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    • 6. 发明授权
    • Method and apparatus for improving silicon processing efficiency
    • 提高硅处理效率的方法和装置
    • US07080742B2
    • 2006-07-25
    • US10796351
    • 2004-03-09
    • Arvid Neil ArvidsonTodd Stanley GrahamKathryn Elizabeth MessnerChris Tim SchmidtTerence Lee Horstman
    • Arvid Neil ArvidsonTodd Stanley GrahamKathryn Elizabeth MessnerChris Tim SchmidtTerence Lee Horstman
    • B07B13/07
    • G01N15/0272B07B13/02B07B13/04C30B15/02G01N2015/0288
    • A method for processing polycrystalline silicon workpieces to form size distributions of polycrystalline silicon pieces suitable for use in a Czochralski-type process includes: (1) preparing a polycrystalline silicon workpiece by a chemical vapor deposition process; (2) fracturing the polycrystalline silicon workpiece into a mixture of polycrystalline silicon pieces, where the polycrystalline silicon pieces have varying sizes; and (3) sorting the mixture of polycrystalline silicon pieces into at least two size distributions. Step (2) may be carried out by a thermal shock process. Step (3) may be carried out using a rotary indent classifier. A rotary indent classifier for performing the method includes: (i) a rotating cylinder having a circumferential edge with indents arrayed in increasing size from a first end of the cylinder to a second end of the cylinder, and (ii) a conveyor running longitudinally adjacent the cylinder, for conveying silicon pieces from the first end of the cylinder to the second end of the cylinder.
    • 一种用于处理多晶硅工件以形成适用于切克劳斯基型工艺的多晶硅片的尺寸分布的方法包括:(1)通过化学气相沉积工艺制备多晶硅工件; (2)将多晶硅工件压裂成多晶硅片的混合物,其中多晶硅片具有不同的尺寸; 和(3)将多晶硅片的混合物分选成至少两个尺寸分布。 步骤(2)可以通过热冲击过程进行。 步骤(3)可以使用旋转凹口分级器进行。 用于执行该方法的旋转凹口分级器包括:(i)旋转圆柱体,其具有沿圆柱体的第一端至气缸的第二端的尺寸排列的凹部的周向边缘,以及(ii)纵向相邻的输送器 气缸,用于将硅片从气缸的第一端输送到气缸的第二端。