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1. 发明授权

US5631803A Erosion resistant electrostatic chuck with improved cooling system 失效
标题翻译：耐腐蚀静电吸盘具有改进的冷却系统
公开(公告)号：US5631803A
公开(公告)日：1997-05-20
申请号：US369237
申请日：1995-01-06
申请人： John F. Cameron , Joseph F. Salfelder , Chandra Deshpandey
发明人： John F. Cameron , Joseph F. Salfelder , Chandra Deshpandey
IPC分类号： B23Q3/15 , H01L21/02 , H01L21/311 , H01L21/3213 , H01L21/683 , H02N13/00
CPC分类号： H01L21/02071 , H01L21/31138 , H01L21/6831
摘要： An electrostatic chuck (20) for holding a substrate (40) in a process chamber (50) comprises a base (25) supporting a resilient insulator (30). The insulator (30) comprises (i) an electrode (35) embedded therein; (ii) a top surface (34) with a peripheral edge (32); and (iii) cooling grooves (45) for holding coolant in the top surface (34), the tips (125) of the cooling grooves (45) and the peripheral edge (32) of the insulator (30) defining an edge gap (130) having a width w. The width w of the edge gap (130) is sized sufficiently small that the coolant in the grooves (45) cools the perimeter (120) of the substrate (40) held on the chuck (20). The insulator (30) is sufficiently thick that when a substrate (40) is electrostatically held on the chuck (20) and coolant is held in the cooling grooves (45), the insulator (30) in the edge gap (130) resiliently conforms to the substrate (40) so that substantially no coolant leaks out from the tips (125) of the cooling grooves (45). Preferably, the coolant grooves (45) do not cut into the electrode (35).
摘要翻译：用于将基板（40）保持在处理室（50）中的静电卡盘（20）包括支撑弹性绝缘体（30）的基座（25）。绝缘体（30）包括（i）嵌入其中的电极（35）（ii）具有周边边缘（32）的顶表面（34）; 和（iii）用于在顶表面（34）中保持冷却剂的冷却槽（45），冷却槽（45）的顶端（125）和绝缘体（30）的周边边缘（32）限定边缘间隙 130）具有宽度w。边缘间隙（130）的宽度w的尺寸足够小，使得凹槽（45）中的冷却剂冷却保持在卡盘（20）上的基底（40）的周边（120）。绝缘体（30）足够厚，当基板（40）被静电保持在卡盘（20）上并且冷却剂被保持在冷却槽（45）中时，边缘间隙（130）中的绝缘体（30）弹性地符合到基板（40），使得基本上没有冷却剂从冷却槽（45）的末端（125）泄漏出来。优选地，冷却剂槽（45）不切入电极（35）。

2. 发明授权

US5636098A Barrier seal for electrostatic chuck 失效
标题翻译：静电卡盘阻隔密封
公开(公告)号：US5636098A
公开(公告)日：1997-06-03
申请号：US439010
申请日：1995-05-11
申请人： Joseph Salfelder , Dennis Grimard , John F. Cameron , Chandra Deshpandey , Robert Ryan , Michael G. Chafin
发明人： Joseph Salfelder , Dennis Grimard , John F. Cameron , Chandra Deshpandey , Robert Ryan , Michael G. Chafin
IPC分类号： H02N13/00 , H01L21/683
CPC分类号： H01L21/6833 , H01L21/6831
摘要： An erosion resistant electrostatic chuck 20 for holding a substrate 45 having a peripheral edge 50, in an erosive environment, comprises an electrostatic member 25 including (i) an electrode 30, and (ii) an insulator 35 covering the electrode. A barrier 55 is circumferentially disposed about the electrostatic member 25. The barrier 55 comprises a first contact surface 60 capable of being pressed against the peripheral edge 50 of the substrate 45 to form a seal around the substrate 45 to reduce exposure of the electrostatic member 25 of the chuck 20 to the erosive environment.
摘要翻译：用于在侵蚀环境中保持具有周边边缘50的基板45的防腐蚀静电卡盘20包括静电部件25，静电部件25包括（i）电极30和（ii）覆盖电极的绝缘体35。阻挡件55围绕静电部件25周向设置。阻挡件55包括第一接触表面60，该第一接触表面60能够抵靠基板45的周边边缘50，以围绕基板45形成密封，以减少静电部件25的暴露的卡盘20到腐蚀环境。

3. 发明授权

US06557248B1 Method of fabricating an electrostatic chuck 失效
标题翻译：制造静电卡盘的方法
公开(公告)号：US06557248B1
公开(公告)日：2003-05-06
申请号：US09087332
申请日：1998-05-29
申请人： Shamouil Shamouilian , Manoocher Birang , John F. Cameron , Chandra Deshpandey , Alfred Goldspeil , Ron Northrup , Semyon Sherstinsky , Sasson Someth
发明人： Shamouil Shamouilian , Manoocher Birang , John F. Cameron , Chandra Deshpandey , Alfred Goldspeil , Ron Northrup , Semyon Sherstinsky , Sasson Someth
IPC分类号： H01R4300
CPC分类号： C23C16/45521 , C23C16/4586 , H01L21/67103 , H01L21/6831 , H01L21/6833 , H02N13/00 , Y10T29/49117 , Y10T279/23
摘要： A method of fabricating an electrostatic member 33 for holding a substrate 45 in a process chamber 80 containing erosive process gas. The method comprises the steps of forming an electrostatic member 33 comprising an insulator or dielectric layer 35 covering an electrically conductive layer, and shaping the electrostatic member 33 to form a dielectric covered electrode and an electrical connector 55 attached to the dielectric covered electrode 50 to conduct charge to the dielectric covered electrode 50.
摘要翻译：一种制造静电部件33的方法，用于将基板45保持在包含腐蚀性处理气体的处理室80中。该方法包括以下步骤：形成包括覆盖导电层的绝缘体或电介质层35的静电部件33，并且使静电部件33成形以形成介电覆盖电极和连接到电介质被覆电极50的电连接器55 充电到介电覆盖电极50。

4. 发明授权

US5592358A Electrostatic chuck for magnetic flux processing 失效
标题翻译：静磁卡盘用于磁通加工
公开(公告)号：US5592358A
公开(公告)日：1997-01-07
申请号：US276841
申请日：1994-07-18
申请人： Shamouil Shamouilian , John F. Cameron , Chandra Deshpandey , Yuh-Jia Su
发明人： Shamouil Shamouilian , John F. Cameron , Chandra Deshpandey , Yuh-Jia Su
IPC分类号： H02N13/00 , H01L21/683
CPC分类号： H01L21/6831 , H01L21/6833 , Y10T29/49117
摘要： An electrostatic chuck 20 for holding substrates 42 in a process chamber 40 containing a magnetic flux 43 comprises a base 22 having an upper surface adapted to support a substrate 42 thereon. An insulator 26 with an electrode 24 therein, is on the base 22. A magnetic shunt 34 comprising a ferromagnetic material is positioned (i) either on the base 22, or (ii) in the insulator 26, or (iii) directly below, and contiguous to, the base 22.
摘要翻译：用于将基板42保持在包含磁通43的处理室40中的静电卡盘20包括具有适于在其上支撑基板42的上表面的基座22。其中具有电极24的绝缘体26位于基座22上。包括铁磁材料的磁分路器34（i）位于基座22上，或（ii）在绝缘体26中，或（iii）直接在下方，并且与基座22相邻。

5. 发明授权

US5996218A Method of forming an electrostatic chuck suitable for magnetic flux processing 失效
标题翻译：形成适合磁通加工的静电卡盘的方法
公开(公告)号：US5996218A
公开(公告)日：1999-12-07
申请号：US726445
申请日：1996-10-04
申请人： Shamouil Shamouilian , John F. Cameron , Chandra Deshpandey , Yuh-Jia Su
发明人： Shamouil Shamouilian , John F. Cameron , Chandra Deshpandey , Yuh-Jia Su
IPC分类号： H02N13/00 , H01L21/683 , H01R43/00
CPC分类号： H01L21/6831 , H01L21/6833 , Y10T29/49117
摘要： A method of forming an electrostatic chuck 20 for holding substrates 42 in a process chamber 40 containing a magnetic flux 43 is described. The method comprises the steps of forming a base 22 for supporting a substrate 42. An insulator 26 with an electrode 24 therein, is formed on the base 22. A magnetic shunt 34 comprising a ferromagnetic material is formed either (i) on the base 22, or (ii) in the insulator 26, or (iii) directly below, and contiguous to, the base 22.
摘要翻译：描述了形成用于将基板42保持在包含磁通43的处理室40中的静电卡盘20的方法。该方法包括形成用于支撑基底42的基底22的步骤。在基底22上形成有其中具有电极24的绝缘体26.包含铁磁材料的磁分路34（i）在基底22上形成，或（ii）在绝缘体26中，或（iii）直接在基座22的下方并与基座22相邻。

6. 发明授权

US6023405A Electrostatic chuck with improved erosion resistance 失效
标题翻译：具有改善耐腐蚀性能的静电吸盘
公开(公告)号：US6023405A
公开(公告)日：2000-02-08
申请号：US24917
申请日：1998-02-17
申请人： Shamouil Shamouilian , Manoocher Birang , John F. Cameron , Chandra Deshpandey , Alfred Goldspeil , Ron Northrup , Semyon Shertinsky , Sasson Somekh
发明人： Shamouil Shamouilian , Manoocher Birang , John F. Cameron , Chandra Deshpandey , Alfred Goldspeil , Ron Northrup , Semyon Shertinsky , Sasson Somekh
IPC分类号： B25J15/06 , C23C16/44 , C23C16/455 , C23C16/458 , H01L21/00 , H01L21/302 , H01L21/3065 , H01L21/683 , H02N13/00
CPC分类号： C23C16/45521 , C23C16/4586 , H01L21/67103 , H01L21/6831 , H01L21/6833 , H02N13/00 , Y10T279/23 , Y10T29/49117
摘要： An electrostatic chuck (20) for holding a substrate (45) is described. One version of the chuck (20) suitable for mounting on a base (25), comprises (i) an electrostatic member (33) having an electrode (50) therein, and (ii) an electrical lead (60) extending through the base (25) to electrically engage the electrode (50) of the electrostatic member (33). When the chuck (20) is used to hold a substrate (45) in a process chamber (80) containing erosive process gas, the substrate (45) covers and substantially protects the electrical lead (60) from erosion by the erosive process gas. In a preferred version of the chuck (20), an electrical connector (55) forming an integral extension of the electrode (50), electrically connects the electrode (50) to a voltage supply terminal (70) used to operate the chuck (20). The electrical connector (55) comprises (i) an electrical lead (60) that extends through the base (25), and (ii) an electrical contact (65) on the electrical lead (60), the contact sized sufficiently large to directly contact and electrically engage the voltage supply terminal (70). The electrode (50) of the chuck (20) can comprise first and second electrodes (130), (135) electrically isolated from one another by an electrical isolation void (52), the electrodes sized and configured so that the electrical isolation void (52) can serve as a cooling groove (105) for holding coolant for cooling the substrate (45) held on the chuck (20). Preferably, the two electrode chuck (20) is used in conjunction with a switching system capable of operating the chuck (20) in either a monopolar mode or in a bipolar mode.
摘要翻译：描述了用于保持基板（45）的静电卡盘（20）。适于安装在基座（25）上的卡盘（20）的一个版本包括（i）其中具有电极（50）的静电部件（33）和（ii）延伸穿过底座（25）电连接静电部件（33）的电极（50）。当卡盘（20）用于将基板（45）保持在包含腐蚀性处理气体的处理室（80）中时，基板（45）覆盖并基本上保护电引线（60）免受侵蚀性处理气体的侵蚀。在卡盘（20）的优选形式中，形成电极（50）的整体延伸的电连接器（55）将电极（50）电连接到用于操作卡盘（20）的电压供应端子）。电连接器（55）包括（i）延伸穿过基座（25）的电引线（60）和（ii）电引线（60）上的电触头（65），触头尺寸足够大以直接接触和电接合电压端子（70）。卡盘（20）的电极（50）可以包括通过电隔离空隙（52）彼此电隔离的第一和第二电极（130），电极的尺寸和构造使得电隔离空隙（ 52）可以用作用于保持冷却剂的冷却槽（105），以冷却保持在卡盘（20）上的基板（45）。优选地，两个电极卡盘（20）与能够以单极模式或双极模式操作卡盘（20）的开关系统结合使用。

7. 发明授权

US5822171A Electrostatic chuck with improved erosion resistance 失效
公开(公告)号：US5822171A
公开(公告)日：1998-10-13
申请号：US410449
申请日：1995-03-24
申请人： Shamouil Shamouilian , Manoocher Birang , John F. Cameron , Chandra Deshpandey , Alfred Goldspiel , Ron Northrup , Semyon Shertinsky , Sasson Somekh
发明人： Shamouil Shamouilian , Manoocher Birang , John F. Cameron , Chandra Deshpandey , Alfred Goldspiel , Ron Northrup , Semyon Shertinsky , Sasson Somekh
IPC分类号： B25J15/06 , C23C16/44 , C23C16/455 , C23C16/458 , H01L21/00 , H01L21/302 , H01L21/3065 , H01L21/683 , H02N13/00
CPC分类号： C23C16/45521 , C23C16/4586 , H01L21/67103 , H01L21/6831 , H01L21/6833 , H02N13/00 , Y10T279/23 , Y10T29/49117
摘要： An electrostatic chuck (20) for holding a substrate (45) is described. One version of the chuck (20) suitable for mounting on a base (25), comprises (i) an electrostatic member (33) having an electrode (50) therein, and (ii) an electrical lead (60) extending through the base (25) to electrically engage the electrode (50) of the electrostatic member (33). When the chuck (20) is used to hold a substrate (45) in a process chamber (80) containing erosive process gas, the substrate (45) covers and substantially protects the electrical lead (60) from erosion by the erosive process gas. In a preferred version of the chuck (20), an electrical connector (55) forming an integral extension of the electrode (50), electrically connects the electrode (50) to a voltage supply terminal (70) used to operate the chuck (20). The electrical connector (55) comprises (i) an electrical lead (60) that extends through the base (25), and (ii) an electrical contact (65) on the electrical lead (60), the contact sized sufficiently large to directly contact and electrically engage the voltage supply terminal (70). The electrode (50) of the chuck (20) can comprise first and second electrodes (130), (135) electrically isolated from one another by an electrical isolation void (52), the electrodes sized and configured so that the electrical isolation void (52) can serve as a cooling groove (105) for holding coolant for cooling the substrate (45) held on the chuck (20). Preferably, the two electrode chuck (20) is used in conjunction with a switching system capable of operating the chuck (20) in either a monopolar mode or in a bipolar mode. Erosion resistance of the chuck (20) is further enhanced by a masking gas assembly (115) which directs a masking gas at an exposed portion of the insulator (35), to protect the exposed portion of the insulator (35) from the erosive gas contained in the process chamber (80).

8. 发明授权

US08818721B2 Method and system for exchanging data 有权
标题翻译：交换数据的方法和系统
公开(公告)号：US08818721B2
公开(公告)日：2014-08-26
申请号：US13149364
申请日：2011-05-31
申请人： Jeffrey A. Hamilton , Edward F. Jones , John F. Cameron
发明人： Jeffrey A. Hamilton , Edward F. Jones , John F. Cameron
IPC分类号： G01C21/10 , H04W24/00 , H04W74/00 , H04M3/42
CPC分类号： G01C21/206 , G01C21/32
摘要： A system for exchanging data. A first mobile device configured to generate a first set of data related to a plurality of geographic positions where the first mobile device has been located and configured to exchange the first set of data with a second mobile device wherein the first mobile device receives a second set of data related to a plurality of geographic positions where the second mobile device has been located. A mapping system configured to receive the first set of data and the second set of data and to generate a map based on the first set of data and the second set of data.
摘要翻译：用于交换数据的系统。第一移动设备，被配置为生成与多个地理位置相关的第一组数据，其中所述第一移动设备已被定位并被配置为与第二移动设备交换所述第一组数据，其中所述第一移动设备接收第二组与第二移动设备所在的多个地理位置有关的数据。映射系统，被配置为接收第一组数据和第二组数据，并且基于第一组数据和第二组数据生成映射。

9. 发明授权

US07062305B1 Location identifying apparatus and method of identifying the location of a user 有权
标题翻译：位置识别装置和识别用户位置的方法
公开(公告)号：US07062305B1
公开(公告)日：2006-06-13
申请号：US10439060
申请日：2003-05-15
申请人： John F. Cameron , Mark D. Sellers
发明人： John F. Cameron , Mark D. Sellers
IPC分类号： H04M1/00
CPC分类号： G01C15/00 , G01C15/06 , G01S19/35
摘要： In a survey system involving either differential global positioning (DGPS) or robotic total station (RTS) systems, the mobile station includes the radio system in the surveyor pole and either connects the laser reflector system or the GPS to the top of the pole or provides a connector for releasably connecting the laser reflector system or GPS. Electric connections between the GPS or laser reflector system, and the radio system are made either by using the physical connector between the pole and the GPS or laser reflector system, or by providing separate electrical conductors and electrical connectors from the pole to the GPS or laser reflector. In the case of a RTS system the base station includes a GPS for locating the position of the base station. For added convenience, the pole may be formed in sections and the power supply may include an inductive coupling battery charger. Data communications may also take place using wireless technology such as Bluetooth.
摘要翻译：在涉及差分全球定位（DGPS）或机器人全站仪（RTS）系统的调查系统中，移动台包括测量器极中的无线电系统，并将激光反射器系统或GPS连接到极点顶部或提供用于可释放地连接激光反射器系统或GPS的连接器。 GPS或激光反射器系统和无线电系统之间的电气连接可以通过使用极点和GPS或激光反射器系统之间的物理连接器，或者通过提供从极点到GPS或激光器的单独的电导体和电连接器来实现反射器。在RTS系统的情况下，基站包括用于定位基站的位置的GPS。为了增加方便，极可以形成为部分，并且电源可以包括感应耦合电池充电器。数据通信也可以使用诸如蓝牙之类的无线技术进行。

10. 发明授权

US06751467B1 System and method for using corrected signals from a global positioning system to perform precision survey 有权
标题翻译：使用来自全球定位系统的校正信号进行精密测量的系统和方法
公开(公告)号：US06751467B1
公开(公告)日：2004-06-15
申请号：US09663063
申请日：2000-09-15
申请人： John F. Cameron , Mark D. Sellers
发明人： John F. Cameron , Mark D. Sellers
IPC分类号： H04B700
CPC分类号： G01S19/07 , G01S19/35 , G01S19/36
摘要： In a differential global positioning system that includes one or more base stations and rover units, a system and method for including a radio modem transceiver in the rover units, and packaging several components, including the transceiver and a radio antenna in a single package, and possibly including re-chargeable batteries, a GPS receiver, and a GPS antenna in the package, to reduce the number of external electrical connections. Several of the components may be packaged into a survey range pole. GPS satellite correction information is transmitted from a base station in response to a request transmitted from the rover unit by means of the radio modem transceiver. Automatic channel selection is performed by the base stations to select a channel having low communication traffic. The rover units scan the available channels for valid GPS correction information and, in the event that more than one such channel is located, select the channel with the strongest signal.
摘要翻译：在包括一个或多个基站和流动站单元的差分全球定位系统中，包括无线电调制解调器收发器在流动站单元中的系统和方法，以及将单个包装中的收发器和无线电天线包括在内的若干组件，以及可能包括可重新充电的电池，GPS接收器和GPS天线，以减少外部电气连接的数量。几个组件可能被打包成一个测量范围极点。响应于通过无线调制解调器收发器从流动站单元发送的请求，从基站发送GPS卫星校正信息。基站执行自动信道选择，选择通信流量低的信道。流动站单元扫描可用信道以获取有效的GPS校正信息，并且在多于一个这样的信道被定位的情况下，选择具有最强信号的信道。

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