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    • 4. 发明申请
    • Micromechanical pressure sensor element and method for using a pressure sensor element of this type
    • 微机械压力传感器元件和使用这种压力传感器元件的方法
    • US20060288789A1
    • 2006-12-28
    • US11472106
    • 2006-06-20
    • Dirk Ullmann
    • Dirk Ullmann
    • G01L9/00
    • G01P13/00B60C23/0408
    • A micromechanical pressure sensor element, in particular for tire pressure measurement. The device has at least: a layer system having a diaphragm underneath which a cavity is formed, which is separated from an external space outside the pressure sensor element; a measuring device for measuring a deflection of the diaphragm; and a seismic mass formed on, underneath, or in the diaphragm. Furthermore, in a method for using such a pressure sensor element, the pressure sensor element is operatable in a sleep mode having lower power consumption and in an operating mode having higher power consumption; in the sleep mode a change in the measuring signals of the measuring device over time is checked, and if a relevant change in the measuring signals is detected, a position change is inferred and a switchover to the operating mode is performed, in which the measuring signals of the measuring device or the analysis signals formed from the measuring signals are transmitted via a transmitter, for example, an antenna.
    • 微机械压力传感器元件,特别用于轮胎压力测量。 该装置至少具有:具有隔膜的层系统,其下形成有与压力传感器元件外部的外部空间分离的空腔; 用于测量隔膜的偏转的测量装置; 以及在隔膜上,下面或隔膜中形成的地震质量。 此外,在使用这种压力传感器元件的方法中,压力传感器元件可以以具有较低功耗的睡眠模式和具有较高功耗的操作模式操作; 在睡眠模式中,检查测量装置的测量信号随时间的变化,并且如果检测到测量信号的相关变化,则推断位置变化,并且执行切换到操作模式,其中测量 测量装置的信号或由测量信号形成的分析信号通过发射机例如天线发射。
    • 8. 发明授权
    • Micromechanical pressure sensor element and method for using a pressure sensor element of this type
    • 微机械压力传感器元件和使用这种压力传感器元件的方法
    • US07305874B2
    • 2007-12-11
    • US11472106
    • 2006-06-20
    • Dirk Ullmann
    • Dirk Ullmann
    • B60C23/02
    • G01P13/00B60C23/0408
    • A micromechanical pressure sensor element, in particular for tire pressure measurement. The device has at least: a layer system having a diaphragm underneath which a cavity is formed, which is separated from an external space outside the pressure sensor element; a measuring device for measuring a deflection of the diaphragm; and a seismic mass formed on, underneath, or in the diaphragm. Furthermore, in a method for using such a pressure sensor element, the pressure sensor element is operatable in a sleep mode having lower power consumption and in an operating mode having higher power consumption; in the sleep mode a change in the measuring signals of the measuring device over time is checked, and if a relevant change in the measuring signals is detected, a position change is inferred and a switchover to the operating mode is performed, in which the measuring signals of the measuring device or the analysis signals formed from the measuring signals are transmitted via a transmitter, for example, an antenna.
    • 微机械压力传感器元件,特别用于轮胎压力测量。 该装置至少具有:具有隔膜的层系统,其下形成有与压力传感器元件外部的外部空间分离的空腔; 用于测量隔膜的偏转的测量装置; 以及在隔膜上,下面或隔膜中形成的地震质量。 此外,在使用这种压力传感器元件的方法中,压力传感器元件可以以具有较低功耗的睡眠模式和具有较高功耗的操作模式操作; 在睡眠模式中,检查测量装置的测量信号随时间的变化,并且如果检测到测量信号的相关变化,则推断位置变化,并且执行切换到操作模式,其中测量 测量装置的信号或由测量信号形成的分析信号通过发射机例如天线发射。