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1. 发明申请

US20090168967A1 METHOD AND APPARATUS FOR GENERATING RADIATION IN THE WAVELENGTH RANGE FROM ABOUT 1 NM TO ABOUT 30 NM, AND USE IN A LITHOGRAPHY DEVICE OR IN METROLOGY 有权
标题翻译：用于在从1海里至约30海里的波长范围内产生辐射的方法和装置，以及在地平线设备中或在地质学中的使用
公开(公告)号：US20090168967A1
公开(公告)日：2009-07-02
申请号：US11719881
申请日：2005-11-18
申请人： Jeroen Jonkers , Dominik Marcel Vaudrevange
发明人： Jeroen Jonkers , Dominik Marcel Vaudrevange
IPC分类号： H05G2/00
CPC分类号： H05G2/003
摘要： A description is given of a method and an apparatus for generating radiation (12) in the wavelength range from about 1 nm to about 30 nm by means of an electrically operated discharge, which can be used in lithography or in metrology. Use is made of at least one first electrode (14) and at least one second electrode (16) at a distance therefrom, wherein at least one working gas (22) is provided between the electrodes (14, 16). A plasma is ignited in the working gas (22), the generated radiation (12) of which plasma is forwarded via a first opening (30) for further use, and wherein debris particles (28) are produced in at least one region (26) of at least one of the electrodes (14, 16). In order to retain the debris particles (28), the method is configured such that at least the region (26) is arranged with respect to the first opening (30) in such a way that the movement paths (32) of the debris particles (28) run at least predominantly outside an area delimited by the first opening (30).
摘要翻译：给出了一种用于通过电动放电产生辐射（12）的方法和装置，该辐射（12）可以用于光刻或计量学中，其范围为约1nm至约30nm。使用由至少一个第一电极（14）和至少一个第二电极（16）构成，其中至少一个工作气体（22）设置在电极（14,16）之间。等离子体在工作气体（22）中被点燃，所产生的辐射（12）等离子体经由第一开口（30）进一步使用，并且其中碎片颗粒（28）在至少一个区域（26 ）至少一个电极（14,16）。为了保持碎屑颗粒（28），该方法被构造成使得至少区域（26）相对于第一开口（30）布置成使得碎屑颗粒的运动路径（32）（28）至少主要在由所述第一开口（30）限定的区域的外部延伸。

2. 发明申请

US20090206268A1 METHOD OF INCREASING THE CONVERSION EFFICIENCY OF AN EUV AND/OR SOFT X-RAY LAMP AND A CORRESPONDING APPARATUS 有权
标题翻译：提高EUV和/或软X射线灯转换效率的方法及相关装置
公开(公告)号：US20090206268A1
公开(公告)日：2009-08-20
申请号：US12300858
申请日：2007-05-08
申请人： Jeroen Jonkers , Dominik Marcel Vaudrevange
发明人： Jeroen Jonkers , Dominik Marcel Vaudrevange
IPC分类号： G01T1/18 , G01J3/10
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma (8) emitting EUV radiation or soft X-rays is generated in a gaseous medium formed by an evaporated liquid material in a discharge space, said liquid material being provided on a surface in the discharge space and being at least partially evaporated by an energy beam (9). The invention also refers to a corresponding apparatus for producing EUV radiation and/or soft X-rays. In the method, a gas (11) composed of chemical elements having a lower mass number than chemical elements of the liquid material is supplied through at least one nozzle (10) in a directed manner to the discharge space and/or to the liquid material on a supply path to the discharge space in order to reduce the density of the evaporated liquid material in the discharge space. With the present method and corresponding apparatus the conversion efficiency of the lamp is increased.
摘要翻译：本发明涉及一种提高EUV和/或软X射线灯的转换效率的方法，其中在由蒸发的形成的气体介质中产生发射EUV辐射或软X射线的放电等离子体（8）液体材料在放电空间中，所述液体材料设置在放电空间中的表面上，并被能量束（9）至少部分地蒸发。本发明还涉及用于产生EUV辐射和/或软X射线的相应装置。在该方法中，由具有比液体材料的化学元素低的质量数的化学元素构成的气体（11）通过至少一个喷嘴（10）以指向的方式供给到放电空间和/或液体材料在放电空间的供给路径上，以便减小放电空间中蒸发的液体材料的密度。利用本方法和相应的装置，灯的转换效率提高。

3. 发明授权

US08040030B2 Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus 有权
标题翻译：提高EUV和/或软X射线灯的转换效率的方法及相应的装置
公开(公告)号：US08040030B2
公开(公告)日：2011-10-18
申请号：US12300858
申请日：2007-05-08
申请人： Jeroen Jonkers , Dominik Marcel Vaudrevange
发明人： Jeroen Jonkers , Dominik Marcel Vaudrevange
IPC分类号： H01J61/18 , H01J61/28
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp, in which a discharge plasma (8) emitting EUV radiation or soft X-rays is generated in a gaseous medium formed by an evaporated liquid material in a discharge space, said liquid material being provided on a surface in the discharge space and being at least partially evaporated by an energy beam (9). The invention also refers to a corresponding apparatus for producing EUV radiation and/or soft X-rays. In the method, a gas (11) composed of chemical elements having a lower mass number than chemical elements of the liquid material is supplied through at least one nozzle (10) in a directed manner to the discharge space and/or to the liquid material on a supply path to the discharge space in order to reduce the density of the evaporated liquid material in the discharge space. With the present method and corresponding apparatus the conversion efficiency of the lamp is increased.
摘要翻译：本发明涉及一种提高EUV和/或软X射线灯的转换效率的方法，其中在由蒸发的形成的气体介质中产生放出EUV辐射或软X射线的放电等离子体（8）液体材料在放电空间中，所述液体材料设置在放电空间中的表面上，并被能量束（9）至少部分地蒸发。本发明还涉及用于产生EUV辐射和/或软X射线的相应装置。在该方法中，由具有比液体材料的化学元素低的质量数的化学元素构成的气体（11）通过至少一个喷嘴（10）以指向的方式供给到放电空间和/或液体材料在放电空间的供给路径上，以便减小放电空间中蒸发的液体材料的密度。利用本方法和相应的装置，灯的转换效率提高。

4. 发明授权

US07427766B2 Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation 有权
标题翻译：用于产生极紫外辐射或软X射线辐射的方法和装置
公开(公告)号：US07427766B2
公开(公告)日：2008-09-23
申请号：US10570535
申请日：2004-09-01
申请人： Jeroen Jonkers , Dominik Marcel Vaudrevange , Willi Neff
发明人： Jeroen Jonkers , Dominik Marcel Vaudrevange , Willi Neff
IPC分类号： A61N5/06 , G01J3/10 , H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced. The gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).
摘要翻译：一种通过电操作的放电产生极紫外辐射（EUV）或软X射线辐射的方法，特别是用于EUV光刻或计量的方法，其中等离子体（22）在气体介质中点燃至少两个放电空间（12）中的电极（14,16），所述等离子体发射要产生的辐射。气体介质由金属熔体（24）产生，金属熔体（24）施加到所述放电空间（12）中的表面，并且至少部分地被能量束，特别是激光束（20）蒸发。

5. 发明授权

US07688948B2 Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology 有权
标题翻译：用于在约1nm至约30nm的波长范围内产生辐射的方法和装置，并用于光刻设备或计量学
公开(公告)号：US07688948B2
公开(公告)日：2010-03-30
申请号：US11719881
申请日：2005-11-18
申请人： Jeroen Jonkers , Dominik Marcel Vaudrevange
发明人： Jeroen Jonkers , Dominik Marcel Vaudrevange
IPC分类号： H05G2/00
CPC分类号： H05G2/003
摘要： A method and an apparatus generate radiation in the wavelength range from about 1 nm to about 30 nm by an electrically operated discharge, which can be used in lithography or in metrology. A working gas is provided between two electrodes. Plasma is ignited in the working gas to generate radiation which is forwarded via an opening for further use. Debris particles are produced in at least one region of at least one of the electrodes. To retain the debris particles, the region is arranged with respect to the opening in such a way that movement paths of the debris particles run at least predominantly outside an area delimited by the opening.
摘要翻译：一种方法和装置通过电动放电产生在约1nm至约30nm的波长范围内的辐射，其可用于光刻或计量。在两个电极之间提供工作气体。等离子体在工作气体中被点燃以产生经由开口进一步使用的辐射。在至少一个电极的至少一个区域中产生碎屑颗粒。为了保持碎屑颗粒，该区域相对于开口被布置成使得碎屑颗粒的运动路径至少主要在由开口限定的区域的外部运行。

6. 发明授权

US08519368B2 Method and device for generating EUV radiation or soft X-rays 有权
标题翻译：用于产生EUV辐射或软X射线的方法和装置
公开(公告)号：US08519368B2
公开(公告)日：2013-08-27
申请号：US13054807
申请日：2009-07-21
申请人： Jakob Willi Neff , Dominik Marcel Vaudrevange , Peter Zink
发明人： Jakob Willi Neff , Dominik Marcel Vaudrevange , Peter Zink
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.
摘要翻译：本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。等离子体（15）在至少两个电极（1,2）之间的气态介质中点燃，其中所述气体介质至少部分地由施加到在放电空间中移动的表面的液体材料（6）产生，至少部分被一个或几个脉冲能量束蒸发。在所提出的方法和装置中，所述脉冲能量束的脉冲（9）相对于所述表面的移动方向指向至少两个不同的横向位置。通过这种措施，辐射发射体积扩大，对空间波动的敏感性较低，可以更好地适应任何应用的光学系统的要求。此外，可以通过该措施来增加光输出功率。

7. 发明申请

US20100194313A1 HIGH VOLTAGE ELECTRICAL CONNECTION LINE 审中-公开
标题翻译：高压电气连接线
公开(公告)号：US20100194313A1
公开(公告)日：2010-08-05
申请号：US12679969
申请日：2008-09-25
申请人： Dominik Marcel Vaudrevange , Jakob Willi Neff , Christof Metzmacher
发明人： Dominik Marcel Vaudrevange , Jakob Willi Neff , Christof Metzmacher
IPC分类号： H05B41/00 , H05K1/00 , H05K1/09
CPC分类号： H05B41/245
摘要： The present invention relates to a high voltage electrical connection line (11), in particular for electrically connecting a gas discharge source (10) to a high voltage power source (9). The connection line is formed of a stack of two electrically conductive plates (2) separated by an electrically isolating layer (1). An electrically conductive layer (8) of a material having a higher electrical resistivity than the material of the conductive plates (2) is arranged between said isolating layer (1) and said conductive plates (2). The proposed connection line provides a higher life time when used for connecting a high voltage power source and a pulsed discharge lamp.
摘要翻译：本发明涉及高压电连接线（11），特别是用于将气体放电源（10）电连接到高压电源（9）。连接线由两层由电绝缘层（1）分开的导电板（2）形成。具有比导电板（2）的材料更高的电阻率的材料的导电层（8）被布置在所述隔离层（1）和所述导电板（2）之间。所提出的连接线在连接高压电源和脉冲放电灯时提供更长的使用寿命。

8. 发明申请

US20110127442A1 METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS 有权
标题翻译：用于产生EUV辐射或软X射线的方法和装置
公开(公告)号：US20110127442A1
公开(公告)日：2011-06-02
申请号：US13054807
申请日：2009-07-21
申请人： Jakob Willi Neff , Dominik Marcel Vaudrevange , Peter Zink
发明人： Jakob Willi Neff , Dominik Marcel Vaudrevange , Peter Zink
IPC分类号： H01J17/02 , G01T1/16
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.
摘要翻译：本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。等离子体（15）在至少两个电极（1,2）之间的气体介质中点燃，其中所述气态介质至少部分地由施加到在放电空间中移动的表面的液体材料（6）产生，至少部分被一个或几个脉冲能量束蒸发。在所提出的方法和装置中，所述脉冲能量束的脉冲（9）相对于所述表面的移动方向指向至少两个不同的横向位置。通过这种措施，辐射发射体积扩大，对空间波动的敏感性较低，可以更好地适应任何应用的光学系统的要求。此外，可以通过该措施来增加光输出功率。

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