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    • 2. 发明授权
    • Semiconductor device manufacturing apparatus and wafer loading/unloading method thereof
    • 半导体器件制造装置及其晶片装载/卸载方法
    • US08221045B2
    • 2012-07-17
    • US12350705
    • 2009-01-08
    • Jun-Sig ParkJung-Hyeon KimJin-Ho ShinGennady Ivanov
    • Jun-Sig ParkJung-Hyeon KimJin-Ho ShinGennady Ivanov
    • H01L21/677
    • C23C16/4583H01L21/67109H01L21/67383Y10S414/136Y10S414/141
    • A semiconductor manufacturing apparatus and a wafer loading/unloading method thereof increase productivity. The semiconductor manufacturing apparatus includes a first boat and a second boat having a plurality of first slots and a plurality of second slots, respectively, and disposed such that the first slots and the second slots alternate each other, the first boat mounting a plurality of first wafers in the first slots to direct front faces of the first wafers in a predetermined direction, the second boat mounting a plurality of second wafers in the second slots to direct back faces of the second wafers in the predetermined direction; a reaction tube having an opening and containing the first and second boats mounting the first and second wafers; a plate sealing up the opening of the reaction tube containing the first boat and the second boat; a reaction gas supplier supplying reaction gas into the sealed reaction tube for a predetermined process; and a reaction gas exhauster exhausting the reaction gas from the reaction tube to the external of the reaction tube after the predetermined process.
    • 半导体制造装置及其晶片装载/卸载方法提高了生产率。 半导体制造装置包括分别具有多个第一槽和多个第二槽的第一船和第二船,并且被布置成使得第一槽和第二槽彼此交替,第一船安装多个第一槽 在第一槽中的晶片以预定方向引导第一晶片的前表面,第二船在第二槽中安装多个第二晶片,以沿预定方向引导第二晶片的后表面; 反应管,其具有开口并且容纳安装所述第一和第二晶片的所述第一和第二船; 密封包含第一船和第二船的反应管的开口的板; 将反应气体供给到密封反应管中以进行预定处理的反应气体供给装置; 以及反应气体排出器,其在预定处理之后将反应气体从反应管排出到反应管的外部。
    • 3. 发明申请
    • SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND WAFER LOADING/UNLOADING METHOD THEREOF
    • 半导体器件制造装置及其加载/卸载方法
    • US20090191042A1
    • 2009-07-30
    • US12350705
    • 2009-01-08
    • Jun-Sig ParkJung-Hyeon KimJin-Ho ShinGennady Ivanov
    • Jun-Sig ParkJung-Hyeon KimJin-Ho ShinGennady Ivanov
    • H01L21/677C23C16/458H01L21/30
    • C23C16/4583H01L21/67109H01L21/67383Y10S414/136Y10S414/141
    • A semiconductor manufacturing apparatus and a wafer loading/unloading method thereof increase productivity. The semiconductor manufacturing apparatus includes a first boat and a second boat having a plurality of first slots and a plurality of second slots, respectively, and disposed such that the first slots and the second slots alternate each other, the first boat mounting a plurality of first wafers in the first slots to direct front faces of the first wafers in a predetermined direction, the second boat mounting a plurality of second wafers in the second slots to direct back faces of the second wafers in the predetermined direction; a reaction tube having an opening and containing the first and second boats mounting the first and second wafers; a plate sealing up the opening of the reaction tube containing the first boat and the second boat; a reaction gas supplier supplying reaction gas into the sealed reaction tube for a predetermined process; and a reaction gas exhauster exhausting the reaction gas from the reaction tube to the external of the reaction tube after the predetermined process.
    • 半导体制造装置及其晶片装载/卸载方法提高了生产率。 半导体制造装置包括分别具有多个第一槽和多个第二槽的第一船和第二船,并且被布置成使得第一槽和第二槽彼此交替,第一船安装多个第一槽 在所述第一槽中的晶片在预定方向上引导所述第一晶片的前表面,所述第二船在所述第二槽中安装多个第二晶片以沿所述预定方向引导所述第二晶片的背面; 反应管,其具有开口并且容纳安装所述第一和第二晶片的所述第一和第二船; 密封包含第一船和第二船的反应管的开口的板; 将反应气体供给到密封反应管中以进行预定处理的反应气体供给装置; 以及反应气体排出器,其在预定处理之后将反应气体从反应管排出到反应管的外部。