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    • 4. 发明专利
    • Base plate heat-treatment apparatus
    • 基板热处理设备
    • JP2004333075A
    • 2004-11-25
    • JP2003132561
    • 2003-05-12
    • Ishikawajima Harima Heavy Ind Co Ltd石川島播磨重工業株式会社
    • MATSUDA SHIKONAKABAYASHI TAKASHIIIJIMA SHIGEKI
    • B65G49/06F27B9/02F27B9/26
    • PROBLEM TO BE SOLVED: To provide a base plate heat treatment apparatus, having a small total length, high accuracy of heat treatment for the base plate, high productivity and little fear of contaminating the base plate.
      SOLUTION: Instead of the conventional base plate heat treatment apparatus for heat treating a base plate, this base plate heat treatment apparatus includes: a base plate transport stand storing a base plate inside, and having a stored body inlet and a stored body outlet which are a pair of openings having opening sections opposite to the face of the edge of the base plate; a heat treatment furnace having a duct for communicating a duct inlet with a duct outlet which are a pair of opening surfaces, a blower for blowing gas from the duct inlet to the duct outlet, and a temperature control machine for heating or cooling the gas; and a base plate transport stand feed mechanism for fixing the base transport stand to a specific position peculiar to the heating furnace and moving the same from the specific position. When the base plate transport stand is fixed to the specific position, the stored body inlet communicates with the duct outlet, and the outlet of the stored body communicates with the duct inlet.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供具有小的总长度,对于基板的高热处理精度的基板热处理设备,高生产率和几乎不会污染基板的担心。 解决方案:该基板热处理装置代替常规的底板热处理装置,其特征在于,具有:基板传送台,其在内部存储基板,具有储存体入口和存储体 出口,其是具有与基板的边缘的面相对的开口部分的一对开口; 一种热处理炉,具有用于使导管入口与作为一对开口面的管道出口连通的管道,用于将气体从管道入口吹送到管道出口的鼓风机以及用于加热或冷却气体的温度控制机构; 以及用于将基底传送架固定到加热炉特有的特定位置并将其从特定位置移动的基板传送架进给机构。 当基板传送架固定到特定位置时,存储体入口与管道出口连通,并且存储体的出口与管道入口连通。 版权所有(C)2005,JPO&NCIPI