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    • 2. 发明授权
    • Floating slit valve for transfer chamber interface
    • 用于传送室接口的浮动狭缝阀
    • US08877553B2
    • 2014-11-04
    • US13195592
    • 2011-08-01
    • John M. WhiteShinichi KuritaTakayuki Matsumoto
    • John M. WhiteShinichi KuritaTakayuki Matsumoto
    • H01L21/00F16K51/02
    • F16K51/02Y10S438/905Y10T29/49412
    • The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.
    • 本发明通常包括用于与室连接的浮动狭缝阀。 浮动狭缝阀相对于诸如室的另一物体移动或“浮动”。 狭缝阀可以联接在两个腔室之间。 当与狭缝阀联接的室被加热时,狭缝阀也可以通过传导加热。 当狭缝阀被加热时,它可以热膨胀。 当在室中抽真空时,狭缝阀可能由于真空偏转而变形。 通过在室和狭缝阀之间设置低摩擦材料间隔件,狭缝阀在热膨胀/收缩和/或真空偏转期间可能不会摩擦室,因此不会产生不期望的颗粒污染物。 此外,穿过腔室钻出的狭缝阀可以被定尺寸以适应狭缝阀的热膨胀/收缩和真空偏转。
    • 3. 发明申请
    • FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE
    • 浮动接口的浮动阀门
    • US20080258091A1
    • 2008-10-23
    • US12040291
    • 2008-02-29
    • John M. WhiteShinichi KuritaTakayuki Matsumoto
    • John M. WhiteShinichi KuritaTakayuki Matsumoto
    • F16K51/00B21D51/16F16K25/00
    • F16K51/02Y10S438/905Y10T29/49412
    • The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.
    • 本发明通常包括用于与室连接的浮动狭缝阀。 浮动狭缝阀相对于诸如室的另一物体移动或“浮动”。 狭缝阀可以联接在两个腔室之间。 当与狭缝阀联接的室被加热时,狭缝阀也可以通过传导加热。 当狭缝阀被加热时,它可以热膨胀。 当在室中抽真空时,狭缝阀可能由于真空偏转而变形。 通过在室和狭缝阀之间设置低摩擦材料间隔件,狭缝阀在热膨胀/收缩和/或真空偏转期间可能不会摩擦室,因此不会产生不期望的颗粒污染物。 此外,穿过腔室钻出的狭缝阀可以被定尺寸以适应狭缝阀的热膨胀/收缩和真空偏转。
    • 5. 发明申请
    • FLOATING SLIT VALVE FOR TRANSFER CHAMBER INTERFACE
    • 浮动接口的浮动阀门
    • US20110287374A1
    • 2011-11-24
    • US13195592
    • 2011-08-01
    • John M. WhiteShinichi KuritaTakayuki Matsumoto
    • John M. WhiteShinichi KuritaTakayuki Matsumoto
    • F26B11/00
    • F16K51/02Y10S438/905Y10T29/49412
    • The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.
    • 本发明通常包括用于与室连接的浮动狭缝阀。 浮动狭缝阀相对于诸如室的另一物体移动或“浮动”。 狭缝阀可以联接在两个腔室之间。 当与狭缝阀联接的室被加热时,狭缝阀也可以通过传导加热。 当狭缝阀被加热时,它可以热膨胀。 当在室中抽真空时,狭缝阀可能由于真空偏转而变形。 通过在室和狭缝阀之间设置低摩擦材料间隔件,狭缝阀在热膨胀/收缩和/或真空偏转期间可能不会摩擦室,因此不会产生不期望的颗粒污染物。 此外,穿过腔室钻出的狭缝阀可以被定尺寸以适应狭缝阀的热膨胀/收缩和真空偏转。
    • 6. 发明授权
    • Floating slit valve for transfer chamber interface
    • 用于传送室接口的浮动狭缝阀
    • US07988129B2
    • 2011-08-02
    • US12040291
    • 2008-02-29
    • John M. WhiteShinichi KuritaTakayuki Matsumoto
    • John M. WhiteShinichi KuritaTakayuki Matsumoto
    • F16K3/00
    • F16K51/02Y10S438/905Y10T29/49412
    • The present invention generally comprises a floating slit valve for interfacing with a chamber. A floating slit valve moves or “floats” relative to another object such as a chamber. The slit valve may be coupled between two chambers. When a chamber coupled with the slit valve is heated, the slit valve may also be heated by conduction. As the slit valve is heated, it may thermally expand. When a vacuum is drawn in a chamber, the slit valve may deform due to vacuum deflection. By disposing a low friction material spacer between the chamber and the slit valve, the slit valve may not rub against the chamber during thermal expansion/contraction and/or vacuum deflection and thus, may not generate undesirable particle contaminants. Additionally, slots drilled through the chamber for coupling the slit valve to the chamber may be sized to accommodate thermal expansion/contraction and vacuum deflection of the slit valve.
    • 本发明通常包括用于与室连接的浮动狭缝阀。 浮动狭缝阀相对于诸如室的另一物体移动或“浮动”。 狭缝阀可以联接在两个腔室之间。 当与狭缝阀联接的室被加热时,狭缝阀也可以通过传导加热。 当狭缝阀被加热时,它可以热膨胀。 当在室中抽真空时,狭缝阀可能由于真空偏转而变形。 通过在室和狭缝阀之间设置低摩擦材料间隔件,狭缝阀在热膨胀/收缩和/或真空偏转期间可能不会摩擦室,因此不会产生不期望的颗粒污染物。 此外,穿过腔室钻出的狭缝阀可以被定尺寸以适应狭缝阀的热膨胀/收缩和真空偏转。
    • 8. 发明申请
    • SLIT VALVE CONTROL
    • 滑阀控制
    • US20100051111A1
    • 2010-03-04
    • US12538237
    • 2009-08-10
    • Takayuki MatsumotoShinichi Kurita
    • Takayuki MatsumotoShinichi Kurita
    • F15D1/00F16K3/00
    • F16K3/188F16K51/02H01L21/67772Y10T137/0391
    • Embodiments disclosed herein generally relate to methods for sealing a processing chamber with a slit valve door. The door initially raises from a position below the opening for the processing chamber to a raised position. The door then expands until an O-ring that is on the door just touches the sealing surface. Then, the door expands again to compress the O-ring against the sealing surface. The door expands by flowing a gas into the interior volume of the door. By controlling the pressure buildup within the door, the speed with which the door expands is controlled to ensure that the door gently contacts the sealing surface and then compresses against the sealing surface. Thus, the door may be prevented from contacting the sealing surface with too great a force that may jolt or shake the processing chamber and produce undesired particles that may contaminate the process.
    • 本文公开的实施例通常涉及用狭缝阀门密封处理室的方法。 门最初从处理室的开口下方的位置升高到升高位置。 门然后膨胀,直到门上的O形圈刚好碰到密封面。 然后,门再次膨胀以将O形环压靠在密封表面上。 通过将气体流入门的内部空间来扩大门。 通过控制门内的压力积分,控制门膨胀的速度,以确保门轻轻地接触密封表面,然后压靠密封表面。 因此,可以防止门用太大的力使密封表面接触,该力可能使处理室震动或摇晃并产生可能污染该过程的不期望的颗粒。