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1. 发明授权

US07064477B2 Low power schottky emitter 有权
公开(公告)号：US07064477B2
公开(公告)日：2006-06-20
申请号：US10909621
申请日：2004-08-02
申请人： Gerald G. Magera , Gregory A. Schwind , James B. McGinn , David S. Jun
发明人： Gerald G. Magera , Gregory A. Schwind , James B. McGinn , David S. Jun
IPC分类号： H01J9/02 , H01J1/88
CPC分类号： H01J37/073 , H01J1/15 , H01J1/304 , H01J2237/06316 , H01J2237/06341
摘要： A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.

2. 发明授权

US06977384B2 Shaped sputter shields for improved ion column operation 有权
标题翻译：形状溅射屏蔽，用于改进离子柱操作
公开(公告)号：US06977384B2
公开(公告)日：2005-12-20
申请号：US10668431
申请日：2003-09-23
申请人： James B. McGinn , Gregory A. Schwind
发明人： James B. McGinn , Gregory A. Schwind
IPC分类号： H01J20060101 , H01J27/00 , H01J27/02 , H01J37/09 , H01J37/317
CPC分类号： H01J27/022 , H01J37/09 , H01J37/317 , H01J2237/0213 , H01J2237/063 , H01J2237/0805 , H01J2237/31749
摘要： The invention adds one or more surface contour(s) to the bombarded area(s) within ion columns to greatly reduce the likelihood that back sputtered material will reach the ion generating source. A number of different surface contours are disclosed including angled surfaces, surfaces defining cups to capture back sputtered material, pre-textured and forested surfaces. The different surfaces can be used in any combination. The reduction in back sputtered material reaching the ion source reduces the time to stability, greatly increases the working stability, and increases the lifespan of the source.
摘要翻译：本发明将一个或多个表面轮廓添加到离子柱内的被轰击区域，以大大降低反溅射材料将到达离子产生源的可能性。公开了许多不同的表面轮廓，包括成角度的表面，限定用于捕获溅射材料的杯子的表面，预纹理化和森林表面。不同的表面可以任意组合使用。到达离子源的反溅射材料的减少减少了稳定性的时间，大大增加了工作稳定性，并且增加了源的寿命。

3. 发明授权

US06771013B2 Low power schottky emitter 有权
标题翻译：低功率肖特基发射器
公开(公告)号：US06771013B2
公开(公告)日：2004-08-03
申请号：US09981663
申请日：2001-10-16
申请人： Gerald G. Magera , Gregory A. Schwind , James B. McGinn , David S. Jun
发明人： Gerald G. Magera , Gregory A. Schwind , James B. McGinn , David S. Jun
IPC分类号： H01J116
CPC分类号： H01J37/073 , H01J1/15 , H01J1/304 , H01J2237/06316 , H01J2237/06341
摘要： A low input power consumption, compact thermal field emitter is suitable for use in electron beam systems, particularly those systems that use an array of electron beams or a miniature electron beam system. The thermal field emitter design reduces heat loss by reducing heat transfer to the base. To achieve reduced loses the design incorporates the use of high electrical resistivity, low thermal conductivity materials for construction of the filament posts and the filaments. Such materials further reduce heat loss and reduce input current requirements. In one embodiment, the base includes counterbores that reduce the heat conduction path between the filament posts and the base, and moves the contact area further from the filament.
摘要翻译：低输入功率消耗，紧凑的热场发射器适用于电子束系统，特别是那些使用电子束阵列或微型电子束系统的系统。热场发射器设计通过减少对基座的传热来减少热损失。为了实现减少的损失，设计结合使用高电阻率，低导热性材料用于构造细丝柱和细丝。这样的材料进一步减少热损失并减少输入电流要求。在一个实施例中，底座包括减小灯丝柱和基座之间的热传导路径并使接触区域从灯丝进一步移动的沉孔。

4. 发明授权

US06680562B1 Schottky emitter having extended life 有权
标题翻译：肖特基发射器具有延长的使用寿命
公开(公告)号：US06680562B1
公开(公告)日：2004-01-20
申请号：US09639451
申请日：2000-08-15
申请人： James B. McGinn , Sander G. den Hartog , David S. Jun , Gerald G. Magera , Gregory A. Schwind
发明人： James B. McGinn , Sander G. den Hartog , David S. Jun , Gerald G. Magera , Gregory A. Schwind
IPC分类号： H01J116
CPC分类号： H01J1/15
摘要： A electron emission cathode includes an emitter having an apex from which electrons are emitted. The emitter is attached to a heating filament at a junction and extends from the junction both forward toward the apex and rearward. A reservoir of material that lowers the work function of the emitter is positioned on the rearward extending portion of the emitter. By positioning the reservoir on the rearward extending portion, the reservoir can be positioned sufficiently far from the junction to reduce its temperature and thereby greatly increase the useful life, of the emitter without adversely affected the emission characteristics of the source.
摘要翻译：电子发射阴极包括具有从其发射电子的顶点的发射体。发射器在接合处附接到加热丝，并且从接头向前朝向顶点和向后延伸。降低发射器的功函数的材料储存器位于发射器的向后延伸部分上。通过将储存器定位在向后延伸部分上，储存器可以被定位成足够远离结点以降低其温度，从而大大增加发射器的使用寿命而不会不利地影响源的发射特性。

5. 发明授权

US08928210B2 System for attachment of an electrode into an inductively coupled plasma source 有权
公开(公告)号：US08928210B2
公开(公告)日：2015-01-06
申请号：US13307830
申请日：2011-11-30
申请人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
发明人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
IPC分类号： H01J1/02
摘要： An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.

6. 发明申请

US20100327180A1 BEAM QUALITY IN FIB SYSTEMS 有权
标题翻译： FIB系统中的光束质量
公开(公告)号：US20100327180A1
公开(公告)日：2010-12-30
申请号：US12494024
申请日：2009-06-29
申请人： Gregory A. Schwind , Jonathan H. Orloff
发明人： Gregory A. Schwind , Jonathan H. Orloff
IPC分类号： H01J3/14
CPC分类号： H01J37/3056 , H01J37/05 , H01J37/147 , H01J2237/053 , H01J2237/055 , H01J2237/057 , H01J2237/3174 , H01J2237/31745 , H01J2237/31749
摘要： Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.
摘要翻译：申请人已经发现离子源的离子的不对称能量分布允许通过在低能量束尾部过滤离子来降低色差，而不会显着缩短处理时间。一个优选的实施例在离子束列内包括从梁中去除低能量离子的过滤器。

7. 发明授权

US09322209B1 Insulating window panel 有权
标题翻译：绝缘窗板
公开(公告)号：US09322209B1
公开(公告)日：2016-04-26
申请号：US14689060
申请日：2015-04-17
申请人： Gregory A. Schwind , Ronald A. Greene
发明人： Gregory A. Schwind , Ronald A. Greene
IPC分类号： E06B5/00 , E06B1/36 , E04B1/76 , E06B3/06 , E06B3/54
CPC分类号： E06B3/28
摘要： An insulating window panel for removable installation into a custom size window opening recess includes longitudinally extending frame pieces configured with joints for interconnecting the frame pieces to form a frame around a transparent flexible glazing sheet. Each frame piece has a longitudinal keder channel with a slot that opens out of a glazing side of each frame piece. The glazing sheet has edges corresponding to the frame pieces; and a keder formed on each of the edges, with a corner cut that spaces apart intersecting kedered edges, all being shaped and sized for sliding each keder edge into the keder channel of each corresponding frame piece such that the frame pieces form joints at the corner cuts and the frame pieces are pulled together at the joints by tension relative to the glazing sheet. Preferably a weatherstrip surrounds the frame perimeter with compressible fins for sealed but removable installation.
摘要翻译：用于可拆卸地安装到定制尺寸的窗口开口凹部中的绝缘窗面板包括构造为用于互连框架件以形成围绕透明柔性玻璃板的框架的接头的纵向延伸的框架件。每个框架件具有纵向的楔形通道，其具有从每个框架件的玻璃面开放的槽。上光板具有对应于框架件的边缘; 以及形成在每个边缘上的切割器，其具有使相交的楔形边缘相互间隔开的角切口，所有角形切割均具有成形和尺寸，用于将每个切边缘滑动到每个对应的框架件的楔形通道中，使得框架件在拐角处形成接头切割，并且框架件通过相对于玻璃板的张力在接合处被拉到一起。优选地，耐候条带围绕框架周边用可密封但可拆卸安装的可压缩翅片围绕。

8. 发明授权

US07888654B2 Cold field emitter 有权
标题翻译：冷场发射器
公开(公告)号：US07888654B2
公开(公告)日：2011-02-15
申请号：US11900956
申请日：2007-09-14
申请人： Theodore Carl Tessner, II , Gregory A. Schwind , Lynwood W. Swanson
发明人： Theodore Carl Tessner, II , Gregory A. Schwind , Lynwood W. Swanson
IPC分类号： H01J1/304
CPC分类号： H01J1/3044 , H01J9/025 , H01J37/073 , H01J2201/30426 , H01J2201/30446 , H01J2237/06316 , H01J2237/06341
摘要： A stable cold field electron emitter is produced by forming a coating on an emitter base material. The coating protects the emitter from the adsorption of residual gases and from the impact of ions, so that the cold field emitter exhibits short term and long term stability at relatively high pressures and reasonable angular electron emission.
摘要翻译：通过在发射极基材上形成涂层来制造稳定的冷场电子发射体。涂层保护发射体免受残留气体的吸附和离子的冲击，使得冷场发射体在相当高的压力和合理的角度电子发射下表现出短期和长期的稳定性。

9. 发明申请

US20130134855A1 System for Attachment of an Electrode into an Inductively Coupled Plasma Source 有权
标题翻译：将电极连接到电感耦合等离子体源的系统
公开(公告)号：US20130134855A1
公开(公告)日：2013-05-30
申请号：US13307830
申请日：2011-11-30
申请人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
发明人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
IPC分类号： H01J1/02 , H05H1/00
CPC分类号： H01J37/32605 , H01J9/02 , H01J27/16 , H01J37/04 , H01J37/08 , H01J2237/032
摘要： An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
摘要翻译：用于聚焦离子束系统的电感耦合等离子体带电粒子源包括具有可拆卸地附接的源电极的等离子体反应室。紧固机构将源电极与等离子体反应室连接，并形成导热的真空密封。使用可移动的源电极，现在可以提高等离子体源管的可用性和再利用。

10. 发明授权

US09053895B2 System for attachment of an electrode into a plasma source 有权
标题翻译：用于将电极附接到等离子体源中的系统
公开(公告)号：US09053895B2
公开(公告)日：2015-06-09
申请号：US13307830
申请日：2011-11-30
申请人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
发明人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
IPC分类号： H01J1/02 , H01J37/08 , H01J37/04 , H01J27/16
CPC分类号： H01J37/32605 , H01J9/02 , H01J27/16 , H01J37/04 , H01J37/08 , H01J2237/032
摘要： An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
摘要翻译：用于聚焦离子束系统的电感耦合等离子体带电粒子源包括具有可拆卸地附接的源电极的等离子体反应室。紧固机构将源电极与等离子体反应室连接，并形成导热的真空密封。使用可移动的源电极，现在可以提高等离子体源管的可用性和再利用。

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