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1. 发明授权

US07935218B2 Optical apparatus, lithographic apparatus and device manufacturing method 失效
标题翻译：光学设备，光刻设备和器件制造方法
公开(公告)号：US07935218B2
公开(公告)日：2011-05-03
申请号：US11643955
申请日：2006-12-22
申请人： Johannes Hubertus Josephina Moors , Vadim Yevgenyevich Banine , Bastiaan Theodoor Wolschrijn , Carolus Ida Maria Antonius Spee , Rik Jansen
发明人： Johannes Hubertus Josephina Moors , Vadim Yevgenyevich Banine , Bastiaan Theodoor Wolschrijn , Carolus Ida Maria Antonius Spee , Rik Jansen
IPC分类号： C23F1/00
CPC分类号： G03F7/2043 , G03F7/70041 , G03F7/70925
摘要： An optical apparatus includes an illumination system configured to form a pulsed radiation beam, an optical element with a surface on which the radiation beam is incident in operation, and a gas source arranged to supply a mixture of a first type of gas and a second type of gas to a space adjacent the surface. Particles of the first and second types of gas are capable of reacting with the surface, when activated by the radiation beam. The gas source is configured to generate a combination of surface occupation numbers of molecules of the first and second types of gas on the surface under operating conditions, at least prior to pulses of the radiation beam, the combination of surface occupation numbers lying in a range in which reactions of particles with the surface during pulses of the radiation beam are in majority reversed.
摘要翻译：光学装置包括被配置为形成脉冲辐射束的照明系统，具有辐射束在其中入射的表面的光学元件，以及设置成供应第一类型气体和第二类型的混合物的气体源的气体到邻近表面的空间。当由辐射束激活时，第一和第二类气体的颗粒能够与表面反应。气源被配置成至少在辐射束的脉冲之前，在工作条件下，在表面上产生第一和第二类气体的分子的表面占有数量的组合，表面占有数的组合在一个范围内其中在辐射束的脉冲期间颗粒与表面的反应多数反转。

2. 发明授权

US09457296B2 Separation of liquid components from a mixture 有权
标题翻译：从混合物中分离液体组分
公开(公告)号：US09457296B2
公开(公告)日：2016-10-04
申请号：US13884277
申请日：2011-11-10
申请人： Rik Jansen , Arno Willem Frederik Volker , Peter Van Capel
发明人： Rik Jansen , Arno Willem Frederik Volker , Peter Van Capel
IPC分类号： B01D17/12 , B01D17/02 , B01D17/04 , B01D21/30 , B01D21/34 , G01B17/02 , G01F23/296 , G01N29/02 , G01N29/34 , G01N29/44 , C10G33/02 , C10G33/08 , G01N29/032
CPC分类号： B01D17/04 , B01D17/12 , C10G33/02 , C10G33/08 , G01F23/2962 , G01N29/032 , G01N29/348 , G01N29/4418 , G01N29/4472 , G01N2291/0222 , G01N2291/02836 , G01N2291/048 , G01N2291/105
摘要： Operation of an oil-water separator or other liquid mixture separator is monitored. The separator uses a vessel through which a mixture of different liquid components flows horizontally. A plurality of ultrasound transducers is provided on a wall of the vessel at different heights at a common stage along the direction of the horizontal flow. Ultrasound at a plurality of different ultrasound wavelengths is transmitted through the vessel between transducers and ultrasound arriving transducers is detected. Parameter values of a model are fitted to the detection. A model is used that relates height dependent properties of liquid in the vessel to properties of the detected ultrasound transmission between transceivers, the model comprising at least a fittable parameter of a height dependent droplet size distribution in a least a sub-range of a height of liquid in the vessel. The model relating the droplet size distribution to ultrasound wavelength dependence of the properties of ultrasound transmission. The measured droplet size distribution may be used to determine the route of ultrasound paths and to control demulsification measures.
摘要翻译：监测油水分离器或其他液体混合物分离器的操作。分离器使用不同液体组分的混合物水平流动的容器。多个超声换能器沿着水平流动的方向在不同高度的容器的壁上设置在共同的阶段。在多个不同超声波长下的超声波通过换能器之间的血管传播，并且检测到超声到达的换能器。模型的参数值适合于检测。使用模型，其将容器中的液体的高度依赖性属性与收发器之间检测到的超声波传播的性质相关联，该模型包括至少一个高度依赖的液滴尺寸分布的可拟合参数，液体在容器中。该模型将液滴尺寸分布与超声波传输特性的超声波长依赖关系相关联。测量的液滴尺寸分布可用于确定超声波路径并控制破乳措施。

3. 发明申请

US20140008304A1 SEPARATION OF LIQUID COMPONENTS FROM A MIXTURE 有权
标题翻译：从混合物中分离液体组分
公开(公告)号：US20140008304A1
公开(公告)日：2014-01-09
申请号：US13884277
申请日：2011-11-10
申请人： Rik Jansen , Arno Willem Frederik Volker , Peter Van Capel
发明人： Rik Jansen , Arno Willem Frederik Volker , Peter Van Capel
IPC分类号： B01D17/04
CPC分类号： B01D17/04 , B01D17/12 , C10G33/02 , C10G33/08 , G01F23/2962 , G01N29/032 , G01N29/348 , G01N29/4418 , G01N29/4472 , G01N2291/0222 , G01N2291/02836 , G01N2291/048 , G01N2291/105
摘要： Operation of an oil-water separator or other liquid mixture separator is monitored. The separator uses a vessel through which a mixture of different liquid components flows horizontally. A plurality of ultrasound transducers is provided on a wall of the vessel at different heights at a common stage along the direction of the horizontal flow. Ultrasound at a plurality of different ultrasound wavelengths is transmitted through the vessel between transducers and ultrasound arriving transducers is detected. Parameter values of a model are fitted to the detection. A model is used that relates height dependent properties of liquid in the vessel to properties of the detected ultrasound transmission between transceivers, the model comprising at least a fittable parameter of a height dependent droplet size distribution in a least a sub-range of a height of liquid in the vessel. The model relating the droplet size distribution to ultrasound wavelength dependence of the properties of ultrasound transmission. The measured droplet size distribution may be used to determine the route of ultrasound paths and to control demulsification measures.
摘要翻译：监测油水分离器或其他液体混合物分离器的操作。分离器使用不同液体组分的混合物水平流动的容器。多个超声换能器沿着水平流动的方向在不同高度的容器的壁上设置在共同的阶段。在多个不同超声波长下的超声波通过换能器之间的血管传播，并且检测到超声到达的换能器。模型的参数值适合于检测。使用模型，其将容器中的液体的高度依赖性属性与收发器之间检测到的超声波传播的性质相关联，该模型包括至少一个高度依赖的液滴尺寸分布的可拟合参数，液体在容器中。该模型将液滴尺寸分布与超声波传输特性的超声波长依赖关系相关联。测量的液滴尺寸分布可用于确定超声波路径并控制破乳措施。

4. 发明申请

US20070158579A1 Optical apparatus, lithographic apparatus and device manufacturing method 失效
标题翻译：光学设备，光刻设备和器件制造方法
公开(公告)号：US20070158579A1
公开(公告)日：2007-07-12
申请号：US11643955
申请日：2006-12-22
申请人： Johannes Moors , Vadim Banine , Bastiaan Wolschrijn , Carolus Antonius Spee , Rik Jansen
发明人： Johannes Moors , Vadim Banine , Bastiaan Wolschrijn , Carolus Antonius Spee , Rik Jansen
IPC分类号： H01J27/00
CPC分类号： G03F7/2043 , G03F7/70041 , G03F7/70925
摘要： An optical apparatus includes an illumination system configured to form a pulsed radiation beam, an optical element with a surface on which the radiation beam is incident in operation, and a gas source arranged to supply a mixture of a first type of gas and a second type of gas to a space adjacent the surface. Particles of the first and second types of gas are capable of reacting with the surface, when activated by the radiation beam. The gas source is configured to generate a combination of surface occupation numbers of molecules of the first and second types of gas on the surface under operating conditions, at least prior to pulses of the radiation beam, the combination of surface occupation numbers lying in a range in which reactions of particles with the surface during pulses of the radiation beam are in majority reversed.
摘要翻译：光学装置包括被配置为形成脉冲辐射束的照明系统，具有辐射束在其中入射的表面的光学元件，以及设置成供应第一类型气体和第二类型的混合物的气体源的气体到邻近表面的空间。当由辐射束激活时，第一和第二类气体的颗粒能够与表面反应。气源被配置成至少在辐射束的脉冲之前，在工作条件下，在表面上产生第一和第二类气体的分子的表面占有数量的组合，表面占有数的组合在一个范围内其中在辐射束的脉冲期间颗粒与表面的反应多数反转。

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