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    • 6. 发明授权
    • Method for manufacturing a hybrid integrated component
    • 混合集成部件的制造方法
    • US08941193B2
    • 2015-01-27
    • US13869428
    • 2013-04-24
    • Jens FreyFrank Fischer
    • Jens FreyFrank Fischer
    • B81C3/00B81B1/00H01L29/84B81C1/00B81B7/00
    • B81C1/00269B81B7/007B81C1/00238B81C2203/0785
    • A simple and cost-effective manufacturing method for hybrid integrated components including at least one MEMS element, a cap for the micromechanical structure of the MEMS element, and at least one ASIC substrate, using which a high degree of miniaturization may be achieved. The micromechanical structure of the MEMS element and the cap are manufactured in a layered structure, proceeding from a shared semiconductor substrate, by applying at least one cap layer to a first surface of the semiconductor substrate, and by processing and structuring the semiconductor substrate proceeding from its other second surface, to produce and expose the micromechanical MEMS structure. The semiconductor substrate is then mounted with the MEMS-structured second surface on the ASIC substrate.
    • 一种用于混合集成部件的简单和成本有效的制造方法,包括至少一个MEMS元件,用于MEMS元件的微机械结构的盖,以及至少一个ASIC基板,其可以实现高度的小型化。 MEMS元件和盖的微机械结构通过将至少一个盖层施加到半导体衬底的第一表面,并且通过加工和构造半导体衬底从共享半导体衬底开始,以分层结构制造,并且从 其另一个第二表面,以产生和暴露微机械MEMS结构。 然后将半导体衬底与MEMS结构的第二表面安装在ASIC衬底上。
    • 9. 发明授权
    • Method and device for locating tires mounted on a vehicle
    • 用于定位安装在车辆上的轮胎的方法和装置
    • US08362897B2
    • 2013-01-29
    • US12526559
    • 2008-02-06
    • Alexander FinkFrank FischerGregor Kuchler
    • Alexander FinkFrank FischerGregor Kuchler
    • G08B1/08B60C23/00G01L3/00
    • B60C23/0416B60C23/007B60C23/008B60C23/0444
    • A method and a device for locating tires mounted on a vehicle. High frequency signals are captured by way of a first transmit/receive device arranged on a vehicle, said high-frequency signals originating from a wheel electronic system arranged on the vehicle, said wheel electronic system interacting with tires of a first tire group that are mounted on the vehicle. A trigger signal having a frequency that is clearly lower than the frequency of the high frequency signal, is emitted by the first transmit/receive device. The first transmit/receive device is arranged on the vehicle in such a manner that the tires of the first tire group are mounted on the vehicle and the level of the first trigger signal is selected in such a manner that only one part of the wheel electronic system, which is associated with the tires of the first tire group, captures the first trigger signal and the high frequency signals which originate from the part of the wheel electronic system of the tires of the first wheel group that has captured the first trigger signal, contains information on the obtained first trigger signal.
    • 一种用于定位安装在车辆上的轮胎的方法和装置。 通过布置在车辆上的第一发射/接收装置捕获高频信号,所述高频信号源自布置在车辆上的车轮电子系统,所述车轮电子系统与安装的第一轮胎组的轮胎相互作用 在车上 具有明显低于高频信号频率的频率的触发信号由第一发射/接收装置发射。 第一发送/接收装置被布置在车辆上,使得第一轮胎组的轮胎安装在车辆上,并且以这样的方式选择第一触发信号的电平,使得只有一部分车轮电子 与第一轮胎组的轮胎相关联的系统捕获第一触发信号和源自已经捕获了第一触发信号的第一轮组的轮胎的车轮电子系统的部分的高频信号, 包含获得的第一触发信号的信息。
    • 10. 发明授权
    • Acoustic sensor element
    • 声学传感器元件
    • US08089828B2
    • 2012-01-03
    • US12598994
    • 2008-06-10
    • Frank FischerArnim Hoechst
    • Frank FischerArnim Hoechst
    • H04R19/04
    • H04R19/04H04R19/005
    • A micromechanical acoustic sensor element, which has at least one diaphragm and at least one fixed counter element, the diaphragm being situated in a cavity between a substrate and the counter element and acting as movable electrode of a capacitor system, the counter element acting as first fixed counter electrode of this capacitor system, and at least one through hole being formed in the substrate for the application of sound pressure to the diaphragm. For fixation and strengthening purposes, the counter element is connected to the substrate via at least one support element. The support element is situated in the region of the cavity, and an opening is formed in the diaphragm for the support element.
    • 一种微机械声学传感器元件,其具有至少一个隔膜和至少一个固定的计数元件,所述隔膜位于基板和所述相对元件之间的空腔中,并且用作电容器系统的可移动电极,所述对置元件作为第一 该电容器系统的固定对置电极,以及至少一个通孔,形成在基板中,用于向隔膜施加声压。 为了固定和加强目的,计数元件通过至少一个支撑元件连接到基底。 支撑元件位于空腔的区域中,并且在用于支撑元件的隔膜中形成开口。