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    • 6. 发明授权
    • Method and apparatus for pressure control and flow measurement
    • 用于压力控制和流量测量的方法和装置
    • US07204155B2
    • 2007-04-17
    • US11475805
    • 2006-06-27
    • John LaneRalph H. M. StraubeChris Melcer
    • John LaneRalph H. M. StraubeChris Melcer
    • G01F1/00
    • H01J37/32449C23C16/45557C23C16/466H01J37/3244
    • A method and apparatus for gas control is provided. The apparatus may be used for controlling gases delivered to a chamber, controlling the chamber pressure, controlling the delivery of backside gas between a substrate and substrate support and the like. In one embodiment, an apparatus for controlling gas control includes at least a first flow sensor having a control valve, a first pressure sensor and at least a second pressure sensor. An inlet of the first flow sensor is adapted for coupling to a gas supply. A control valve is coupled to an outlet of the flow sensor. The first pressure sensor is adapted to sense a metric indicative of the pressure upstream of the first flow sensor. The second pressure sensor is adapted to sense a metric indicative of the pressure downstream of the control valve.
    • 提供了一种用于气体控制的方法和装置。 该装置可以用于控制输送到室的气体,控制室压力,控制衬底和衬底支撑件之间的背面气体的传送等。 在一个实施例中,用于控制气体控制的装置包括至少第一流量传感器,其具有控制阀,第一压力传感器和至少第二压力传感器。 第一流量传感器的入口适于联接到气体供应。 控制阀联接到流量传感器的出口。 第一压力传感器适于感测指示第一流量传感器上游的压力的度量。 第二压力传感器适于感测指示控制阀下游的压力的量度。
    • 7. 发明申请
    • Method and apparatus for treating fluids
    • 用于处理流体的方法和装置
    • US20070051685A1
    • 2007-03-08
    • US11304348
    • 2005-12-15
    • Kenneth WittmerWalter CrewsonJohn Lane
    • Kenneth WittmerWalter CrewsonJohn Lane
    • C02F1/48
    • C02F1/484C02F2201/4613C02F2201/483C02F2209/005C02F2303/22H03K3/57H03K17/79
    • A method and apparatus for treating a fluid to destroy, remove, or reduce undesirable agents, such as microorganisms, particles or ions, contained in the fluid and/or to inhibit the formation of scale are disclosed. The invention includes an apparatus for treating a fluid to destroy, remove, or reduce undesirable agents, such as microorganisms, particles, or ions, contained in the fluid and/or to inhibit the formation of scale. The apparatus can include an open fluid directional means or conduit. The preferred open fluid directional means is a conduit manufactured of resilient, corrosion-resistant material. The apparatus is attached to a power source and has a controller means. The controller means is desirably a microprocessor and can include a switching means for regulating the current to the apparatus. However, simpler circuits and components can be used for the controller means. The apparatus includes a field generating means. The field generating means forms a treatment field. The treatment field is a magnetic field and/or an electrical field in an effective dose sufficient to treat the fluid. The effective dose is determined by the exposure time(s) and strength(s) of the treatment field(s) and the concentration of contaminants present in the fluid subjected to the treatment.
    • 公开了一种用于处理流体以破坏,去除或减少包含在流体中的不期望的试剂,例如微生物,颗粒或离子和/或抑制水垢形成的方法和装置。 本发明包括一种用于处理流体以破坏,去除或减少包含在流体中的不期望的物质,例如微生物,颗粒或离子和/或抑制水垢形成的装置。 该装置可以包括开放的流体定向装置或导管。 优选的开放流体定向装置是由弹性的耐腐蚀材料制成的导管。 该装置附接到电源并具有控制装置。 控制器装置理想地是微处理器,并且可以包括用于调节到设备的电流的开关装置。 然而,更简单的电路和组件可以用于控制器装置。 该装置包括场产生装置。 场产生装置形成治疗场。 治疗场是具有足以治疗流体的有效剂量的磁场和/或电场。 有效剂量由处理场的暴露时间和强度以及存在于经受处理的流体中的污染物的浓度决定。