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    • 6. 发明授权
    • Method and apparatus for manufacturing diamond shaped chips
    • 用于制造菱形芯片的方法和装置
    • US07961932B2
    • 2011-06-14
    • US11865728
    • 2007-10-01
    • Robert J. AllenJohn M. CohnScott W. GouldPeter A. HabitzJuergen KoehlGustavo E. TellezIvan L. WemplePaul S. Zuchowski
    • Robert J. AllenJohn M. CohnScott W. GouldPeter A. HabitzJuergen KoehlGustavo E. TellezIvan L. WemplePaul S. Zuchowski
    • G06K9/00
    • H01L27/0207
    • In a first aspect, an inventive apparatus for imaging a chip on a wafer includes a combined diamond chip image and kerf image having a plurality of sloped sides. The combined diamond chip image and kerf image includes a diamond chip image comprising a plurality of chip image rows that are parallel to at least one diagonal of the diamond chip image, and includes a kerf image adjacent to the diamond chip image. The kerf image comprises at least one kerf image row that is parallel to the at least one diagonal of the diamond chip image. The apparatus further includes a blocking material extending from the combined diamond chip image and kerf image to at least a periphery of an exposure field of a stepper. In a second aspect the imaging apparatus comprises an n-sided polygon-shaped combined chip image and kerf image. Also provided are inventive methods of manufacturing chips, and wafers manufactured in accordance with the inventive methods.
    • 在第一方面中,用于对晶片上的芯片进行成像的本发明的装置包括具有多个倾斜侧面的组合金刚石芯片图像和切口图像。 组合的金刚石芯片图像和切口图像包括金刚石芯片图像,其包括与金刚石芯片图像的至少一个对角线平行的多个芯片图像行,并且包括与金刚石芯片图像相邻的切痕图像。 切口图像包括平行于金刚石切片图像的至少一个对角线的至少一个切痕图像行。 该装置还包括从组合的金刚石片图像和切痕图像延伸到步进器的曝光场的至少周边的阻挡材料。 在第二方面,成像装置包括n侧多边形组合芯片图像和切口图像。 还提供了制造芯片的创造性方法和根据本发明方法制造的晶片。
    • 7. 发明授权
    • Method and apparatus for manufacturing diamond shaped chips
    • 用于制造菱形芯片的方法和装置
    • US07289659B2
    • 2007-10-30
    • US10250295
    • 2003-06-20
    • Robert J. AllenJohn M. CohnScott W. GouldPeter A. HabitzJuergen KoehlGustavo E. TellezIvan L. WemplePaul S. Zuchowski
    • Robert J. AllenJohn M. CohnScott W. GouldPeter A. HabitzJuergen KoehlGustavo E. TellezIvan L. WemplePaul S. Zuchowski
    • G06K9/00
    • H01L27/0207
    • In a first aspect, an inventive apparatus for imaging a chip on a wafer includes a combined diamond chip image and kerf image having a plurality of sloped sides. The combined diamond chip image and kerf image includes a diamond chip image comprising a plurality of chip image rows that are parallel to at least one diagonal of the diamond chip image, and includes a kerf image adjacent to the diamond chip image. The kerf image comprises at least one kerf image row that is parallel to the at least one diagonal of the diamond chip image. The apparatus further includes a blocking material extending from the combined diamond chip image and kerf image to at least a periphery of an exposure field of a stepper. In a second aspect the imaging apparatus comprises an n-sided polygon-shaped combined chip image and kerf image. Also provided are inventive methods of manufacturing chips, and wafers manufactured in accordance with the inventive methods.
    • 在第一方面中,用于对晶片上的芯片进行成像的本发明的装置包括具有多个倾斜侧面的组合金刚石芯片图像和切口图像。 组合的金刚石芯片图像和切口图像包括金刚石芯片图像,其包括与金刚石芯片图像的至少一个对角线平行的多个芯片图像行,并且包括与金刚石芯片图像相邻的切痕图像。 切口图像包括平行于金刚石切片图像的至少一个对角线的至少一个切痕图像行。 该装置还包括从组合的金刚石片图像和切痕图像延伸到步进器的曝光场的至少周边的阻挡材料。 在第二方面,成像装置包括n侧多边形组合芯片图像和切口图像。 还提供了制造芯片的创造性方法和根据本发明方法制造的晶片。
    • 10. 发明授权
    • Method for prediction random defect yields of integrated circuits with accuracy and computation time controls
    • 用于精确计算时间控制的集成电路预测随机缺陷产量的方法
    • US06738954B1
    • 2004-05-18
    • US09636478
    • 2000-08-10
    • Archibald J. AllenWilm E. DonathAlan D. DziedzicMark A. LavinDaniel N. MaynardDennis M. NewnsGustavo E. Tellez
    • Archibald J. AllenWilm E. DonathAlan D. DziedzicMark A. LavinDaniel N. MaynardDennis M. NewnsGustavo E. Tellez
    • G06F1750
    • H01L22/20G01R31/31705
    • A method of computing a manufacturing yield of an integrated circuit having device shapes includes sub-dividing the integrated circuit into failure mechanism subdivisions (each of the failure mechanism subdivisions includes one or more failure mechanism and each of the failure mechanisms includes one or more defect mechanisms), partitioning the failure mechanism subdivisions by area into partitions, pre-processing the device shapes in each partition, computing an initial average number of faults for each of the failure mechanisms and for each partition by numerical integration of an average probability of failure of each failure mechanism, (the numerical integration produces a list of defect sizes for each defect mechanism, and the computing of the initial average includes setting a maximum integration error limit, a maximum sample size for a population of each defect size, and a maximum number of allowable faults for each failure mechansim), and computing a final average number of faults for the integrated circuit by iterativelly reducing a statistical error of the initial average number of faults for each of the failure mechanisms until the statistical error is below an error limit.
    • 一种计算具有装置形状的集成电路的制造成品率的方法包括将集成电路分为故障机构细分(每个故障机构细分包括一个或多个故障机制,并且每个故障机制包括一个或多个缺陷机构 ),将故障机制细分为每个区域的分区,预处理每个分区中的设备形状,通过对每个分区的每个故障机制和每个分区的平均故障概率的数值积分计算每个故障机制的初始平均故障数 故障机制(数值积分产生每个缺陷机制的缺陷尺寸列表,初始平均值的计算包括设置最大积分误差极限,每个缺陷尺寸的总体最大样本量, 每个故障的可允许故障mechansim),并计算最终的平均数fau 通过迭代地减少每个故障机制的初始平均故障数量的统计误差,直到统计误差低于误差极限为止,用于集成电路。