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1. 发明授权

US07922289B2 Nozzle plate of inkjet printhead and method of manufacturing the same 有权
标题翻译：喷墨打印头喷嘴板及其制造方法
公开(公告)号：US07922289B2
公开(公告)日：2011-04-12
申请号：US12041018
申请日：2008-03-03
申请人： Jae-chang Lee , Tae-kyung Lee , Tae-woon Cha
发明人： Jae-chang Lee , Tae-kyung Lee , Tae-woon Cha
IPC分类号： B41J2/14
CPC分类号： B41J2/1433 , B41J2/1606 , B41J2/162 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1631
摘要： Provided are a nozzle plate of an inkjet printhead and a method of manufacturing the same. The nozzle plate includes: a substrate including a plurality of nozzles; and a plurality of first grooves formed on the surface of a substrate around the nozzles. In this structure, ink remaining on the surface of the nozzle plate can be efficiently removed.
摘要翻译：提供一种喷墨打印头的喷嘴板及其制造方法。喷嘴板包括：包括多个喷嘴的基板; 以及形成在所述喷嘴周围的基板的表面上的多个第一凹槽。在这种结构中，可以有效地去除留在喷嘴板表面上的油墨。

2. 发明授权

US07909438B2 Piezo-electric type inkjet printhead 有权
标题翻译：压电式喷墨打印头
公开(公告)号：US07909438B2
公开(公告)日：2011-03-22
申请号：US11775424
申请日：2007-07-10
申请人： Tae-kyung Lee , Sang-kwon Wee , Jae-woo Chung , Tae-woon Cha , Jae-chang Lee
发明人： Tae-kyung Lee , Sang-kwon Wee , Jae-woo Chung , Tae-woon Cha , Jae-chang Lee
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/1433 , B41J2002/14475
摘要： A piezoelectric type inkjet printhead includes an upper substrate including a pressure chamber to be filled with ink that is to be ejected, a reservoir to store ink that flowed in from an ink container, a restrictor connect the reservoir to one end of the pressure chamber, an intermediate substrate comprising a damper formed on a portion of the intermediate substrate, which corresponds to other end of the pressure chamber, a lower substrate comprising a nozzle to eject ink and formed in a portion of the lower substrate, which corresponds to the damper, a hydrophobic layer formed on a bottom of the lower substrate, and a piezoelectric actuator formed on the upper substrate to supply driving power to eject ink to the pressure chamber, wherein the nozzle is formed in the lower substrate at a predetermined depth from a bottom surface of the lower substrate.
摘要翻译：压电型喷墨打印头包括：上部基板，其包括要填充要喷射的墨的压力室;存储器，用于存储从墨水容器流入的墨水;限制器将储存器连接到压力室的一端; 中间基板，包括形成在所述中间基板的与所述压力室的另一端相对应的部分上的阻尼器，下部基板，包括用于喷射墨水并形成在所述下部基板的对应于所述阻尼器的部分中的喷嘴，形成在所述下基板的底部上的疏水层，以及形成在所述上基板上以提供驱动力以将油墨喷射到所述压力室的压电致动器，其中所述喷嘴形成在所述下基板中，的下基板。

3. 发明申请

US20080129799A1 PIEZO-ELECTRIC TYPE INKJET PRINTHEAD 有权
标题翻译： PIEZO-ELECTRIC型喷墨打印机
公开(公告)号：US20080129799A1
公开(公告)日：2008-06-05
申请号：US11775424
申请日：2007-07-10
申请人： Tae-kyung Lee , Sang-kwon Wee , Jae-woo Chung , Tae-woon Cha , Jae-chang Lee
发明人： Tae-kyung Lee , Sang-kwon Wee , Jae-woo Chung , Tae-woon Cha , Jae-chang Lee
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/1433 , B41J2002/14475
摘要： A piezoelectric type inkjet printhead includes an upper substrate including a pressure chamber to be filled with ink that is to be ejected, a reservoir to store ink that flowed in from an ink container, a restrictor connect the reservoir to one end of the pressure chamber, an intermediate substrate comprising a damper formed on a portion of the intermediate substrate, which corresponds to other end of the pressure chamber, a lower substrate comprising a nozzle to eject ink and formed in a portion of the lower substrate, which corresponds to the damper, a hydrophobic layer formed on a bottom of the lower substrate, and a piezoelectric actuator formed on the upper substrate to supply driving power to eject ink to the pressure chamber, wherein the nozzle is formed in the lower substrate at a predetermined depth from a bottom surface of the lower substrate.
摘要翻译：压电型喷墨打印头包括：上部基板，其包括要填充要喷射的墨的压力室;存储器，用于存储从墨水容器流入的墨水;限制器将储存器连接到压力室的一端; 中间基板，包括形成在所述中间基板的与所述压力室的另一端相对应的部分上的阻尼器，下部基板，包括用于喷射墨水并形成在所述下部基板的对应于所述阻尼器的部分中的喷嘴，形成在所述下基板的底部上的疏水层，以及形成在所述上基板上以提供驱动力以将油墨喷射到所述压力室的压电致动器，其中所述喷嘴形成在所述下基板中，的下基板。

4. 发明授权

US07926910B2 Nozzle plate for inkjet head and method of manufacturing the nozzle plate 有权
标题翻译：用于喷墨头的喷嘴板和制造喷嘴板的方法
公开(公告)号：US07926910B2
公开(公告)日：2011-04-19
申请号：US11764844
申请日：2007-06-19
申请人： Tae-woon Cha , Young-nam Kwon , Jae-chang Lee
发明人： Tae-woon Cha , Young-nam Kwon , Jae-chang Lee
IPC分类号： B41J2/135
CPC分类号： B41J2/1606 , B41J2/162 , B41J2/164
摘要： A nozzle plate for an inkjet head and a method of manufacturing the nozzle plate includes a silicon substrate having a nozzle, a thermally oxidized silicon layer formed on an outer surface of the silicon substrate and an inner wall of the nozzle, an adhesion layer deposited on the thermally oxidized silicon layer formed on the outer surface of the silicon substrate and formed of silicon oxide, and an ink-repellent coating layer deposited on the adhesion layer.
摘要翻译：用于喷墨头的喷嘴板和喷嘴板的制造方法包括具有喷嘴的硅基板，形成在硅基板的外表面上的热氧化硅层和喷嘴的内壁，粘合层沉积在形成在硅衬底的外表面上并由氧化硅形成的热氧化硅层和沉积在粘合层上的拒墨涂层。

5. 发明申请

US20070195134A1 Piezoelectric actuator inkjet head and method of forming the same 失效
标题翻译：压电致动器喷墨头及其形成方法
公开(公告)号：US20070195134A1
公开(公告)日：2007-08-23
申请号：US11581333
申请日：2006-10-17
申请人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
摘要翻译：喷墨头的压电致动器和形成压电致动器的方法。压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。压电层可以具有与压力室大致相同的长度。支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

6. 发明授权

US08806727B2 Method of forming a piezoelectric actuator of an inkjet head 有权
标题翻译：形成喷墨头的压电致动器的方法
公开(公告)号：US08806727B2
公开(公告)日：2014-08-19
申请号：US12712442
申请日：2010-02-25
申请人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： H04R17/00
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.
摘要翻译：在振动板上形成压电致动器以向多个压力室中的每一个提供驱动力的方法包括在振动板上形成下电极，在下电极上形成压电层，位于对应于在所述下电极上形成支撑垫，所述支撑垫接触所述压电层的一端并且远离所述压电层的一端延伸，形成从所述压电层的顶表面延伸到顶部的上电极并且将上电极连接到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。

7. 发明授权

US07682001B2 Piezoelectric actuator inkjet head and method of forming the same 失效
标题翻译：压电致动器喷墨头及其形成方法
公开(公告)号：US07682001B2
公开(公告)日：2010-03-23
申请号：US11581333
申请日：2006-10-17
申请人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
摘要翻译：喷墨头的压电致动器和形成压电致动器的方法。压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。压电层可以具有与压力室大致相同的长度。支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

8. 发明申请

US20100146756A1 PIEZOELECTRIC ACTUATOR INKJET HEAD AND METHOD OF FORMING THE SAME 有权
标题翻译：压电致动器喷嘴头及其形成方法
公开(公告)号：US20100146756A1
公开(公告)日：2010-06-17
申请号：US12712442
申请日：2010-02-25
申请人： Tae-kyung LEE , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung LEE , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： H01L41/22
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
摘要翻译：喷墨头的压电致动器和形成压电致动器的方法。压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。压电层可以具有与压力室大致相同的长度。支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

9. 发明授权

US07703895B2 Piezoelectric inkjet printhead and method of manufacturing the same 失效
标题翻译：压电喷墨打印头及其制造方法
公开(公告)号：US07703895B2
公开(公告)日：2010-04-27
申请号：US11333540
申请日：2006-01-18
申请人： Jae-chang Lee , Jae-woo Chung , Sung-gyu Kang
发明人： Jae-chang Lee , Jae-woo Chung , Sung-gyu Kang
IPC分类号： B41J2/045
CPC分类号： B41J2/161 , B41J2/14233 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1637 , B41J2002/14306 , B41J2002/14411 , B41J2002/14419
摘要： A piezoelectric inkjet printhead including an upper substrate, having an ink inlet, a manifold connected with the ink inlet, and a plurality of pressure chambers arranged along at least one side of the manifold, wherein the ink inlet passes through the upper substrate, and the manifold and the pressure chambers are formed in a lower surface of the upper substrate, a lower substrate disposed directly adjacent the upper substrate, the lower substrate having a plurality of restrictors each connecting the manifold with one end of each of the pressure chambers, and a plurality of nozzles each being formed in a position of the lower substrate that corresponds to the other end of each of the pressure chambers to vertically pass through the lower substrate, wherein the plurality of restrictors are formed in an upper surface of the lower substrate, and a plurality of piezoelectric actuators.
摘要翻译：一种压电喷墨打印头，包括具有墨入口，与墨入口连接的歧管的上基板和沿着歧管的至少一侧布置的多个压力室，其中墨入口穿过上基板，歧管和压力室形成在上基板的下表面中，下基板直接邻近上基板设置，下基板具有多个限制器，每个限制器将歧管与每个压力室的一端连接，并且多个喷嘴各自形成在下基板的对应于每个压力室的另一端的位置以垂直地穿过下基板，其中多个限制器形成在下基板的上表面中，以及多个压电致动器。

10. 发明申请

US20070134928A1 Silicon wet etching method using parylene mask and method of manufacturing nozzle plate of inkjet printhead using the same 审中-公开
标题翻译：使用聚对二苯乙烯掩模的硅湿式蚀刻方法和使用其制造喷墨打印头的喷嘴板的方法
公开(公告)号：US20070134928A1
公开(公告)日：2007-06-14
申请号：US11505416
申请日：2006-08-17
申请人： Jae-chang Lee , Chang-seung Lee , Jae-woo Chung , Duck-su Kim , Kyo-yeol Lee
发明人： Jae-chang Lee , Chang-seung Lee , Jae-woo Chung , Duck-su Kim , Kyo-yeol Lee
IPC分类号： H01L21/302
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2002/14411
摘要： A silicon wet etching method to form at least two elements having different shapes in a silicon substrate using at least two wet etching processes includes forming a first etch mask made of parylene on a surface of the silicon substrate, forming a first element in the substrate by wet etching the silicon substrate for a first time using the first etch mask, forming a second etch mask made of a silicon oxide layer on the surface of the silicon substrate, and forming a second element by wet etching the silicon substrate for a second time using the second etch mask.
摘要翻译：使用至少两个湿蚀刻工艺在硅衬底中形成具有不同形状的至少两种元件的硅湿式蚀刻方法包括在硅衬底的表面上形成由聚对二甲苯制成的第一蚀刻掩模，在衬底中形成第一元件，通过使用第一蚀刻掩模第一次湿蚀刻硅衬底，在硅衬底的表面上形成由氧化硅层制成的第二蚀刻掩模，并且通过湿法蚀刻硅衬底第二次来形成第二元件，第二次使用第二蚀刻掩模。

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