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1. 发明申请

US20120040590A1 NON-NEWTONIAN LAP 有权
标题翻译：非牛顿路
公开(公告)号：US20120040590A1
公开(公告)日：2012-02-16
申请号：US13210800
申请日：2011-08-16
申请人： James H. Burge , Dae Wook Kim
发明人： James H. Burge , Dae Wook Kim
IPC分类号： B24B1/00
CPC分类号： B24B37/11 , B24B37/24
摘要： In a non-conventional lap tool, i.e., not a stiff tool nor a conformable tool, and related method for grinding/polishing a substrate surface, includes a rigid base plate and attached work surface to define a cavity containing a non-Newtonian fluid. The non-Newtonian fluid behaves as a solid when the work surface is subjected to high shear stress, i.e., rapid tool stroke, yet behaves like a liquid when the tool is moved around the substrate surface when the shear stress of the work surface is low. A diaphragm can be used to further define the cavity and to seal within the non-Newtonian fluid therein.
摘要翻译：在非常规的搭接工具中，即不是刚性工具，也不是适合的工具，以及用于研磨/抛光衬底表面的相关方法，包括刚性基板和附接的工作表面，以限定包含非牛顿流体的空腔。当工作表面经受高剪切应力时，非牛顿流体表现为固体，即快速的工具冲程，当工件在工作表面的剪切应力低时，当工具移动到基板表面周围时，表现为液体。可以使用隔膜来进一步限定空腔并在其内的非牛顿流体内密封。

2. 发明授权

US09302367B2 Non-newtonian lap 有权
标题翻译：非牛顿圈
公开(公告)号：US09302367B2
公开(公告)日：2016-04-05
申请号：US13210800
申请日：2011-08-16
申请人： James H. Burge , Dae Wook Kim
发明人： James H. Burge , Dae Wook Kim
IPC分类号： B24B37/11 , B24B37/24
CPC分类号： B24B37/11 , B24B37/24
摘要： In a non-conventional lap tool, i.e., not a stiff tool nor a conformable tool, and related method for grinding/polishing a substrate surface, includes a rigid base plate and attached work surface to define a cavity containing a non-Newtonian fluid. The non-Newtonian fluid behaves as a solid when the work surface is subjected to high shear stress, i.e., rapid tool stroke, yet behaves like a liquid when the tool is moved around the substrate surface when the shear stress of the work surface is low. A diaphragm can be used to further define the cavity and to seal within the non-Newtonian fluid therein.
摘要翻译：在非常规的搭接工具中，即不是刚性工具，也不是适合的工具，以及用于研磨/抛光衬底表面的相关方法，包括刚性基板和附接的工作表面，以限定包含非牛顿流体的空腔。当工作表面经受高剪切应力时，非牛顿流体表现为固体，即快速的工具冲程，当工件在工作表面的剪切应力低时，当工具移动到基板表面周围时，表现为液体。可以使用隔膜来进一步限定空腔并在其内的非牛顿流体内密封。

3. 发明授权

US07072042B2 Apparatus for and method of measurement of aspheric surfaces using hologram and concave surface 失效
公开(公告)号：US07072042B2
公开(公告)日：2006-07-04
申请号：US10324117
申请日：2002-12-20
申请人： Tae-hee Kim , James H. Burge
发明人： Tae-hee Kim , James H. Burge
IPC分类号： G01B9/02
CPC分类号： G01M11/025 , G01B9/021 , G01M11/0271
摘要： An aspheric surface measuring apparatus includes an interferometer which generates incident light; a test piece having an aspheric surface from which the incident light is reflected as test light; a first optical element disposed on an optical path of the incident light, having at least one surface with a hologram for diffracting the incident light toward the test piece; and a second optical element disposed after the first optical element, which transmits the incident light toward the aspheric surface and has a concave surface to reduce an incident angle of the test light entering the hologram after having been reflected from the aspheric surface. Alternatively, a single optical element with a hologram and a concave surface can be used instead of the separate first and second optical elements. An extremely aspheric lens can be precisely measured using the apparatus.

4. 发明授权

US09068904B2 System and method for non-contact metrology of surfaces 有权
标题翻译：表面非接触式测量系统和方法
公开(公告)号：US09068904B2
公开(公告)日：2015-06-30
申请号：US13353110
申请日：2012-01-18
申请人： Robert E. Parks , Robert A. Smythe , Peng Su , James H. Burge , Roger Angel
发明人： Robert E. Parks , Robert A. Smythe , Peng Su , James H. Burge , Roger Angel
IPC分类号： G01B11/24 , G01M11/00 , G01M11/02 , G01B11/25
CPC分类号： G01M11/005 , G01B11/2513 , G01M11/0264
摘要： A non-contact metrology system utilizes a display that can be programmed with a plurality of targets. The display targets shine on a specular surface and the reflected targets are detected by an imaging device. Based on the display pattern and the expected location of the reflected pattern, it is possible to characterize the reflective surface. The displayed pattern can be a regular array of targets and the reflected pattern detected by the imaging device is an irregular display of targets whose locations are based on the particular display pattern, the location of the display system and imaging device and the nature of the surface. Deviations of the actual location of targets from the expected location of targets is indicative of unexpected variations in the surface. Alternatively, the display has an irregular pattern of targets such that the reflected signals result in a regularly spaced array detected by the imaging device.
摘要翻译：非接触计量系统利用可以用多个目标编程的显示器。显示目标在镜面上发光，并且由成像装置检测反射的目标。基于反射图案的显示图案和预期位置，可以表征反射表面。显示的图案可以是目标的规则阵列，并且由成像装置检测的反射图案是其位置基于特定显示图案，显示系统和成像装置的位置以及表面的性质的目标的不规则显示。目标的实际位置与目标的预期位置的偏差表示表面的意外变化。或者，显示器具有不规则的目标图案，使得反射信号导致由成像装置检测到的规则间隔的阵列。

5. 发明申请

US20120293808A1 SYSTEM AND METHOD FOR NON-CONTACT METROLOGY OF SURFACES 有权
标题翻译：表面非接触式计量系统与方法
公开(公告)号：US20120293808A1
公开(公告)日：2012-11-22
申请号：US13353110
申请日：2012-01-18
申请人： Robert E. Parks , Robert A. Smythe , Peng Su , James H. Burge , Roger Angel
发明人： Robert E. Parks , Robert A. Smythe , Peng Su , James H. Burge , Roger Angel
IPC分类号： G01B11/24 , G01N21/88
CPC分类号： G01M11/005 , G01B11/2513 , G01M11/0264
摘要： A non-contact metrology system utilizes a display that can be programmed with a plurality of targets. The display targets shine on a specular surface and the reflected targets are detected by an imaging device. Based on the display pattern and the expected location of the reflected pattern, it is possible to characterize the reflective surface. The displayed pattern can be a regular array of targets and the reflected pattern detected by the imaging device is an irregular display of targets whose locations are based on the particular display pattern, the location of the display system and imaging device and the nature of the surface. Deviations of the actual location of targets from the expected location of targets is indicative of unexpected variations in the surface. Alternatively, the display has an irregular pattern of targets such that the reflected signals result in a regularly spaced array detected by the imaging device.
摘要翻译：非接触计量系统利用可以用多个目标编程的显示器。显示目标在镜面上发光，并且由成像装置检测反射的目标。基于反射图案的显示图案和预期位置，可以表征反射表面。显示的图案可以是目标的规则阵列，并且由成像装置检测的反射图案是其位置基于特定显示图案，显示系统和成像装置的位置以及表面的性质的目标的不规则显示。目标的实际位置与目标的预期位置的偏差表示表面的意外变化。或者，显示器具有不规则的目标图案，使得反射信号导致由成像装置检测到的规则间隔的阵列。

6. 发明授权

US06983667B2 Impact micro-positioning actuator 失效
标题翻译：冲击微定位执行机构
公开(公告)号：US06983667B2
公开(公告)日：2006-01-10
申请号：US10202431
申请日：2002-07-23
申请人： Brian Cuerden , J. Roger P. Angel , James H. Burge , Scott T. DeRigne
发明人： Brian Cuerden , J. Roger P. Angel , James H. Burge , Scott T. DeRigne
IPC分类号： F16H25/20
CPC分类号： F16H25/20 , F16H31/006 , H02K7/06 , H02K33/02 , Y10T74/18576 , Y10T74/1876
摘要： An impact micro-positioning actuator. In one aspect of the invention, a threaded shaft is threadably received in a nut and the nut is impacted by an impacting device, causing the nut first to rotate relative to the shaft by slipping as a result of shaft inertia and subsequently to stick to the shaft as a result of the frictional force therebetween. The nut is returned to its initial position by a return force provided by a return mechanism after impact. The micro-positioning actuator is further improved by controlling at least one and preferably all of the following: the friction, the impact provided by the impacting device, the return force provided by the return mechanism, and the inertia of the shaft. In another aspect of the invention, a threaded shaft is threadably received in a nut and the shaft is impacted by an impacting device, causing the shaft to rotate relative to the nut.
摘要翻译：冲击微定位致动器。在本发明的一个方面中，螺纹轴被螺纹地容纳在螺母中，并且螺母被冲击装置冲击，从而使螺母首先通过由于轴的惯性而滑动而相对于轴旋转，随后坚持由于它们之间的摩擦力的结果。螺母在冲击后由返回机构提供的返回力返回到其初始位置。通过控制至少一个并且优选地全部以下内容来进一步改善微定位致动器：摩擦，冲击装置提供的冲击，由返回机构提供的返回力以及轴的惯性。在本发明的另一方面，螺纹轴被螺纹地容纳在螺母中，并且轴被冲击装置冲击，导致轴相对于螺母旋转。

7. 发明授权

US5737079A System and method for interferometric measurement of aspheric surfaces utilizing test plate provided with computer-generated hologram 失效
标题翻译：利用具有计算机生成的全息图的测试板进行非球面干涉测量的系统和方法
公开(公告)号：US5737079A
公开(公告)日：1998-04-07
申请号：US682387
申请日：1996-07-17
申请人： James H. Burge , David S. Anderson
发明人： James H. Burge , David S. Anderson
IPC分类号： G01B11/255 , G01M11/00 , G01B9/02
CPC分类号： G01B11/255 , G01M11/005
摘要： An interferometer including a test plate member having a computer-generated hologram (CGH) written on the reference surface. In a preferred testing configuration, the interferometer setup includes a laser light source, diverger lens, beamsplitters, collimators, and other auxiliary optics arranged in a common-path (Fizeau-type) configuration to minimize measurement errors for testing an optical test piece with the test plate member having the computer-generated hologram. By having the computer-generated hologram written directly on the reference surface of the test plate member, the measurement of aspheric optical surfaces is made with greater precision, more efficient, and with less cost than prior art interferometers and associated methods.
摘要翻译：一种干涉仪，包括具有写入参考表面的计算机生成的全息图（CGH）的测试板构件。在优选的测试配置中，干涉仪设置包括激光光源，分光镜，分光镜，准直仪和布置在公共路径（Fizeau型）配置中的其他辅助光学元件，以最小化用于测试光学测试片的测量误差，具有计算机生成的全息图的测试板构件。通过将计算机生成的全息图直接写在测试板构件的参考表面上，非球面光学表面的测量以比现有技术的干涉仪和相关方法更高的精度，更有效率和更低的成本进行。

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