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2. 发明授权

US5903380A Micro-electromechanical (MEM) optical resonator and method 失效
标题翻译：微机电（MEM）光谐振器和方法
公开(公告)号：US5903380A
公开(公告)日：1999-05-11
申请号：US847018
申请日：1997-05-01
申请人： M. Edward Motamedi , Angus P. Andrews , Sangtae Park
发明人： M. Edward Motamedi , Angus P. Andrews , Sangtae Park
IPC分类号： B81B3/00 , G02B26/08 , G02B26/10 , G06K7/10 , H01L21/308 , H01L41/09 , H01L41/18
CPC分类号： G02B26/0866 , B81B3/0035 , G02B26/0816 , G02B26/101 , G06K7/10633 , G06K7/10653
摘要： An integrated micro-electromechanical (MEM) optical resonator comprises a cantilever beam which is fixed to a substrate at one end and extends freely over the substrate at the other end, and a bimorph actuator stacked atop the beam at its fixed end. A reflective surface partially covers the top of the beam at its free end. The bimorph actuator comprises material layers having different thermal expansion coefficients. A DC-biased AC voltage connected across the actuator causes it to heat and cool as the current passing through it increases and decreases, creating a thermal bimorph effect which causes the cantilever beam and the reflective surface to oscillate in accordance with the varying current, preferably at the beam and actuator structure's fundamental resonant frequency. Combining the resonator with a light source and actuator excitation circuitry creates an optical scanner engine which delivers a scan angle in excess of 20 degrees and a scan rate of up to 2000 Hz, using a driving voltage of only 2 V.sub.p-p.
摘要翻译：集成微机电（MEM）光学谐振器包括悬臂梁，该悬臂梁在一端固定到基板并且在另一端处自由地延伸到基板上方，并且在其固定端处堆叠在梁的顶部上的双压电晶片致动器。反射表面在其自由端部分地覆盖梁的顶部。双压电晶片致动器包括具有不同热膨胀系数的材料层。连接在致动器上的直流偏置AC电压使其随着通过它的电流而加热和冷却而增加和减少，产生热双压电晶片效应，这导致悬臂梁和反射表面根据变化的电流振荡在梁和致动器结构的基本共振频率。将谐振器与光源和致动器激励电路相结合，使用仅2 Vp-p的驱动电压创建了一个光学扫描仪引擎，该引擎可提供超过20度的扫描角度和高达2000 Hz的扫描速率。

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