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1. 发明申请

US20070069666A1 Apparatus for processing an object with high position accurancy 失效
标题翻译：用于处理具有高位置精度的物体的装置
公开(公告)号：US20070069666A1
公开(公告)日：2007-03-29
申请号：US10539371
申请日：2003-12-15
申请人： Jan Van Eijk , Arjan Bakker , Dennis Bos , Johan Compter , Angelo De Klerk , Franciscus Roes , Hubert Gerard Jean Vroomen , Thomas Warmerdam
发明人： Jan Van Eijk , Arjan Bakker , Dennis Bos , Johan Compter , Angelo De Klerk , Franciscus Roes , Hubert Gerard Jean Vroomen , Thomas Warmerdam
IPC分类号： H02K41/00 , G03B27/58
CPC分类号： F16C32/0472 , F16C32/0444 , G05B2219/41327 , G05B2219/42092 , G05B2219/49276 , H01J37/20 , H01J2237/20278 , H01J2237/3175 , H02K11/22 , H02K41/031
摘要： A apparatus processes an object (19), such as a semi-conductor wafer at accurately controlled positions. The object (19) is supported by a working platform (12) that is moveable along a path. A suspension actuator part (14) attached to the working platform (12), contains a soft magnetic core (24) with poles facing the surface of a soft magnetic element (34) on the support structure along the path and a winding (20) for application of a current to generate a magnetic field that runs through the core (24) via the poles and returns via the soft magnetic element (34). A sensor (17) senses a measured position of the suspension actuator part (14) relative to the position reference element (16). A control circuit comprises an outer control circuit (40) and an inner control circuit (42). The outer control circuit (40) receives a sensing result and determines force set point information to regulate the measured position of the actuator part (14) to a required value. The inner control circuit (42) receives the force set point information and controls the current to realize a force between the actuator part (14) and the support structure (10) according to the force set point information.
摘要翻译：一种设备在精确控制的位置处理诸如半导体晶片的物体（19）。物体（19）由可沿着路径移动的工作平台（12）支撑。安装在工作平台（12）上的悬架致动器部件（14）包含一个软磁芯（24），该软磁芯（24）具有面向沿该路径的支撑结构上的软磁元件（34）表面的磁极和一个绕组（20）用于施加电流以产生通过所述磁极穿过所述磁芯（24）并经由所述软磁元件（34）返回的磁场。传感器（17）相对于位置参考元件（16）感测悬架致动器部件（14）的测量位置。控制电路包括外部控制电路（40）和内部控制电路（42）。外部控制电路（40）接收感测结果并且确定力设定点信息以将致动器部件（14）的测量位置调节到所需值。内部控制电路（42）接收力设定点信息并根据力设定点信息控制电流以实现致动器部件（14）和支撑结构（10）之间的力。

2. 发明申请

US20070108848A1 Lithographic apparatus and motor 失效
标题翻译：光刻设备和电机
公开(公告)号：US20070108848A1
公开(公告)日：2007-05-17
申请号：US11273634
申请日：2005-11-15
申请人： Sven Hol , Angelo De Klerk , Erik Loopstra , Fransicus Jacobs , Mark Scholten , Arjan Bakker
发明人： Sven Hol , Angelo De Klerk , Erik Loopstra , Fransicus Jacobs , Mark Scholten , Arjan Bakker
IPC分类号： H02K41/00 , G03B27/42
CPC分类号： H02K41/03 , G03F7/70758 , H02K2201/18
摘要： A motor includes a magnet assembly to generate a magnetic field. The field includes along the first direction parts which are alternately orientated in the first and the second direction. The parts extend in a third direction which is perpendicular to the first and the second direction. The motor further includes a first coil winding to carry a first current. The first coil winding to extend in the first direction between parts of the magnetic field orientated in the second direction, to generate the force in the first direction. The motor also includes a second coil winding to carry a second current. The second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction.
摘要翻译：电动机包括用于产生磁场的磁体组件。该场包括沿着第一方向的部分，其沿第一方向和第二方向交替取向。这些部件在垂直于第一和第二方向的第三方向上延伸。电动机还包括用于承载第一电流的第一线圈绕组。所述第一线圈绕组在所述磁场的部分之间沿所述第一方向在所述第二方向上定向，以在所述第一方向上产生力。电动机还包括用于承载第二电流的第二线圈绕组。所述第二线圈绕组在所述磁场的各部分之间沿所述第一方向沿所述第一方向大致取向，以在所述第二方向上产生所述力。

3. 发明申请

US20060016860A1 Wirebonding method and apparatus 有权
公开(公告)号：US20060016860A1
公开(公告)日：2006-01-26
申请号：US10538281
申请日：2003-11-17
申请人： Thomas Kampschreur , Joep Stokkermans , Arjan Bakker , Piet Van Rens , Arnoldus Jacobus De Vet , Piet Van Der Meer
发明人： Thomas Kampschreur , Joep Stokkermans , Arjan Bakker , Piet Van Rens , Arnoldus Jacobus De Vet , Piet Van Der Meer
IPC分类号： B23K31/00
CPC分类号： H01L24/85 , H01L24/78 , H01L2224/451 , H01L2224/78301 , H01L2224/85 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01039 , H01L2924/01082 , H01L2924/14 , H01L2224/48
摘要： A method and apparatus are discloses for wirebonding leads of a plurality of lead frames being part of a lead frame assembly by a wirebonding tool to semiconductor products mounted on the respective lead frames. The semiconductor products are clamped by a clamping mechanism comprising a stationary clamp and a movable clamp. The movable clamp follows the indexing movement of the lead frame assembly during wirebonding of the semiconductor products clamped by the movable clamp. The wirebonding process does not need to be interrupted for the indexing.

4. 发明授权

US08902031B2 Guide having passive gravity compensation and a vertically movably mounted platform 有权
标题翻译：导向装置具有被动重力补偿和垂直移动安装的平台
公开(公告)号：US08902031B2
公开(公告)日：2014-12-02
申请号：US13642830
申请日：2011-03-30
申请人： John Compter , Bart Van Campen , Arjan Bakker
发明人： John Compter , Bart Van Campen , Arjan Bakker
IPC分类号： H01F7/02 , H01F7/20 , H02N15/00 , F16C32/04
CPC分类号： H01F7/0236 , F16C32/0434 , H02N15/00
摘要： A guide having passive gravity compensation via a magnet assembly for guiding a first body relative to a second body in a vertical direction has a spring guide which allows movements between a first and second body in the vertical direction and blocks the same in all other directions. The first body is connected to a first magnet and the second body to a second magnet. The second magnet has an opening within which the first magnet is configured, at least in part, so that a repulsion force, which counteracts the gravity of the first body, acts between the first and the second magnet that are each magnetized parallel to the vertical direction, but oppositely, the positive mechanical stiffness of the spring guide being at least partially compensated by a negative stiffness of the magnetic spring formed by the first and second magnets, and the first and second magnets being shaped such that a horizontal distance between the first and second magnet inside of the opening of the second magnet varies in the vertical direction. A platform supported by such guides is provided.
摘要翻译：具有通过用于在第一主体相对于第二主体沿垂直方向引导第一主体的磁体组件的被动重力补偿的引导件具有允许在第一和第二主体之间沿垂直方向移动并在所有其它方向上阻挡第一主体的弹簧引导件。第一主体连接到第一磁体，第二主体连接到第二磁体。第二磁体具有至少部分地构造第一磁体的开口，使得抵消第一主体的重力的排斥力在第一和第二磁体之间作用，所述排斥力平行于垂直方向被磁化但是相反地，弹簧引导件的正机械刚度至少部分地由由第一和第二磁体形成的磁性弹簧的负刚度补偿，并且第一和第二磁体被成形为使得第一和第二磁体之间的水平距离并且第二磁体的开口内的第二磁体在垂直方向上变化。提供了由这些指南支持的平台。

5. 发明申请

US20130076467A1 GUIDE HAVING PASSIVE GRAVITY COMPENSATION AND A VERTICALLY MOVABLY MOUNTED PLATFORM 有权
标题翻译：具有被动重力补偿和垂直移动安装平台的指南
公开(公告)号：US20130076467A1
公开(公告)日：2013-03-28
申请号：US13642830
申请日：2011-03-30
申请人： John Compter , Bart Van Campen , Arjan Bakker
发明人： John Compter , Bart Van Campen , Arjan Bakker
IPC分类号： H01F7/02
CPC分类号： H01F7/0236 , F16C32/0434 , H02N15/00
摘要： A guide having passive gravity compensation via a magnet assembly for guiding a first body relative to a second body in a vertical direction has a spring guide which allows movements between a first and second body in the vertical direction and blocks the same in all other directions. The first body is connected to a first magnet and the second body to a second magnet. The second magnet has an opening within which the first magnet is configured, at least in part, so that a repulsion force, which counteracts the gravity of the first body, acts between the first and the second magnet that are each magnetized parallel to the vertical direction, but oppositely, the positive mechanical stiffness of the spring guide being at least partially compensated by a negative stiffness of the magnetic spring formed by the first and second magnets, and the first and second magnets being shaped such that a horizontal distance between the first and second magnet inside of the opening of the second magnet varies in the vertical direction. A platform supported by such guides is provided.
摘要翻译：具有通过用于在第一主体相对于第二主体沿垂直方向引导第一主体的磁体组件的被动重力补偿的引导件具有允许在第一和第二主体之间沿垂直方向移动并在所有其它方向上阻挡第一主体的弹簧引导件。第一主体连接到第一磁体，第二主体连接到第二磁体。第二磁体具有至少部分地构造第一磁体的开口，使得抵消第一主体的重力的排斥力在第一和第二磁体之间作用，所述排斥力平行于垂直方向被磁化但是相反地，弹簧引导件的正机械刚度至少部分地由由第一和第二磁体形成的磁性弹簧的负刚度补偿，并且第一和第二磁体被成形为使得第一和第二磁体之间的水平距离并且第二磁体的开口内的第二磁体在垂直方向上变化。提供了由这些指南支持的平台。

6. 发明申请

US20070188724A1 Lithographic apparatus and stage apparatus 失效
标题翻译：平版印刷设备和舞台设备
公开(公告)号：US20070188724A1
公开(公告)日：2007-08-16
申请号：US11353249
申请日：2006-02-14
申请人： Fransicus Jacobs , Marcel Baggen , Erik Loopstra , Harmen Schoot , Arjan Bakker , Arjan Wel , Krijn Bustraan
发明人： Fransicus Jacobs , Marcel Baggen , Erik Loopstra , Harmen Schoot , Arjan Bakker , Arjan Wel , Krijn Bustraan
IPC分类号： G03B27/42
CPC分类号： G03F7/70716 , G03F7/70358 , G03F7/707
摘要： A lithographic apparatus includes a support constructed to support a patterning device. The patterning device is capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam. The support includes a force actuator device to exert a force onto the patterning device in a direction of movement of the support. The force actuator device includes a movable part which is pivotably about a pivot axis and thereby connected to the support. The movable part is in the direction of movement of the support substantially balanced with respect to the pivot axis. The force actuator device further includes an actuator to exert via the movable part the force onto the patterning device, to at least partly compensate for the information or a risk of slippage due to acceleration of the support in the direction of movement.
摘要翻译：光刻设备包括构造成支撑图案形成装置的支撑件。图案形成装置能够在其横截面中赋予具有图案的辐射束以形成图案化的辐射束。该支撑件包括一个力促动器装置，以在支撑件的移动方向上向图案形成装置施加力。力致动器装置包括可枢转地围绕枢转轴线并由此连接到支撑件的可移动部件。可移动部分在支撑件的运动方向上相对于枢转轴线基本平衡。力致动器装置还包括致动器，其经由可移动部件施加力到图案形成装置上，以至少部分地补偿信息或由于支撑件沿着移动方向的加速而导致的滑动的风险。

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