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    • 9. 发明授权
    • Field emission device having reduced row-to-column leakage
    • 具有减少的列到列泄漏的场发射器件
    • US5696385A
    • 1997-12-09
    • US767246
    • 1996-12-13
    • John SongThomas Nilsson
    • John SongThomas Nilsson
    • H01J1/30H01J1/304H01J9/02H01J31/12H01L29/06
    • H01J9/025
    • A method for fabricating a diamond-like carbon field emission device (300, 800) includes the steps of: (i) forming on a column conductor (330, 830) a ballast layer (364), (ii) forming on the ballast layer (364), in registration with a central well region (332, 832) of the column conductor (330, 830), a surface emitter (370, 870) made from diamond-like carbon, (iii) forming on the ballast layer (364) and surface emitter (370, 870) a field shaping layer (374), (iv) pattering the ballast layer (364) and the field shaping layer (374) to form a ballast (365) and field shaper layer (377) having opposed edges which, with the opposed edges of the column conductor (330, 830), define smooth, continuous surfaces (371, 871), (v) depositing a blanket dielectric layer (341), and (vi) forming an emission well (360, 860) above the central well region (332, 832) of the column conductor (330, 830).
    • 制造类金刚石碳场发射器件(300,800)的方法包括以下步骤:(i)在列导体(330,830)上形成压载层(364),(ii)在镇流器层上形成 (364)与列导体(330,830)的中心阱区域(332,832)对准,由类金刚石碳制成的表面发射器(370,870),(iii)在压载层( 364)和表面发射器(370,870),场成形层(374),(iv)图案化镇流器层(364)和场成形层(374)以形成镇流器(365)和场成形层(377) 具有相对的边缘,其中柱导体(330,830)的相对边缘限定平滑的连续表面(371,871),(v)沉积覆盖介电层(341),和(vi)形成发射阱 (360,860)在列导体(330,830)的中心阱区域(332,832)之上。