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1. 发明授权

US06503366B2 Chemical plasma cathode 失效
公开(公告)号：US06503366B2
公开(公告)日：2003-01-07
申请号：US09732064
申请日：2000-12-07
申请人： Joel Penelon , Ivan Berry
发明人： Joel Penelon , Ivan Berry
IPC分类号： H05H100
CPC分类号： C23C16/517 , C23C16/453 , H05H1/46 , H05H1/48 , H05H2001/4607
摘要： A method and apparatus for generating a plasma in a gas using a thermal source and a heat source in a common reaction zone. A process gas is flowed to a reaction zone and heated with a thermal energy source. Within the same reaction zone, a current is passed in the gas to generate a plasma within the gas. The plasma is directed to a substrate for treatment. The substrate may be a silicon wafer as part of an etching, ashing, wafer cleaning, and chemical vapor deposition.

2. 发明授权

US06673197B2 Chemical plasma cathode 失效
标题翻译：化学等离子体阴极
公开(公告)号：US06673197B2
公开(公告)日：2004-01-06
申请号：US10336270
申请日：2003-01-03
申请人： Joel Penelon , Ivan Berry
发明人： Joel Penelon , Ivan Berry
IPC分类号： H05H100
CPC分类号： C23C16/517 , C23C16/453 , H05H1/46 , H05H1/48 , H05H2001/4607
摘要： A method and apparatus for generating a plasma in a gas using a thermal source and a heat source in a common reaction zone. A process gas is flowed to a reaction zone and heated with a thermal energy source. Within the same reaction zone, a current is passed in the gas to generate a plasma within the gas. The plasma is directed to a substrate for treatment. The substrate may be a silicon wafer as part of an etching, ashing, wafer cleaning, and chemical vapor deposition.
摘要翻译：一种用于在公共反应区中使用热源和热源在气体中产生等离子体的方法和装置。将工艺气体流入反应区并用热能源加热。在相同的反应区内，在气体中通入电流，以在气体内产生等离子体。将等离子体导向基底进行治疗。衬底可以是作为蚀刻，灰化，晶片清洁和化学气相沉积的一部分的硅晶片。

3. 发明授权

US4734621A Device for producing a sliding or traveling magnetic field, in particular for ionic processing under magnetic field 失效
标题翻译：用于产生滑动或行进磁场的装置，特别是用于磁场下的离子加工
公开(公告)号：US4734621A
公开(公告)日：1988-03-29
申请号：US945984
申请日：1986-12-24
申请人： Jean P. Yonnet , Joel Penelon
发明人： Jean P. Yonnet , Joel Penelon
IPC分类号： H01L21/302 , H01L21/3065 , H02K41/00 , H01J7/24 , H05B31/26
CPC分类号： H02K41/00
摘要： Device for producing a sliding or traveling magnetic field, with a substantially constant modulus in a working region (11a), using movable permanent magnets, these permanent magnets forming cylindrical bars (1) with diametrical or radial magnetization, with one or more pairs of poles, arranged side by side with their axes parallel and equidistant (E), placed in one and the same plane (A), the magnetizations (J) of the bars (1) being successively angularly offset by a constant angle, the various bars (1) being driven rotationally around their axis at the same angular velocity and in the same direction, and the distance (Y) between the said working region (11a) and the plane (A) of the axes of the bars (1) being equal to at least 0.75 times the distance (E) between the axes of two successive bars.
摘要翻译：用于产生滑动或行进磁场的装置，在工作区域（11a）中使用可移动永磁体具有基本上恒定的模量，这些永磁体形成具有直径或径向磁化的圆柱形杆（1），具有一对或多对极（E）放置在同一平面（A）中并排布置，杆（1）的磁化（J）被连续角度地偏移一定角度，各种杆 1）以相同的角速度和相同的方向绕其轴线旋转地驱动，并且所述工作区域（11a）和杆（1）的轴线的平面（A）之间的距离（Y）相等到至少0.75倍于两个连续条的轴之间的距离（E）。

4. 发明申请

US20060156983A1 Low temperature, atmospheric pressure plasma generation and applications 审中-公开
标题翻译：低温，大气压等离子体发生和应用
公开(公告)号：US20060156983A1
公开(公告)日：2006-07-20
申请号：US11227724
申请日：2005-09-14
申请人： Joel Penelon , Sylvain Motycka , Steve Babayan , Xiawan Yang
发明人： Joel Penelon , Sylvain Motycka , Steve Babayan , Xiawan Yang
IPC分类号： B01J19/08 , C23F1/00 , C23C16/00
CPC分类号： C23C16/507 , A61L2/14 , C23C16/402 , C23F4/00 , H05H2001/2456
摘要： Devices and methods for generating a low temperature atmospheric pressure plasma are disclosed. A method of generating a low temperature atmospheric pressure plasma that comprises coupling a high-frequency power supply to a tuning network that is connected to one or more electrodes, placing one or more non-conducting housings between the electrodes, flowing gas through the one or more housings, and striking and maintaining the plasma with the application of said high-frequency power is described. A technique for the surface treatment of materials with said low temperature atmospheric pressure plasma, including surface activation, cleaning, sterilization, etching and deposition of thin films is also disclosed.
摘要翻译：公开了用于产生低温大气压等离子体的装置和方法。一种产生低温大气压等离子体的方法，包括将高频电源耦合到连接到一个或多个电极的调谐网络，将一个或多个非导电壳体放置在电极之间，使气体流过该电极，或者描述了更多的壳体，并且利用所述高频功率的施加来引起和维持等离子体。还公开了用于表面处理具有所述低温大气压等离子体的材料的技术，包括表面活化，清洁，灭菌，蚀刻和沉积薄膜。

5. 发明授权

US6110288A Temperature probe and measurement method for low pressure process 有权
标题翻译：温度探头和低压过程的测量方法
公开(公告)号：US6110288A
公开(公告)日：2000-08-29
申请号：US213925
申请日：1998-12-17
申请人： Joel Penelon , Andre Cardoso
发明人： Joel Penelon , Andre Cardoso
IPC分类号： H01L21/302 , G01K1/08 , G01K1/14 , G01K1/16 , G01K7/00 , H01L21/205 , H01L21/66 , C23C16/00 , H05H1/00
CPC分类号： G01K1/143 , G01K1/16
摘要： A temperature probe for use in low pressure processes having an improved thermal response wherein fluid is supplied to a fluid transport passageway in the probe head for creating an increased pressure between the probe head and a semiconductor wafer for increasing the thermal conductivity therebetween.
摘要翻译：一种用于具有改进的热响应的低压过程的温度探针，其中流体被供应到探针头中的流体输送通道，用于在探针头和半导体晶片之间产生增加的压力，以增加它们之间的导热性。

6. 发明授权

US6023555A Radiant heating apparatus and method 有权
标题翻译：辐射加热装置及方法
公开(公告)号：US6023555A
公开(公告)日：2000-02-08
申请号：US134865
申请日：1998-08-17
申请人： Joel Penelon , Andre Cardoso
发明人： Joel Penelon , Andre Cardoso
IPC分类号： H01L21/26 , H01L21/00 , H01L21/205
CPC分类号： H01L21/67115
摘要： A radiant heating apparatus for reducing the cumulative temperature gradient over a semiconductor workpiece during a low temperature process is comprised of a plurality of reflecting units, wherein each reflecting unit is comprised of a back reflector, a tubular reflector extending from the back reflector towards the workpiece, and a radiant energy source disposed in the tubular reflector in front of the back reflector, wherein a cross section of the tubular reflector is in the shape of a truncated segment of a circle.
摘要翻译：用于降低半导体工件在低温过程中的累积温度梯度的辐射加热装置由多个反射单元组成，其中每个反射单元包括后反射器，从后反射器朝向工件延伸的管状反射器以及设置在后反射器前面的管状反射器中的辐射能源，其中管状反射器的横截面为圆形的截头形状。

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