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1. 发明申请

WO1988006281A1 PRESSURE SENSOR 审中-公开
标题翻译：压力传感器
公开(公告)号：WO1988006281A1
公开(公告)日：1988-08-25
申请号：PCT/SE1988000049
申请日：1988-02-11
申请人： JOHNSSON & BILLQUIST DEVELOPMENT AB , HYDROLAB AB , JONSSON, Staffan , OLSSON, Ray
发明人： JOHNSSON & BILLQUIST DEVELOPMENT AB , HYDROLAB AB
IPC分类号： G01L09/12
CPC分类号： G01L9/0075
摘要： A capacity pressure sensor having a housing (101) and a diaphragm (103). The housing (101) and the diaphragm (103) are substantially flat and are connected to each other at an upstanding border (106) at the periphery of the housing (101). In the hermetically closed space (7) between the housing (101) and said diaphragm (103) a reference pressure is applied. In a pressure measurement the diaphragm (103) is bent inwards relative to said housing (101) depending on the pressure acting on the surface of said diaphragm (103). This bending inwards is a primary output signal which capacitively can be converted to an electrical signal. Inside the pressure on the inner surfaces of said housing (101) and said diaphragm (103) there are arranged, for the detection of the position of said diaphragm (103) relative to said housing (101), capacitor plates (109, 111) connected to an electrical measuring circuit for detection of the capacity of the capacitor formed thereby. To enhance the linearity of the measuring capacitor the outer flat surfaces of the pressure sensor are coated with conducting layers (121, 123) connected to earth. Furthermore, in the house (101) a recess (123) is arranged which when given suitable dimensions further reduces the deviation of the pressure sensor from the desired linear characteristic.
摘要翻译：一种容量压力传感器，具有壳体（101）和隔膜（103）。壳体（101）和隔膜（103）基本上是平的，并且在壳体（101）周边的直立边界（106）处彼此连接。在壳体（101）和隔膜（103）之间的气密封闭空间（7）中施加基准压力。在压力测量中，根据作用在所述隔膜（103）的表面上的压力，隔膜（103）相对于所述壳体（101）向内弯曲。这向内弯曲是电容性地转换为电信号的初级输出信号。在所述壳体（101）和所述隔膜（103）的内表面上的压力内，布置有用于检测所述隔膜（103）相对于所述壳体（101）的位置的电容器板（109,111）连接到用于检测由此形成的电容器的容量的电测量电路。为了提高测量电容器的线性度，压力传感器的外部平坦表面涂覆有连接到地面的导电层（121,123）。此外，在房屋（101）中，设置有凹槽123，当给定合适的尺寸进一步减小压力传感器与期望的线性特性的偏差时。

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