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    • 2. 发明申请
    • SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES
    • 半导体器件及制造半导体器件的方法
    • US20120074484A1
    • 2012-03-29
    • US13223698
    • 2011-09-01
    • Jin-Kyu KANGWoon-Kyung LEEJee-Yong KIMJung-Hwan LEE
    • Jin-Kyu KANGWoon-Kyung LEEJee-Yong KIMJung-Hwan LEE
    • H01L21/336H01L29/788
    • H01L21/764H01L21/7682H01L27/11524H01L27/11526
    • A method of manufacturing a semiconductor device including forming a plurality of gate structures spaced apart from each other on a substrate; forming a first insulation layer covering the gate structures, the first insulation layer including a void between the gate structures; removing an upper portion of the first insulation layer to form a first insulation layer pattern on sidewalls of lower portions of the gate structures and on the substrate between the gate structures, the first insulation layer pattern including a first recess thereon; forming a conductive layer on upper portions of the gate structures exposed by the first insulation layer pattern; reacting the conductive layer with the gate structures; and forming a second insulation layer on the upper portions of the gate structures, the second insulation layer including a second recess therebeneath in fluid communication with the first recess.
    • 一种制造半导体器件的方法,包括在衬底上形成彼此间隔开的多个栅极结构; 形成覆盖所述栅极结构的第一绝缘层,所述第一绝缘层包括所述栅极结构之间的空隙; 去除所述第一绝缘层的上部以在所述栅极结构的下部的侧壁和所述栅极结构之间的所述衬底上形成第一绝缘层图案,所述第一绝缘层图案包括其上的第一凹部; 在由第一绝缘层图案暴露的栅极结构的上部形成导电层; 使导电层与栅极结构反应; 以及在所述栅极结构的上部形成第二绝缘层,所述第二绝缘层包括与所述第一凹部流体连通的第二凹部。