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1. 发明授权

US07154607B2 Flat spectrum illumination source for optical metrology 有权
标题翻译：平面光谱照明光源用于光学计量学
公开(公告)号：US07154607B2
公开(公告)日：2006-12-26
申请号：US10700086
申请日：2003-11-03
申请人： James Lee Hendrix , David Y. Wang , David M. Aikens , Lawrence Rotter , Joel Ng
发明人： James Lee Hendrix , David Y. Wang , David M. Aikens , Lawrence Rotter , Joel Ng
IPC分类号： G01N21/55
CPC分类号： G01J3/02 , G01J3/0218 , G01J3/10 , G01N21/55 , G01N21/9501 , G01N2201/06146 , G01N2201/0826
摘要： A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.
摘要翻译：用于光学测量系统的平面光谱照明源包括产生可见光束的第一光源和产生紫外光束的第二光源。照明源还包括在可见光束和紫外光束之间的波长处产生光束的辅助光源。三个光束被组合以提供在宽范围的波长上具有基本均匀的照明水平的宽带探测光束。或者，照明源可以被制造为被选择以覆盖一定范围的分开的波长的发光二极管的阵列。组合LED阵列的输出以产生宽带探测光束。

2. 发明授权

US06744505B1 Compact imaging spectrometer 失效
标题翻译：紧凑型成像光谱仪
公开(公告)号：US06744505B1
公开(公告)日：2004-06-01
申请号：US10208323
申请日：2002-07-30
申请人： David Y. Wang , David M. Aikens
发明人： David Y. Wang , David M. Aikens
IPC分类号： G01J314
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/0256 , G01J3/1804 , G01J3/2823
摘要： The subject invention relates to the design of a compact imaging spectrometer for use in thin film measurement and general spectroscopic applications. The spectrometer includes only two elements, a rotationally symmetric aspheric reflector and a plane grating. When employed in a pupil centric geometry the spectrometer has no coma or image distortion. Both spherical aberration and astigmatism can be independently corrected. The invention is broadly applicable to the field of optical metrology, particularly optical metrology tools for performing measurements of patterned thin films on semiconductor integrated circuits
摘要翻译：本发明涉及用于薄膜测量和一般光谱应用的紧凑型成像光谱仪的设计。光谱仪仅包括两个元件，旋转对称非球面反射器和平面光栅。当以瞳孔中心几何形式使用时，光谱仪没有昏迷或图像失真。可以独立地校正球面像差和像散。本发明广泛地适用于光学测量领域，特别是用于在半导体集成电路上执行图案化薄膜测量的光学测量工具

3. 发明授权

US06587282B1 Broadband refractive objective for small spot optical metrology 有权
$Broadband refractive objective for small spot optical metrology$
标题翻译：宽带折射目标用于小光点光学测量
公开(公告)号：US06587282B1
公开(公告)日：2003-07-01
申请号：US10222296
申请日：2002-08-16
申请人： David Y. Wang , David M. Aikens
发明人： David Y. Wang , David M. Aikens
IPC分类号： G02B900
CPC分类号： G02B13/146 , G02B9/14 , G02B9/16
摘要： The subject invention relates to broadband optical metrology tools for performing measurements of patterned thin films on semiconductor integrated circuits. Particularly a family of optical designs for broadband, multi-wavelength, DUV-IR (185
摘要翻译：本发明涉及用于对半导体集成电路上的图案化薄膜进行测量的宽带光学测量工具。特别是宽带，多波长，DUV-IR（185

4. 发明授权

US06879449B2 Broadband refractive objective for small spot optical metrology 有权
$Broadband refractive objective for small spot optical metrology$
标题翻译：宽带折射目标用于小光点光学测量
公开(公告)号：US06879449B2
公开(公告)日：2005-04-12
申请号：US10429268
申请日：2003-05-02
申请人： David Y. Wang , David M. Aikens
发明人： David Y. Wang , David M. Aikens
IPC分类号： G02B9/14 , G02B9/16 , G02B13/14 , G02B9/12 , G02B9/04
CPC分类号： G02B13/146 , G02B9/14 , G02B9/16
摘要： The subject invention relates to broadband optical metrology tools for performing measurements of patterned thin films on semiconductor integrated circuits. Particularly a family of optical designs for broadband, multi-wavelength, DUV-IR (185
摘要翻译：本发明涉及用于对半导体集成电路上的图案化薄膜进行测量的宽带光学测量工具。特别是用于宽带，多波长，DUV-IR（185 <λ<900nm）全折射光学系统的光学设计系列。这些设计具有净聚焦功率，这通过将至少一个带正电的光学元件与一个负电光学元件组合来实现。这些设计在185-900nm的波长范围内具有小的尺寸，具有显着减小的球面像差，轴向颜色，球形色差和纬向球面像差。折射光学系统广泛适用于大类宽带光学晶片计量工具，包括分光光度计，光谱反射计，光谱椭偏仪和分光散射仪。

5. 发明授权

US07061614B2 Measurement system with separate optimized beam paths 有权
公开(公告)号：US07061614B2
公开(公告)日：2006-06-13
申请号：US10141267
申请日：2002-05-08
申请人： David Y. Wang , Lawrence Rotter , Jeffrey T. Fanton , Jeffrey E. McAninch
发明人： David Y. Wang , Lawrence Rotter , Jeffrey T. Fanton , Jeffrey E. McAninch
IPC分类号： G01J4/00
CPC分类号： G01N21/55 , G01B11/00 , G01J3/10 , G01J3/36 , G01N21/211
摘要： The subject invention relates to a broadband optical metrology system that segregates the broadband radiation into multiple sub-bands to improve overall performance. Each sub-band includes only a fraction of the original bandwidth. The optical path—the light path that connects the illuminator, the sample and the detector—of each sub-band includes a unique sub-band optical system designed to optimize the performance over the spectral range spanned by the sub-band radiation. All of the sub-band optical systems are arranged to provide small-spot illumination at the same measurement position. Optional purging of the individual sub-band optical paths further improves performance.

6. 发明授权

US07227637B2 Measurement system with separate optimized beam paths 有权
标题翻译：测量系统具有单独优化的光束路径
公开(公告)号：US07227637B2
公开(公告)日：2007-06-05
申请号：US11399841
申请日：2006-04-07
申请人： David Y. Wang , Lawrence Rotter , Jeffrey T. Fanton , Jeffrey E. McAninch
发明人： David Y. Wang , Lawrence Rotter , Jeffrey T. Fanton , Jeffrey E. McAninch
IPC分类号： G01J3/28 , G01N21/55
CPC分类号： G01N21/55 , G01B11/00 , G01J3/10 , G01J3/36 , G01N21/211
摘要： The subject invention relates to a broadband optical metrology system that segregates the broadband radiation into multiple sub-bands to improve overall performance. Each sub-band includes only a fraction of the original bandwidth. The optical path—the light path that connects the illuminator, the sample and the detector—of each sub-band includes a unique sub-band optical system designed to optimize the performance over the spectral range spanned by the sub-band radiation. All of the sub-band optical systems are arranged to provide small-spot illumination at the same measurement position. Optional purging of the individual sub-band optical paths further improves performance.
摘要翻译：本发明涉及宽带光学测量系统，其将宽带辐射分离成多个子带以提高整体性能。每个子带仅包括原始带宽的一部分。光路 - 连接每个子带的照明器，样品和检测器的光路包括一个独特的子带光学系统，设计用于优化由子带辐射跨越的光谱范围的性能。所有子带光学系统被布置成在相同的测量位置处提供小点照明。各个子带光路的可选清洗进一步提高了性能。

7. 发明申请

US20150363010A1 FINGER-DRIVEN COMPUTER MOUSE 审中-公开
标题翻译：指尖驱动电脑鼠标
公开(公告)号：US20150363010A1
公开(公告)日：2015-12-17
申请号：US14831817
申请日：2015-08-20
申请人： David Y. Wang
发明人： David Y. Wang
IPC分类号： G06F3/0354
CPC分类号： G06F3/03543 , G06F2203/0333 , G06F2203/0335
摘要： The present invention relates to a finger-driven computer mouse. The finger-driven computer mouse includes a mouse housing and finger retention device adjacent thereto. The user inserts his or her finger tips in the finger retention device and can position the mouse across a flat surface by actions of the fingers except the thumb which is used to operate mouse buttons arranged on a side surface. The finger-driven mouse allows the wrist and hand muscles to be in a relaxed, natural posture.
摘要翻译：本发明涉及一种手指式计算机鼠标。手指驱动的计算机鼠标包括与其相邻的鼠标外壳和手指保持装置。用户将他或她的指尖插入手指保持装置中，并且可以通过除了用于操作布置在侧表面上的鼠标按钮的拇指之外的手指的动作将鼠标定位在平坦表面上。手指驱动的鼠标允许手腕和手部肌肉处于轻松自然的姿势。

8. 发明申请

US20100328670A1 SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION 失效
标题翻译：用于执行光热测量和放松补偿的系统和方法
公开(公告)号：US20100328670A1
公开(公告)日：2010-12-30
申请号：US12494734
申请日：2009-06-30
申请人： Lawrence D. Rotter , David Y. Wang , Derrick Shaughnessy , Mark Senko
发明人： Lawrence D. Rotter , David Y. Wang , Derrick Shaughnessy , Mark Senko
IPC分类号： G01N21/55
CPC分类号： G01N21/1717 , G01N2021/1731 , G01N2021/1761
摘要： A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.
摘要翻译：公开了一种用于进行样品的光热测量和松弛补偿的装置和方法。该装置可以包括探针束源，泵浦束源，样本和检测器阵列。方法可以包括调整强度调制的泵浦光束功率，调整探测光束功率以增加响应测量位置温度并增加经调制的光反射信号，将强度调制的泵浦光束和探测光束沿测量路径引导到响应测量定位在样品上以周期性地激发样品上的区域，检测探测光束的反射部分，以及计算植入剂量。

9. 发明授权

US07190460B2 Focusing optics for small spot optical metrology 有权
标题翻译：聚焦光学用于小光点光学测量
公开(公告)号：US07190460B2
公开(公告)日：2007-03-13
申请号：US10695007
申请日：2003-10-28
申请人： David Y. Wang
发明人： David Y. Wang
IPC分类号： G01N21/47
CPC分类号： G01N21/55 , G02B17/0615
摘要： A system for focusing broadband light within a reflectometer includes a concave spherical mirror for gathering light from the surface of a sample under inspection. The concave spherical mirror projects the received light to a convex spherical mirror. The combination of the two mirrors captures the light diverging from the sample and collimates the light into parallel rays. The light can then be passed through an aperture prior to entering a detector. Each of the two mirrors is fabricated as an off-axis section of a spherical mirror and positioned to form a partial Schwarzschild design without the associated problem of a central obscuration.
摘要翻译：用于将宽带光聚焦在反射计内的系统包括用于从被检查样品的表面收集光的凹球面镜。凹球面镜将接收的光投射到凸球面镜。两个镜子的组合捕获从样品发散的光并将光准直成平行光线。然后可以在进入检测器之前将光通过孔。两个反射镜中的每一个被制造为球面镜的离轴部分并且被定位成形成部分Schwarzschild设计，而没有相关的中心遮蔽问题。

10. 发明授权

US07020227B1 Method and apparatus for high-speed clock data recovery using low-speed circuits 失效
标题翻译：使用低速电路进行高速时钟数据恢复的方法和装置
公开(公告)号：US07020227B1
公开(公告)日：2006-03-28
申请号：US10161116
申请日：2002-05-31
申请人： David Y. Wang , Jyn-Bang Shyu , Yu-Chi Cheng
发明人： David Y. Wang , Jyn-Bang Shyu , Yu-Chi Cheng
IPC分类号： H04L7/00
CPC分类号： H04L7/0337 , H04L7/0025
摘要： A clock data recovery (CDR) circuit that can be used for recovering data from a high-speed serial transmission using components that operate at a fraction of the data speed. The CDR consists of a phase detector, an averaging circuit and a phase interpolator. The phase detector samples each data bit at its midpoint and at its transitional region and then compares the two samples to determine whether the sampling clock, which is generated by a phase interpolator, is leading or lagging the data stream. The averaging circuit filters out the high frequency jitters in the phase detector output and then passes the filtered signals on to the phase interpolator for phase selection. The phase interpolator uses the filtered signals from the averaging circuit as a guide in the selection of an output clock phase that minimizes the phase difference between the output clock and the incoming data.
摘要翻译：时钟数据恢复（CDR）电路，可用于使用以数据速度的一小部分运行的组件从高速串行传输中恢复数据。 CDR由相位检测器，平均电路和相位内插器组成。相位检测器在其中点和其过渡区域对每个数据位进行采样，然后比较两个采样，以确定由相位内插器产生的采样时钟是引导还是落后于数据流。平均电路滤除相位检测器输出中的高频抖动，然后将滤波的信号传递到相位内插器进行相位选择。相位插值器使用来自平均电路的滤波信号作为选择输出时钟相位的指导，其使输出时钟和输入数据之间的相位差最小化。

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