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1. 发明公开

EP1347673A4 PLASMA GENERATING APPARATUS USING MICROWAVE 审中-公开
标题翻译： PLASMAERZEUGUNGSVORRICHTUNG MIT MIKROWELLE
公开(公告)号：EP1347673A4
公开(公告)日：2006-10-04
申请号：EP01997978
申请日：2001-11-21
申请人： JAPAN SCIENCE & TECH CORP
发明人： NISHIDA YASUSHI , ITO HIROAKI , YUGAMI NOBORU
IPC分类号： H05H1/00 , H01J37/32 , H05H1/46
CPC分类号： H01J37/32192 , H01J37/32266 , H01J37/32311 , H05H1/46
摘要： The present invention uses as a detector for adjustment measurement, monodyne interference between a microwave for plasma generation and the reflected wave. Analysis of the interference wave that is obtained using monodyne interference allows finding of the phase difference between the incident and the reflected wave and the amplitude of that reflected wave; and controlling of an excited microwave generation/ control system based on them allows impedance matching between the excited microwave and the plasma. This method allows very high precision phase detection, and calculation of the characteristics of the plasma based on the detected phase shift. Therefore, it is possible to distinguish noises even in the vicinity of the matched region.
摘要翻译：本发明用作调节测量的检测器，用于等离子体产生的微波与反射波之间的单相干涉。使用单极干涉获得的干扰波的分析允许发现入射和反射波之间的相位差和该反射波的振幅; 并且基于它们控制激发的微波产生/控制系统允许激发的微波和等离子体之间的阻抗匹配。该方法允许非常高精度的相位检测，并且基于检测到的相移来计算等离子体的特性。因此，即使在匹配区域附近也可以区分噪声。

2. 发明公开

EP1362631A4 SEPARATING APPARATUS 审中-公开
标题翻译：分离器
公开(公告)号：EP1362631A4
公开(公告)日：2005-12-07
申请号：EP02710507
申请日：2002-02-05
申请人： JAPAN SCIENCE & TECH CORP
发明人： NISHIDA YASUSHI , NAGASAWA TAKESHI , YUGAMI NOBORU , ITO HIROAKI
IPC分类号： B01D71/02 , B01D53/24 , B01D53/32 , B01J19/08 , C01B3/24 , C01B3/50 , B04C3/00
CPC分类号： C01B3/50 , B01D53/24 , B01D53/32 , B01D2259/818 , C01B3/24 , C01B2203/0266 , C01B2203/04 , C01B2203/049 , C01B2203/0861
摘要： A gas decomposition / separation device 100 is made up of three sections: a discharge section 110, a compression section 130, and a separation section 140. The discharge section 110 is a section for decomposing gas through discharging. The discharge section 110 is made up of a discharging electrode 120 and a flange pipe 112 that accommodates it. The compression section 130 is prepared to decrease the velocity of the flow of the gas, which is decomposed by the discharge section 110, and then increase the velocity thereof for the next separation section 140. The separation section 140 separates a plurality of gasses into two categories based on the weights thereof by utilizing the centrifugal force to the gas generated by a claw 142.

3. 发明专利

JP2002248315A SEPARATOR 失效
公开(公告)号：JP2002248315A
公开(公告)日：2002-09-03
申请号：JP2001049149
申请日：2001-02-23
申请人： JAPAN SCIENCE & TECH CORP
发明人： NISHIDA YASUSHI , NAGASAWA TAKESHI , YUGAMI NOBORU , ITO HIROAKI
IPC分类号： B01D71/02 , B01D53/24 , B01D53/32 , B01J19/08 , C01B3/24 , C01B3/50
摘要： PROBLEM TO BE SOLVED: To provide a gas decomposing and separating device by which an installing place is not restricted and all the processes are dry. SOLUTION: The gas decomposing and separating device 100 consists of three parts being a discharging part 110, a compressing part 130 and a separating part 140. The part 110 is a pert for decomposing gas by utilizing discharge. The part 110 consists of an electrode 120 for discharge and a flange tube 112 housing it. The part 130 is provided for the purpose of decelerating the flow of the gas decomposed in the part 110 to accelerate the flow in the next part 140. The part 140 separates a plurality of the kinds of gas into two kinds according to a weight by using centrifugal force to gas by pawls 142.

4. 发明专利

JP2002249877A ELECTRODE DEVICE 失效
公开(公告)号：JP2002249877A
公开(公告)日：2002-09-06
申请号：JP2001049141
申请日：2001-02-23
申请人： JAPAN SCIENCE & TECH CORP
发明人： NISHIDA YASUSHI , NAGASAWA TAKESHI , YUGAMI NOBORU , ITO HIROAKI
IPC分类号： G21F9/02 , B01J19/00 , B01J19/08 , C23C16/503 , H05H1/24
摘要： PROBLEM TO BE SOLVED: To provide an electrode device which stably generates plasma near the atmospheric pressure and decomposes organic gas. SOLUTION: As one embodiment of rotational floating multipole discharge device, an electrode 110 is constituted so as to bury screws 116 of 3ϕ concentrically at an interval of 4.5 mm into an insulator disk 114. The electrode 110 of such a constitution is disposed in an atmosphere of organic gas such as methane and ethylene near the atmospheric pressure, the electrode 110 is rotated at 2-10 rpm by a central shaft 112 and a voltage is applied to the two screws of the outer periphery via brushes 118. Then, discharge is generated between the screws of a path A-B which connects the two brushes 118 and the plasma is formed. The path through which the discharge is generated is changed at all times because the circular insulator is rotated.

5. 发明专利

JP2002164198A PLASMA GENERATOR BY MICROWAVE 失效
公开(公告)号：JP2002164198A
公开(公告)日：2002-06-07
申请号：JP2000356624
申请日：2000-11-22
申请人： JAPAN SCIENCE & TECH CORP
发明人： NISHIDA YASUSHI , ITO HIROAKI , YUGAMI NOBORU
IPC分类号： H05H1/00 , H01J37/32 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To detect a impedance matching with good accuracy in generation of plasma by microwave, thereby controlling microwave inputted for formation of plasma. SOLUTION: As detection for matching determination, monodyne interference against microwave for formation of plasma and reflected wave thereof is used. Interference wave obtained by the monodyne interference is analyzed, whereby a phase difference between incident wave and reflected wave, and amplitude of the reflected wave can be obtained. Generation . control system of excited microwave can be controlled thereby to conduct impedance matching between the excited microwave and plasma. This method permits conducting phase detection with particularly good accuracy, and so the characteristics of plasma can be calculated from changes in phase, and distinction from noise is feasible even in the vicinity of the matched area.

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