量的第一和第二啁啾脉冲的上变换和频谱剪切的拷贝。提供用于第一第二啁啾脉冲的多个路径长度以移动用于另外测量的第一和第二啁啾脉冲的相对相位。该装置和方法独特地适用于表征单周期脉冲。

2. 发明授权

US07839905B2 Carrier-envelope phase shift using linear media 有权
标题翻译：使用线性介质的载波包络相移
公开(公告)号：US07839905B2
公开(公告)日：2010-11-23
申请号：US11608666
申请日：2006-12-08
申请人： Franz X. Kaertner , Richard Ell
发明人： Franz X. Kaertner , Richard Ell
IPC分类号： H01S3/10
CPC分类号： H01S3/0057 , G01J11/00 , G02B5/04 , G02B26/06 , G02F1/0102 , G02F2203/26 , G02F2203/50 , G02F2203/54 , H01S3/0014 , H01S3/10053 , H01S3/1022
摘要： The carrier-envelope phase in a train of optical pulses is varied utilizing the dispersive properties of lossless plates while the total dispersion in transmission is maintained practically constant. The plates include sloped surfaces and are mounted for displacement such that the ratio of the thicknesses of the two plates through which the optical pulses will pass can be varied by displacing the plates so as to shift the carrier-envelope phase in the optical pulses. In one embodiment, the plates include a barium fluoride wedge and a fumed silica wedge, wherein the wedges are bond together to form a composite structure with thicker and thinner portions of the wedges inversely matched.
摘要翻译：光脉冲序列中的载波包络相位利用无损板的色散特性而变化，而传输中的总色散几乎保持恒定。这些板包括倾斜表面并且被安装以便移位，使得光脉冲通过的两个板的厚度比可以通过移动板来改变，以便移动光脉冲中的载波包络相位。在一个实施方案中，所述板包括氟化钡楔形物和热解法二氧化硅楔形物，其中楔形物结合在一起以形成具有较厚和较薄部分的楔形物相反匹配的复合结构。

3. 发明申请

US20100253950A1 Carrier-Envelope Phase Shift Using Linear Media 审中-公开
标题翻译：使用线性媒体的载波包络相移
公开(公告)号：US20100253950A1
公开(公告)日：2010-10-07
申请号：US12819806
申请日：2010-06-21
申请人： Franz X. Kaertner , Richard Ell
发明人： Franz X. Kaertner , Richard Ell
IPC分类号： G01B9/02 , G02B5/04
CPC分类号： H01S3/0057 , G01J11/00 , G02B5/04 , G02B26/06 , G02F1/0102 , G02F2203/26 , G02F2203/50 , G02F2203/54 , H01S3/0014 , H01S3/10053 , H01S3/1022
摘要： The carrier-envelope phase in a train of optical pulses is varied utilizing the dispersive properties of lossless plates while the total dispersion in transmission is maintained practically constant. The plates include sloped surfaces and are mounted for displacement such that the ratio of the thicknesses of the two plates through which the optical pulses will pass can be varied by displacing the plates so as to shift the carrier-envelope phase in the optical pulses. In one embodiment, the plates include a barium fluoride wedge and a fumed silica wedge, wherein the wedges are bond together to form a composite structure with thicker and thinner portions of the wedges inversely matched.
摘要翻译：光脉冲序列中的载波包络相位利用无损板的色散特性而变化，而传输中的总色散几乎保持恒定。这些板包括倾斜表面并且被安装以便移位，使得光脉冲通过的两个板的厚度比可以通过移动板来改变，以便移动光脉冲中的载波包络相位。在一个实施方案中，所述板包括氟化钡楔形物和热解法二氧化硅楔形物，其中楔形物结合在一起以形成具有较厚和较薄部分的楔形物相反匹配的复合结构。

4. 发明授权

US07555023B2 Quasi-synchronously pumped lasers for self-starting pulse generation and widely tunable systems 有权
标题翻译：准同步泵浦激光器，用于自启动脉冲发生和广泛可调谐系统
公开(公告)号：US07555023B2
公开(公告)日：2009-06-30
申请号：US11448408
申请日：2006-06-07
申请人： Richard Ell , Franz X. Kaertner
发明人： Richard Ell , Franz X. Kaertner
IPC分类号： H01S3/098
CPC分类号： H01S3/094026 , H01S3/106 , H01S3/1109 , H01S3/1112 , H01S3/1394 , H01S3/1625 , H01S3/1636
摘要： A laser system for generating self-starting few cycle laser pulses or widely tunable laser pulses is provided. The laser system includes a modelocked pump source that provides a pulsed pump signal. A gain medium receives the pulsed pump signal. A resonator structure includes the gain medium and a plurality of mirrors. The resonator structure defines a laser operated in a CW-modelocked regime generating few-cycle laser pulses having a duration less then 30 fs.
摘要翻译：提供了用于产生自启动几个周期激光脉冲或广泛可调激光脉冲的激光系统。激光系统包括提供脉冲泵浦信号的锁模泵浦源。增益介质接收脉冲泵浦信号。谐振器结构包括增益介质和多个反射镜。谐振器结构限定了以CW模式锁定状态操作的激光器，其产生具有小于30fs的持续时间的少周期激光脉冲。

5. 发明申请

US20100079738A1 OPTICAL MEASUREMENT APPARATUS FOR A PROJECTION EXPOSURE SYSTEM 审中-公开
标题翻译：投影曝光系统的光学测量装置
公开(公告)号：US20100079738A1
公开(公告)日：2010-04-01
申请号：US12569430
申请日：2009-09-29
申请人： Johannes Eisenmenger , Thomas Stammler , Richard Ell
发明人： Johannes Eisenmenger , Thomas Stammler , Richard Ell
IPC分类号： G03B27/54 , G01J1/42
CPC分类号： G03F7/70133 , G03F7/706
摘要： An optical measurement apparatus (50) for a projection exposure system (10) for microlithography includes an optical sensor (52) that measures a given property of exposure radiation (16) within the projection exposure system (10) and a data interface (66; 166) that transmits at least one value for the measured property in the form of measurement data (60) to a data receiver (72). The data receiver (72) is separated from the measurement apparatus (50) at least during the measuring operation, and is disposed outside of the measurement apparatus (50). The optical measurement apparatus has the outer form of a reticle.
摘要翻译：一种用于微光刻的投影曝光系统（10）的光学测量装置（50）包括测量投影曝光系统（10）内的曝光辐射（16）的给定特性的光学传感器（52）和数据接口（66; 166），其将测量数据（60）形式的测量属性的至少一个值发送到数据接收器（72）。数据接收器（72）至少在测量操作期间与测量装置（50）分离，并且设置在测量装置（50）的外部。光学测量装置具有光罩的外形。

6. 发明申请

US20070171422A1 Two-Dimensional Spectral Shearing Interferometry for Ultrafast Pulse Characterization 有权
标题翻译：用于超快速脉冲表征的二维光谱剪切干涉测量
公开(公告)号：US20070171422A1
公开(公告)日：2007-07-26
申请号：US11608683
申请日：2006-12-08
申请人： Jonathan Birge , Richard Ell , Franz Kaertner
发明人： Jonathan Birge , Richard Ell , Franz Kaertner
IPC分类号： G01B9/02
CPC分类号： G01J9/0215 , G01J3/4535 , G01J11/00
摘要： The phase spectrum of an ultrashort pulse is measured based on two-dimensional spectral shearing interferometry with zero delay. The measurement is performed utilizing an optical source pulse from which is extracted a short pulse and from which a chirped component is generated. The chirped component is split into first and second chirped pulses. The first and second pulses are then mixed with the short pulse in a nonlinear medium to produce up-converted and spectrally sheared copies of the first and second chirped pulses, which are measured in a spectrometer. A plurality of path lengths for the first second chirped pulses is provide to generate delays and shift the relative positions of the first and second chirped pulses for additional measurements. The apparatus and methods are uniquely suited for characterizing single-cycle pulses.
摘要翻译：基于具有零延迟的二维频谱剪切干涉测量来测量超短脉冲的相位谱。使用从其提取短脉冲的光源脉冲进行测量，并从其产生啁啾分量。啁啾分量被分成第一和第二啁啾脉冲。然后将第一和第二脉冲与非线性介质中的短脉冲混合，以产生在光谱仪中测量的第一和第二啁啾脉冲的上变换和频谱剪切的拷贝。提供用于第一第二啁啾脉冲的多个路径长度以产生延迟并且移位第一和第二啁啾脉冲的相对位置用于附加测量。该装置和方法独特地适用于表征单周期脉冲。

7. 发明申请

US20070002907A1 Quasi-synchronously pumped lasers for self-starting pulse generation and widely tunable systems 有权
标题翻译：准同步泵浦激光器，用于自启动脉冲发生和广泛可调谐系统
公开(公告)号：US20070002907A1
公开(公告)日：2007-01-04
申请号：US11448408
申请日：2006-06-07
申请人： Richard Ell , Franz Kaertner
发明人： Richard Ell , Franz Kaertner
IPC分类号： H01S3/098 , H01S3/13
CPC分类号： H01S3/094026 , H01S3/106 , H01S3/1109 , H01S3/1112 , H01S3/1394 , H01S3/1625 , H01S3/1636
摘要： A laser system for generating self-starting few cycle laser pulses or widely tunable laser pulses is provided. The laser system includes a modelocked pump source that provides a pulsed pump signal. A gain medium receives the pulsed pump signal. A resonator structure includes the gain medium and a plurality of mirrors. The resonator structure defines a laser operated in a CW-modelocked regime generating few-cycle laser pulses having a duration less then 30 fs.
摘要翻译：提供了用于产生自启动几个周期激光脉冲或广泛可调激光脉冲的激光系统。激光系统包括提供脉冲泵浦信号的锁模泵浦源。增益介质接收脉冲泵浦信号。谐振器结构包括增益介质和多个反射镜。谐振器结构限定了以CW模式锁定状态操作的激光器，其产生具有小于30fs的持续时间的少周期激光脉冲。

8. 发明申请

US20070217542A1 Carrier-Envelope Phase Shift Using Linear Media 有权
标题翻译：使用线性媒体的载波包络相移
公开(公告)号：US20070217542A1
公开(公告)日：2007-09-20
申请号：US11608666
申请日：2006-12-08
申请人： Franz Kaertner , Richard Ell
发明人： Franz Kaertner , Richard Ell
IPC分类号： H04L27/00
CPC分类号： H01S3/0057 , G01J11/00 , G02B5/04 , G02B26/06 , G02F1/0102 , G02F2203/26 , G02F2203/50 , G02F2203/54 , H01S3/0014 , H01S3/10053 , H01S3/1022
摘要： The carrier-envelope phase in a train of optical pulses is varied utilizing the dispersive properties of lossless plates while the total dispersion in transmission is maintained practically constant. The plates include sloped surfaces and are mounted for displacement such that the ratio of the thicknesses of the two plates through which the optical pulses will pass can be varied by displacing the plates so as to shift the carrier-envelope phase in the optical pulses. In one embodiment, the plates include a barium fluoride wedge and a fumed silica wedge, wherein the wedges are bond together to form a composite structure with thicker and thinner portions of the wedges inversely matched.
摘要翻译：光脉冲序列中的载波包络相位利用无损板的色散特性而变化，而传输中的总色散几乎保持恒定。这些板包括倾斜表面并且被安装以便移位，使得光脉冲通过的两个板的厚度比可以通过移动板来改变，以便移动光脉冲中的载波包络相位。在一个实施方案中，所述板包括氟化钡楔形物和热解法二氧化硅楔形物，其中楔形物结合在一起以形成具有较厚和较薄部分的楔形物相反匹配的复合结构。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式