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1. 发明申请

US20090009753A1 INSPECTION METHOD AND INSPECTION DEVICE 有权
标题翻译：检验方法和检验装置
公开(公告)号：US20090009753A1
公开(公告)日：2009-01-08
申请号：US12167570
申请日：2008-07-03
申请人： Izuo Horai , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
发明人： Izuo Horai , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/65 , G01N21/9505 , G01N2021/4711 , G01N2021/473 , G01N2021/8861 , G01N2021/8864
摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.
摘要翻译：检查方法和检查装置或装置，其能够对由检查表面的弹性或sto kes散射光，检查面或缺陷检测到的缺陷或检查对象的表面上的缺陷进行组成分析及其内在组成。一种表面检查方法，用于光学检测来自检查对象的表面内的弹性或斯托克斯散射或非弹性或反射散射光，用于检测检查对象的缺陷的存在和缺陷的特征，用于检测检测到的缺陷的位置在检查对象的表面上，根据缺陷的位置和缺陷的特征或缺陷的分类结果，根据其特征对检测到的缺陷进行分类和分析。

2. 发明授权

US09007581B2 Inspection method and inspection device 有权
标题翻译：检验方法和检验装置
公开(公告)号：US09007581B2
公开(公告)日：2015-04-14
申请号：US13621121
申请日：2012-09-15
申请人： Izuo Horai , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
发明人： Izuo Horai , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
IPC分类号： G01J3/00 , G01N21/00 , G01N21/95 , G01N21/65 , G01N21/47 , G01N21/88
CPC分类号： G01N21/9501 , G01N21/65 , G01N21/9505 , G01N2021/4711 , G01N2021/473 , G01N2021/8861 , G01N2021/8864
摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.
摘要翻译：检查方法和检查装置或装置，其能够对由检查表面的弹性或sto kes散射光，检查面或缺陷检测到的缺陷或检查对象的表面上的缺陷进行组成分析及其内在组成。一种表面检查方法，用于光学检测来自检查对象的表面内的弹性或斯托克斯散射或非弹性或反射散射光，用于检测检查对象的缺陷的存在和缺陷的特征，用于检测检测到的缺陷的位置在检查对象的表面上，根据缺陷的位置和缺陷的特征或缺陷的分类结果，根据其特征对检测到的缺陷进行分类和分析。

3. 发明申请

US20100271626A1 INSPECTION METHOD AND INSPECTION DEVICE 审中-公开
标题翻译：检验方法和检验装置
公开(公告)号：US20100271626A1
公开(公告)日：2010-10-28
申请号：US12830922
申请日：2010-07-06
申请人： Izuo HORAI , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
发明人： Izuo HORAI , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/65 , G01N21/9505 , G01N2021/4711 , G01N2021/473 , G01N2021/8861 , G01N2021/8864
摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.
摘要翻译：检查方法和检查装置或装置，其能够对由检查表面的弹性或sto kes散射光，检查面或缺陷检测到的缺陷或检查对象的表面上的缺陷进行组成分析及其内在组成。一种表面检查方法，用于光学检测来自检查对象的表面内的弹性或斯托克斯散射或非弹性或反射散射光，用于检测检查对象的缺陷的存在和缺陷的特征，用于检测检测到的缺陷的位置在检查对象的表面上，根据缺陷的位置和缺陷的特征或缺陷的分类结果，根据其特征对检测到的缺陷进行分类和分析。

4. 发明授权

US07777876B2 Inspection method and inspection device 有权
标题翻译：检验方法和检验装置
公开(公告)号：US07777876B2
公开(公告)日：2010-08-17
申请号：US12167570
申请日：2008-07-03
申请人： Izuo Horai , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
发明人： Izuo Horai , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/65 , G01N21/9505 , G01N2021/4711 , G01N2021/473 , G01N2021/8861 , G01N2021/8864
摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.
摘要翻译：检查方法和检查装置或装置，其能够对由检查表面的弹性或sto kes散射光，检查面或缺陷检测到的缺陷或检查对象的表面上的缺陷进行组成分析及其内在组成。一种表面检查方法，用于光学检测来自检查对象的表面内的弹性或斯托克斯散射或非弹性或反射散射光，用于检测检查对象的缺陷的存在和缺陷的特征，用于检测检测到的缺陷的位置在检查对象的表面上，根据缺陷的位置和缺陷的特征或缺陷的分类结果，根据其特征对检测到的缺陷进行分类和分析。

5. 发明申请

US20130010281A1 INSPECTION METHOD AND INSPECTION DEVICE 审中-公开
公开(公告)号：US20130010281A1
公开(公告)日：2013-01-10
申请号：US13621121
申请日：2012-09-15
申请人： Izuo Horai , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
发明人： Izuo Horai , Hirokazu Koyabu , Yuta Urano , Takahiro Jingu
IPC分类号： G01N21/956
CPC分类号： G01N21/9501 , G01N21/65 , G01N21/9505 , G01N2021/4711 , G01N2021/473 , G01N2021/8861 , G01N2021/8864
摘要： An inspection method and an inspection device, or apparatus each capable of conducting composition analysis of a defect detected by elastic or stokes scattered light, an inspection surface or defect on the surface of the inspection surface, or a defect on the surface of the inspection object and its internal composition. A surface inspection method for optically detecting elastic or stokes scattering or inelastic or anti-stokes scattered light from inside the surface of the inspection object, for detecting existence of defects of the inspection object and features of the defects, for detecting positions of the detected defects on the surface of the inspection object, classifying and analyzing the detected defects in accordance with their features on the basis of the positions of the defects and the features of the defects or the classification result of the defects.

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