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    • 10. 发明授权
    • Nonvolatile semiconductor device
    • 非易失性半导体器件
    • US07880214B2
    • 2011-02-01
    • US11431569
    • 2006-05-11
    • Naoaki SudoKohji Kanamori
    • Naoaki SudoKohji Kanamori
    • H01L29/76
    • H01L29/7887H01L27/0207H01L27/115H01L27/11519H01L27/11521H01L27/11524
    • A nonvolatile semiconductor storage device in which one unit cell comprises a select gate 3 (3a-3i) provided in a first region on a substrate 1; a floating gate 6 provided in a second region adjacent to the first region; a diffused region 7b adjacent to the second region and provided in a third region on the surface of the substrate 1; and a control gate 11 provided on the floating gate 6. The select gate 3 is divided into three or more in an erase block 23 composed of all unit cells, from each of which electrons are extracted from the floating gate, at the same time when an erase operation is performed. Each of the select gates 3a-3i, created by the division, is formed in a comb-like shape in which, when viewed from the direction of a normal line to a plane, a plurality of comb teeth extend from a common line. The comb teeth of a select gate (for example, 3b) are arranged in gaps between the comb teeth of an adjacent select gate (for example, 3a, 3c) at a predetermined spacing.
    • 一种非易失性半导体存储装置,其中一个单位电池包括设置在基板1上的第一区域中的选择栅极3(3a-3i) 设置在与第一区域相邻的第二区域中的浮动栅极6; 与第二区域相邻并设置在基板1的表面的第三区域中的扩散区域7b; 以及设置在浮置栅极6上的控制栅极11.选择栅极3在由所有单位单元构成的擦除块23中被划分为三个或更多个,其中每一个从浮置栅极中提取电子,同时当 执行擦除操作。 通过分割产生的选择门3a-3i中的每一个形成为梳状形状,其中从法线方向看平面时,多条梳齿从公共线延伸。 选择门(例如3b)的梳齿以预定间隔布置在相邻选择栅极(例如,3a,3c)的梳齿之间的间隙中。