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1. 发明授权

US08039406B2 Method of gap-filling using amplitude modulation radiofrequency power and apparatus for the same 有权
标题翻译：使用调幅射频电源的间隙填充方法及其设备
公开(公告)号：US08039406B2
公开(公告)日：2011-10-18
申请号：US12558559
申请日：2009-09-13
申请人： Jeong Hoon Han , Jin Hyuk Yoo , Young Rok Kim
发明人： Jeong Hoon Han , Jin Hyuk Yoo , Young Rok Kim
IPC分类号： C23C16/505 , H01L21/42
CPC分类号： H01L21/31608 , C23C16/045 , C23C16/507 , H01L21/02164 , H01L21/02274 , H01L21/76837
摘要： A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.
摘要翻译：在衬底上填充间隙的方法包括将其上形成有间隙的衬底设置在腔室中的基座上; 向腔室施加源功率以产生等离子体进入腔室; 将工艺气体供应到所述室中; 通过向所述基座施加第一偏置功率来将薄膜填充到间隙中，所述第一偏置功率的幅度被周期性地调制; 停止处理气体的供给并切断第一偏压功率; 并熄灭腔室中的等离子体。

2. 发明申请

US20070264791A1 METHOD OF GAP-FILLING USING AMPLITUDE MODULATION RADIOFREQUENCY POWER AND APPARATUS FOR THE SAME 有权
标题翻译：使用振幅调制无线电功率的空隙填充方法及其设备
公开(公告)号：US20070264791A1
公开(公告)日：2007-11-15
申请号：US11746566
申请日：2007-05-09
申请人： Jeong Hoon Han , Jin Hyuk Yoo , Young Rok Kim
发明人： Jeong Hoon Han , Jin Hyuk Yoo , Young Rok Kim
IPC分类号： H01L21/76
CPC分类号： H01L21/31608 , C23C16/045 , C23C16/507 , H01L21/02164 , H01L21/02274 , H01L21/76837
摘要： A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.
摘要翻译：在衬底上填充间隙的方法包括将其上形成有间隙的衬底设置在腔室中的基座上; 向腔室施加源功率以产生等离子体进入腔室; 将工艺气体供应到所述室中; 通过向所述基座施加第一偏置功率来将薄膜填充到间隙中，所述第一偏置功率的幅度被周期性地调制; 停止处理气体的供给并切断第一偏压功率; 并熄灭腔室中的等离子体。

3. 发明申请

US20100031886A1 METHOD OF GAP-FILLING USING AMPLITUDE MODULATION RADIOFREQUENCY POWER AND APPARATUS FOR THE SAME 有权
标题翻译：使用振幅调制无线电功率的空隙填充方法及其设备
公开(公告)号：US20100031886A1
公开(公告)日：2010-02-11
申请号：US12558559
申请日：2009-09-13
申请人： Jeong Hoon Han , Jin Hyuk Yoo , Young Rok Kim
发明人： Jeong Hoon Han , Jin Hyuk Yoo , Young Rok Kim
IPC分类号： C23C16/513
CPC分类号： H01L21/31608 , C23C16/045 , C23C16/507 , H01L21/02164 , H01L21/02274 , H01L21/76837
摘要： A method of filling a gap on a substrate comprises disposing the substrate, on which the gap is formed, on a susceptor in a chamber; applying a source power to the chamber to generate plasmas into the chamber; supplying a process gas into the chamber; filling a thin film into a gap by applying a first bias power to the susceptor, an amplitude of the first bias power being periodically modulated; stopping supply of the process gas and cutting off the first bias power; and extinguish the plasmas in the chamber.
摘要翻译：在衬底上填充间隙的方法包括将其上形成有间隙的衬底设置在腔室中的基座上; 向腔室施加源功率以产生等离子体进入腔室; 将工艺气体供应到所述室中; 通过向所述基座施加第一偏置功率来将薄膜填充到间隙中，所述第一偏置功率的幅度被周期性地调制; 停止处理气体的供给并切断第一偏压功率; 并熄灭腔室中的等离子体。

4. 发明申请

US20120255601A1 Hybrid Solar Cell and Method for Manufacturing the Same 审中-公开
标题翻译：混合太阳能电池及其制造方法
公开(公告)号：US20120255601A1
公开(公告)日：2012-10-11
申请号：US13502728
申请日：2010-01-01
申请人： Jin Hyuk Yoo
发明人： Jin Hyuk Yoo
IPC分类号： H01L31/065 , H01L31/18 , H01L31/0224
CPC分类号： H01L31/022483 , H01L31/072 , H01L31/0747 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： A hybrid solar cell and a method for manufacturing the same is disclosed, wherein the hybrid solar cell comprises a semiconductor wafer having a predetermined polarity; a first semiconductor layer on one surface of the semiconductor wafer; a second semiconductor layer on the other surface of the semiconductor wafer, wherein the second semiconductor layer is different in polarity from the first semiconductor layer; a first electrode on the first semiconductor layer; a second electrode on the second semiconductor layer; and at least one of first and second interfacial layers, wherein the first interfacial layer containing ZnO is formed between the first semiconductor layer and the first electrode, and the second interfacial layer containing ZnO is formed between the second semiconductor layer and the second electrode, wherein the hybrid solar cell is provided with the interfacial layer between the first semiconductor layer and the first electrode and/or between the second semiconductor layer and the second electrode, so that it is possible to prevent the material of the electrode from permeating into the semiconductor layer, and to collect the carriers in the semiconductor wafer and to smoothly drift the collected carriers to the electrode, thereby improving the cell efficiency.
摘要翻译：公开了一种混合太阳能电池及其制造方法，其中，所述混合太阳能电池包括具有预定极性的半导体晶片; 在半导体晶片的一个表面上的第一半导体层; 在所述半导体晶片的另一个表面上的第二半导体层，其中所述第二半导体层的极性与所述第一半导体层不同; 在所述第一半导体层上的第一电极; 在所述第二半导体层上的第二电极; 以及第一和第二界面层中的至少一个，其中在第一半导体层和第一电极之间形成含有ZnO的第一界面层，并且在第二半导体层和第二电极之间形成含有ZnO的第二界面层，其中混合太阳能电池在第一半导体层和第一电极之间和/或第二半导体层与第二电极之间设置有界面层，从而可以防止电极的材料渗入半导体层并且收集半导体晶片中的载流子并且将收集的载流子平滑地漂移到电极，从而提高电池效率。

5. 发明申请

US20120204943A1 Hybrid Solar Cell and Method for Manufacturing the Same 审中-公开
标题翻译：混合太阳能电池及其制造方法
公开(公告)号：US20120204943A1
公开(公告)日：2012-08-16
申请号：US13502731
申请日：2010-01-01
申请人： Jin Hyuk Yoo
发明人： Jin Hyuk Yoo
IPC分类号： H01L31/0352 , H01L31/0224
CPC分类号： H01L31/0747 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： A hybrid solar cell is disclosed, which is capable of preventing a defect from occurring in a surface of a semiconductor wafer when forming a thin-film type semiconductor layer on the semiconductor wafer, to thereby improve cell efficiency by the increase of open-circuit voltage, the hybrid solar cell comprising a semiconductor wafer having a predetermined polarity; a first semiconductor layer on one surface of the semiconductor wafer; a second semiconductor layer on the other surface of the semiconductor wafer, wherein the second semiconductor layer is different in polarity from the first semiconductor layer; a first electrode on the first semiconductor layer; and a second electrode on the second semiconductor layer; wherein the first semiconductor layer comprises a lightly doped first semiconductor layer on one surface of the semiconductor wafer; and a highly doped first semiconductor layer on the lightly doped first semiconductor layer.
摘要翻译：公开了一种混合太阳能电池，其能够防止在半导体晶片上形成薄膜型半导体层时在半导体晶片的表面发生缺陷，从而通过开路电压的提高来提高电池效率，所述混合太阳能电池包括具有预定极性的半导体晶片; 在半导体晶片的一个表面上的第一半导体层; 在所述半导体晶片的另一个表面上的第二半导体层，其中所述第二半导体层的极性与所述第一半导体层不同; 在所述第一半导体层上的第一电极; 和在第二半导体层上的第二电极; 其中所述第一半导体层包括在所述半导体晶片的一个表面上的轻掺杂的第一半导体层; 以及在轻掺杂的第一半导体层上的高度掺杂的第一半导体层。

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