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    • 1. 发明授权
    • Ultrasonic transmitter and receiver with compliant membrane
    • 超声波发射器和接收器兼容膜
    • US08770030B2
    • 2014-07-08
    • US13089513
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • G01N29/04
    • G01N29/245G01N2291/0427
    • An ultrasonic transmitter and receiver includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate.
    • 超声波发射器和接收器包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。
    • 2. 发明授权
    • Energy harvesting device including MEMS composite transducer
    • 能量收集装置包括MEMS复合传感器
    • US08759990B2
    • 2014-06-24
    • US13089507
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • F02B63/04
    • H02N2/186H01L41/1138
    • An energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The compliant member is configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.
    • 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上,第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 柔性构件被配置成通过相对于能量收集装置在外部产生的激励而被设置成振荡。
    • 3. 发明授权
    • Method of operating an ultrasonic transmitter and receiver
    • 操作超声波发射器和接收器的方法
    • US08667846B2
    • 2014-03-11
    • US13089524
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • G01N29/04
    • G01N29/2437B06B1/0622G01N29/04G10K9/122G10K13/00
    • Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member.
    • 操作超声波发射器和接收器包括提供MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。 电脉冲被发送到第一MEMS转换构件,这导致第一MEMS换能构件和柔性膜振动。 第一MEMS转换构件和柔性膜的振动被传送到物体。 从对象接收回波信号。 所接收的回波信号由第二MEMS转换构件转换成电信号。
    • 4. 发明申请
    • ENERGY HARVESTING DEVICE INCLUDING MEMS COMPOSITE TRANSDUCER
    • 包括MEMS复合传感器的能量采集装置
    • US20120267900A1
    • 2012-10-25
    • US13089507
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • H02K57/00
    • H02N2/186H01L41/1138
    • An energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The compliant member is configured to be set into oscillation by excitations produced externally relative to the energy harvesting device.
    • 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上,第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 柔性构件被配置成通过相对于能量收集装置在外部产生的激励而被设置成振荡。
    • 5. 发明申请
    • ENERGY HARVESTING USING MEMS COMPOSITE TRANSDUCER
    • 使用MEMS复合传感器的能量采集
    • US20120267899A1
    • 2012-10-25
    • US13089500
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • H02K57/00
    • H02N2/186H01L41/1138
    • A method of harvesting energy from the environment includes providing an energy harvesting device. The energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The energy harvesting device is configured so that the compliant membrane is set into oscillation by excitations produced external to the energy harvesting device. The MEMS transducing member is caused to move into and out of the cavity by the oscillating compliant membrane. The motion of the MEMS transducing member is converted into an electrical signal.
    • 从环境中收集能量的方法包括提供能量收集装置。 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上,第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 能量收集装置被配置为使得顺应性膜通过能量收集装置外部产生的激发而被设置成振荡。 通过振荡柔性膜使MEMS转换元件进入和流出空腔。 MEMS转换构件的运动被转换为电信号。
    • 6. 发明申请
    • METHOD OF OPERATING AN ULTRASONIC TRANSMITTER AND RECEIVER
    • 操作超声波发射机和接收机的方法
    • US20120266675A1
    • 2012-10-25
    • US13089524
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • G01N29/04
    • G01N29/2437B06B1/0622G01N29/04G10K9/122G10K13/00
    • Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member.
    • 操作超声波发射器和接收器包括提供MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。 电脉冲被发送到第一MEMS转换构件,这导致第一MEMS换能构件和柔性膜振动。 第一MEMS转换构件和柔性膜的振动被传送到物体。 从对象接收回波信号。 所接收的回波信号由第二MEMS转换构件转换成电信号。
    • 7. 发明授权
    • Energy harvesting using MEMS composite transducer
    • 使用MEMS复合传感器进行能量收集
    • US08680695B2
    • 2014-03-25
    • US13089500
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • F03D5/04G01L3/10
    • H02N2/186H01L41/1138
    • A method of harvesting energy from the environment includes providing an energy harvesting device. The energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The energy harvesting device is configured so that the compliant membrane is set into oscillation by excitations produced external to the energy harvesting device. The MEMS transducing member is caused to move into and out of the cavity by the oscillating compliant membrane. The motion of the MEMS transducing member is converted into an electrical signal.
    • 从环境中收集能量的方法包括提供能量收集装置。 能量收集装置包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 MEMS转换构件包括具有第一端和第二端的梁。 第一端锚固到基底上,第二端悬臂在空腔上。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件。 顺应性膜的第二部分锚定到基底。 能量收集装置被配置为使得顺应性膜通过能量收集装置外部产生的激发而被设置成振荡。 通过振荡柔性膜使MEMS转换元件进入和流出空腔。 MEMS转换构件的运动被转换为电信号。
    • 8. 发明申请
    • ULTRASONIC TRANSMITTER AND RECEIVER WITH COMPLIANT MEMBRANE
    • 超声波发射器和接收器具有合适的膜
    • US20120269031A1
    • 2012-10-25
    • US13089513
    • 2011-04-19
    • James D. HuffmanGary A. Kneezel
    • James D. HuffmanGary A. Kneezel
    • G03B42/06G01N29/04
    • G01N29/245G01N2291/0427
    • An ultrasonic transmitter and receiver includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate.
    • 超声波发射器和接收器包括MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。