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    • 1. 发明申请
    • METHOD FOR MEASURING A SPECTRUM OF A NARROWBAND LIGHT SOURCE, AND SPECTROMETER ARRANGEMENT
    • 用于测量窄带光源的光谱的方法和光谱仪布置
    • US20100079765A1
    • 2010-04-01
    • US12558874
    • 2009-09-14
    • Johannes KrausAlois HerkommerBernhard WeiglMichel Le MaireHolger Muenz
    • Johannes KrausAlois HerkommerBernhard WeiglMichel Le MaireHolger Muenz
    • G01J3/45
    • G01J3/26G01J3/36
    • A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers ≧1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra—recorded by the at least one detector—of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.
    • 用于测量由窄带光源(例如带宽变窄的激光器)发射的光束的光谱的光谱仪装置包括至少一个标准具,用于将光束分成第一部分光束的分束器和第二部分光束 一个或多个用于通过至少一个标准具指导第一部分光束n次和第二部分光束(n + k)的光学引导元件,其中n和k是整数≥1。 光谱仪布置还具有至少一个光敏检测器和评估装置,用于评估已经通过至少一个标准具的第一部分光束的至少一个检测器记录的光谱n次和第二部分光束 已经通过至少一个标准具(n + k)次的光束,以便确定校正了至少一个标准具的装置功能的光谱。
    • 2. 发明授权
    • Method for measuring a spectrum of a narrowband light source, and spectrometer arrangement
    • 用于测量窄带光源的光谱的方法和光谱仪布置
    • US08289520B2
    • 2012-10-16
    • US12558874
    • 2009-09-14
    • Johannes KrausAlois HerkommerBernhard WeiglMichel Le MaireHolger Muenz
    • Johannes KrausAlois HerkommerBernhard WeiglMichel Le MaireHolger Muenz
    • G01J3/45
    • G01J3/26G01J3/36
    • A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers ≧1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra—recorded by the at least one detector—of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.
    • 用于测量由窄带光源(例如带宽变窄的激光器)发射的光束的光谱的光谱仪装置包括至少一个标准具,用于将光束分成第一部分光束的分束器和第二部分光束 一个或多个用于通过至少一个标准具指导第一部分光束n次和第二部分光束(n + k)的光学引导元件,其中n和k是整数≥1。 光谱仪布置还具有至少一个光敏检测器和评估装置,用于评估已经通过至少一个标准具的第一部分光束的至少一个检测器记录的光谱n次和第二部分光束 已经通过至少一个标准具(n + k)次的光束,以便确定校正了至少一个标准具的装置功能的光谱。