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1. 发明申请

US20230020440A1 OPTICAL COUPLER 有权
公开(公告)号：US20230020440A1
公开(公告)日：2023-01-19
申请号：US17955378
申请日：2022-09-28
申请人： John Heck , Harel Frish , Hari Mahalingam , Haisheng Rong
发明人： John Heck , Harel Frish , Hari Mahalingam , Haisheng Rong
IPC分类号： G02B6/30
摘要： Embodiments may include or relate to an optical coupler. The optical coupler may include a silicon nitride (SiN) waveguide. The waveguide may be formed by placing SiN on an epitaxially grown silicon structure that is then removed subsequent to placement of the SiN. Other embodiments may be described and/or claimed.

2. 发明申请

US20210119710A1 OPTICAL COHERENT RECEIVER ON A CHIP 有权
公开(公告)号：US20210119710A1
公开(公告)日：2021-04-22
申请号：US17133360
申请日：2020-12-23
申请人： Meer Nazmus Sakib , Peicheng Liao , Ranjeet Kumar , Duanni Huang , Haisheng Rong , Harel Frish , John Heck , Chaoxuan Ma , Hao Li , Ganesh Balamurugan
发明人： Meer Nazmus Sakib , Peicheng Liao , Ranjeet Kumar , Duanni Huang , Haisheng Rong , Harel Frish , John Heck , Chaoxuan Ma , Hao Li , Ganesh Balamurugan
IPC分类号： H04B10/61
摘要： Embodiments described herein may be related to apparatuses, processes, and techniques related to coherent optical receivers, including coherent receivers with integrated all-silicon waveguide photodetectors and tunable local oscillators implemented within CMOS technology. Embodiments are also directed to tunable silicon hybrid lasers with integrated temperature sensors to control wavelength. Embodiments are also directed to post-process phase correction of optical hybrid and nested I/Q modulators. Embodiments are also directed to demultiplexing photodetectors based on multiple microrings. In embodiments, all components may be implements on a silicon substrate. Other embodiments may be described and/or claimed.

3. 发明申请

US20190339585A1 SEMICONDUCTOR PHOTONIC DEVICES USING PHASE CHANGE MATERIALS 审中-公开
公开(公告)号：US20190339585A1
公开(公告)日：2019-11-07
申请号：US16517315
申请日：2019-07-19
申请人： John Heck , Harel Frish , Derchang Kau , Charles Dennison , Haisheng Rong , Jeffrey Driscoll , Jonathan K. Doylend , George A. Ghiurcan , Michael E. Favaro
发明人： John Heck , Harel Frish , Derchang Kau , Charles Dennison , Haisheng Rong , Jeffrey Driscoll , Jonathan K. Doylend , George A. Ghiurcan , Michael E. Favaro
IPC分类号： G02F1/295
摘要： Embodiments include apparatuses, methods, and systems including a semiconductor photonic device having a substrate, a waveguide disposed above the substrate, a phase change layer disposed above the waveguide, and a heater disposed above the phase change layer. The waveguide has a modifiable refractive index based at least in part on a state of a phase change material included in the phase change layer. The phase change material of the phase change layer is in a first state of a set of states, and the waveguide has a first refractive index determined based on the first state of the phase change material. The heater is to generate heat to transform the phase change material to a second state of the set of states, and the waveguide has a second refractive index determined based on the second state of the phase change material. Other embodiments may also be described and claimed.

4. 发明申请

US20230019747A1 HYBRID LASER ARCHITECTURE WITH ASYMMETRIC METAL SHUNT 有权
公开(公告)号：US20230019747A1
公开(公告)日：2023-01-19
申请号：US17952083
申请日：2022-09-23
申请人： Richard Jones , Pierre Doussiere , Aditi Mallik , Harel Frish , John Heck , Saeed Fathololoumi
发明人： Richard Jones , Pierre Doussiere , Aditi Mallik , Harel Frish , John Heck , Saeed Fathololoumi
IPC分类号： H01S5/024 , H01S5/22 , H01S5/02
摘要： Embodiments herein relate to an apparatus for use in a hybrid laser. The apparatus may include a silicon substrate and a waveguide to facilitate transmission of an optical signal in a first direction that is orthogonal to a surface of the silicon substrate. The apparatus may further include a metal shunt that is less than or equal to 10 micrometers from the waveguide in a second direction that is orthogonal to the surface of the silicon substrate and orthogonal to the first direction. Other embodiments may be described and/or claimed.

5. 发明授权

US09791641B2 Inverted 45° mirror for photonic integrated circuits 有权
公开(公告)号：US09791641B2
公开(公告)日：2017-10-17
申请号：US14884430
申请日：2015-10-15
申请人： John Heck , Haisheng Rong
发明人： John Heck , Haisheng Rong
IPC分类号： G02B6/12 , H01L21/00 , G02B6/26 , H01L21/306 , G02B6/42 , G02B6/122 , G02B6/136
CPC分类号： G02B6/4214 , G02B6/122 , G02B6/136 , G02B6/26 , G02B6/42 , G02B6/4208 , G02B2006/12104 , H01L21/30604
摘要： Inverted 45° semiconductor mirrors as vertical optical couplers for PIC chips, particularly optical receivers and transmitters. An inverted 45° semiconductor mirror functions to couple light between a plane in the PIC chip defined by thin film layers and a direction normal to a top surface of the PIC chip where it may be generated or collected by an off-chip component, such as a wire terminal. In an exemplary embodiment, a (110) plane of a cubic crystalline semiconductor may provide a 45° facet inverted relative to a (100) surface of the semiconductor from which light is to be emitted. In further embodiments, a (110) plane may be exposed by undercutting a device layer of a semiconductor on insulator (SOI) substrate. Alternatively, a pre-etched substrate surface may be bonded to a handling wafer, thinned, and then utilized for PIC waveguide formation.

6. 发明申请

US20180059446A1 OPTICAL ISO-MODULATOR 审中-公开
公开(公告)号：US20180059446A1
公开(公告)日：2018-03-01
申请号：US15250745
申请日：2016-08-29
申请人： Woosung Kim , John Heck , Haisheng Rong , Jeffrey B. Driscoll , Kimchau N. Nguyen
发明人： Woosung Kim , John Heck , Haisheng Rong , Jeffrey B. Driscoll , Kimchau N. Nguyen
IPC分类号： G02F1/095 , G02B6/12 , G02F1/09 , G02F1/00
CPC分类号： G02F1/0955 , G02B6/12002 , G02B6/12004 , G02B6/125 , G02B6/126 , G02B6/30 , G02F1/0036 , G02F1/092
摘要： Apparatuses, methods and storage medium associated with an optical iso-modulator are disclosed herein. In embodiments, an apparatus may include an optical waveguide formed on one or more layers, such as an isolation layer and a handling layer. A modulator driver may be coupled to a first side of the one or more layers. A magneto-optical (MO) die may be coupled to a second side of the one or more layers that is opposite the first side. Other embodiments may be disclosed and/or claimed.

7. 发明申请

US20110073972A1 VERTICAL MIRROR IN A SILICON PHOTONIC CIRCUIT 有权
标题翻译：硅胶电路中的垂直镜
公开(公告)号：US20110073972A1
公开(公告)日：2011-03-31
申请号：US12567601
申请日：2009-09-25
申请人： John Heck , Ansheng Liu , Michael T. Morse , Haisheng Rong
发明人： John Heck , Ansheng Liu , Michael T. Morse , Haisheng Rong
IPC分类号： H01L31/0232 , H01L21/306
CPC分类号： H01L31/02327 , G02B6/4214
摘要： A vertical total internal reflection (TIR) mirror and fabrication thereof is made by creating a re-entrant profile using crystallographic silicon etching. Starting with an SOI wafer, a deep silicon etch is used to expose the buried oxide layer, which is then wet-etched (in HF), opening the bottom surface of the Si device layer. This bottom silicon surface is then exposed so that in a crystallographic etch, the resulting shape is a re-entrant trapezoid with facets These facets can be used in conjunction with planar silicon waveguides to reflect the light upwards based on the TIR principle. Alternately, light can be coupled into the silicon waveguides from above the wafer for such purposes as wafer level testing.
摘要翻译：垂直全内反射（TIR）镜及其制造是通过使用晶体硅蚀刻创建入门轮廓而制成的。从SOI晶片开始，使用深硅蚀刻来暴露掩埋氧化物层，然后将其湿法蚀刻（在HF中），打开Si器件层的底表面。然后将该底部硅表面暴露，使得在晶体刻蚀中，所得到的形状是具有刻面的重入梯形。这些刻面可以与平面硅波导结合使用以基于TIR原理向上反射光。或者，光可以从晶片上方耦合到硅波导中，用于晶片级测试。

8. 发明授权

US11143818B2 Multi-mode interference (MMI) based laser devices for heterogeneous platforms 有权
公开(公告)号：US11143818B2
公开(公告)日：2021-10-12
申请号：US16457483
申请日：2019-06-28
申请人： Meer Nazmus Sakib , Guan-Lin Su , John Heck , Haisheng Rong , Ming C. Wu
发明人： Meer Nazmus Sakib , Guan-Lin Su , John Heck , Haisheng Rong , Ming C. Wu
IPC分类号： G02B6/28 , H01S5/40 , G02B6/12 , H01S5/14 , H01S3/108 , H01S5/10
摘要： Embodiments include apparatuses, methods, and systems including a laser device having a 1×3 MMI coupler within a semiconductor layer. A front arm is coupled to the MMI coupler and terminated by a front reflector. In addition, a coarse tuning arm is coupled to the MMI coupler and terminated by a first back reflector for coarse wavelength tuning, a fine tuning arm is coupled to the MMI coupler and terminated by a second back reflector for fine wavelength tuning, and a SMSR and power tuning arm is coupled to the MMI coupler and terminated by a third back reflector. A gain region is above the front arm and above the semiconductor layer. Other embodiments may also be described and claimed.

9. 发明授权

US09482535B2 Integrated silicon optomechanical gyroscopes (OMGs) 有权
标题翻译：集成硅光机械陀螺仪（OMG）
公开(公告)号：US09482535B2
公开(公告)日：2016-11-01
申请号：US13996669
申请日：2011-12-23
申请人： John Heck , Haisheng Rong , Richard Jones
发明人： John Heck , Haisheng Rong , Richard Jones
IPC分类号： G01C19/66 , G01C19/5684
CPC分类号： G01C19/661 , G01C19/5684
摘要： A system having an optomechanical gyroscope device. An optomechanical disk acts as an optical ring resonator and a mechanical disk resonator. A drive laser generates an optical drive signal. A drive channel acts as a waveguide for the optical drive signal and includes drive electrodes in a first proximity with respect to the optomechanical disk. The drive electrodes to excite the ring by evanescent coupling. A drive photodetector is configured to receive an output optical signal from the drive channel. A sense laser generates a optical sense signal. A sense channel acts as a waveguide for the optical sense signal and includes sense electrodes in a second proximity with respect to the optomechanical disk. A sense photodetector is configured to receive an output optical signal from the sense channel.
摘要翻译：具有光学陀螺仪装置的系统。光学机械盘用作光环谐振器和机械盘谐振器。驱动激光器产生光驱动信号。驱动通道用作用于光驱动信号的波导，并且包括相对于机电盘第一接近的驱动电极。驱动电极通过ev逝耦合激发环。驱动光电检测器被配置为从驱动通道接收输出光信号。感测激光产生光学感测信号。感测通道用作光学感测信号的波导，并且包括相对于光学机械盘的第二接近度的感测电极。感测光电检测器被配置为从感测通道接收输出光信号。

10. 发明申请

US20130293898A1 INTEGRATED SILICON OPTOMECHANICAL GYROSCOPES (OMGS) 有权
标题翻译：综合硅光电陀螺（OMGS）
公开(公告)号：US20130293898A1
公开(公告)日：2013-11-07
申请号：US13996669
申请日：2011-12-23
申请人： John Heck , Haisheng Rong , Richard Jones
发明人： John Heck , Haisheng Rong , Richard Jones
IPC分类号： G01C19/66
CPC分类号： G01C19/661 , G01C19/5684
摘要： A system having an optomechanical gyroscope device. An optomechanical disk acts as an optical ring resonator and a mechanical disk resonator. A drive laser generates an optical drive signal. A drive channel acts as a waveguide for the optical drive signal and includes drive electrodes in a first proximity with respect to the optomechanical disk. The drive electrodes to excite the ring by evanescent coupling. A drive photodetector is configured to receive an output optical signal from the drive channel. A sense laser generates a optical sense signal. A sense channel acts as a waveguide for the optical sense signal and includes sense electrodes in a second proximity with respect to the optomechanical disk. A sense photodetector is configured to receive an output optical signal from the sense channel.
摘要翻译：具有光学陀螺仪装置的系统。光学机械盘用作光环谐振器和机械盘谐振器。驱动激光器产生光驱动信号。驱动通道用作用于光驱动信号的波导，并且包括相对于机电盘第一接近的驱动电极。驱动电极通过ev逝耦合激发环。驱动光电检测器被配置为从驱动通道接收输出光信号。感测激光产生光学感测信号。感测通道用作光学感测信号的波导，并且包括相对于光学机械盘的第二接近度的感测电极。感测光电检测器被配置为从感测通道接收输出光信号。

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