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    • 5. 发明申请
    • APPARATUS AND METHOD FOR INSPECTING DEFECTS IN CIRCUIT PATTERN OF SUBSTRATE
    • 用于检查基板电路图中缺陷的装置和方法
    • US20110115516A1
    • 2011-05-19
    • US12710937
    • 2010-02-23
    • Seung Seoup LeeSoon Gyu YimIn Kyung Park
    • Seung Seoup LeeSoon Gyu YimIn Kyung Park
    • G01R31/02
    • G01R31/312
    • Disclosed herein is an apparatus and method for inspecting defects in the circuit pattern of a substrate. The apparatus for inspecting defects in a circuit pattern of a substrate includes a pin probe configured to input a voltage while coming into contact with an inspection target circuit pattern of a substrate. A capacitor sensor is provided with a membrane electrode which is opposite a connection circuit pattern to be electrically connected to the inspection target circuit pattern in a non-contact manner, and is configured to detect both capacitance and capacitance variation, generated due to displacement of the membrane electrode attributable to electrostatic attractive force acting from the connection circuit pattern on the membrane electrode. A capacitance measurement unit is connected to the capacitor sensor and is configured to measure capacitance attributable to the displacement of the membrane electrode, which is input from the capacitor sensor.
    • 本文公开了一种用于检查衬底的电路图案中的缺陷的装置和方法。 用于检查基板的电路图案中的缺陷的装置包括:引脚探针,其被配置为在与基板的检查对象电路图案接触的同时输入电压。 电容器传感器设置有与非接触式电连接到检查对象电路图案的连接电路图案相对的膜电极,并且被配置为检测由于位移而产生的电容和电容变化 膜电极归因于从膜电极上的连接电路图案作用的静电吸引力。 电容测量单元连接到电容器传感器,并且被配置为测量归因于从电容器传感器输入的膜电极的位移的电容。
    • 8. 发明授权
    • Apparatus and method for inspecting defects in circuit pattern of substrate
    • 检测基板电路图形缺陷的装置及方法
    • US08471581B2
    • 2013-06-25
    • US12710937
    • 2010-02-23
    • Seung Seoup LeeSoon Gyu YimIn Kyung Park
    • Seung Seoup LeeSoon Gyu YimIn Kyung Park
    • G01R31/00
    • G01R31/312
    • Disclosed herein is an apparatus and method for inspecting defects in the circuit pattern of a substrate. The apparatus for inspecting defects in a circuit pattern of a substrate includes a pin probe configured to input a voltage while coming into contact with an inspection target circuit pattern of a substrate. A capacitor sensor is provided with a membrane electrode which is opposite a connection circuit pattern to be electrically connected to the inspection target circuit pattern in a non-contact manner, and is configured to detect both capacitance and capacitance variation, generated due to displacement of the membrane electrode attributable to electrostatic attractive force acting from the connection circuit pattern on the membrane electrode. A capacitance measurement unit is connected to the capacitor sensor and is configured to measure capacitance attributable to the displacement of the membrane electrode, which is input from the capacitor sensor.
    • 本文公开了一种用于检查衬底的电路图案中的缺陷的装置和方法。 用于检查基板的电路图案中的缺陷的装置包括:引脚探针,其被配置为在与基板的检查对象电路图案接触的同时输入电压。 电容器传感器设置有与非接触式电连接到检查对象电路图案的连接电路图案相对的膜电极,并且被配置为检测由于位移而产生的电容和电容变化 膜电极归因于从膜电极上的连接电路图案作用的静电吸引力。 电容测量单元连接到电容器传感器,并且被配置为测量归因于从电容器传感器输入的膜电极的位移的电容。