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    • 2. 发明授权
    • Inspecting method using an electro optical detector
    • 使用电光检测器的检查方法
    • US08378708B2
    • 2013-02-19
    • US12443793
    • 2008-03-07
    • Jin Kook JunHyung Il JeonYoung Hoon KimYoung Shik ParkYoung Ryong YoonMyung Gi SeoDae Joong Yoon
    • Jin Kook JunHyung Il JeonYoung Hoon KimYoung Shik ParkYoung Ryong YoonMyung Gi SeoDae Joong Yoon
    • G01R31/02
    • G02F1/1309G01R31/308G02F2001/136254G09G3/006
    • An inspecting method using an electro-optical detecting device is disclosed. The electro-optical detecting device includes: an upper substrate and a lower substrate; a nematic liquid crystal layer interposed between the upper substrate and the lower substrate; a transparent electrode interposed between the nematic liquid crystal layer and the upper substrate, the transparent electrode connected to a device under test (DUT) via a power supply; a polarizing plate located over the nematic liquid crystal layer; and a reflecting plate located under the nematic liquid crystal layer. A method using the electro-optical detecting device includes applying a voltage between the transparent electrode and the DUT to generate an electric field across the liquid crystal layer; illuminating the detector and capturing an image of the detector using the light reflected from the detector; and determining the DUT has some defects from the image of the detector by an abnormal electric field generated between the transparent electrode and the DUT.
    • 公开了一种使用电光检测装置的检查方法。 电光检测装置包括:上基板和下基板; 插入在上基板和下基板之间的向列型液晶层; 插入在向列液晶层和上基板之间的透明电极,透明电极通过电源连接到被测器件(DUT); 位于向列液晶层上方的偏振片; 以及位于向列型液晶层下方的反射板。 使用电光检测装置的方法包括在透明电极和DUT之间施加电压以在液晶层两端产生电场; 照射检测器并使用从检测器反射的光捕获检测器的图像; 并且通过在透明电极和DUT之间产生的异常电场,确定DUT具有来自检测器的图像的一些缺陷。