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    • 2. 发明申请
    • COMPOSITE WAFER, SEMICONDUCTOR DEVICE, ELECTRONIC COMPONENT AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • 复合晶片,半导体装置,电子组件及制造半导体装置的方法
    • WO2017148873A1
    • 2017-09-08
    • PCT/EP2017/054530
    • 2017-02-27
    • INFINEON TECHNOLOGIES AG
    • FEIL, ThomasGANITZER, PaulLACKNER, GeraldMUELLER, JochenPOELZL, MartinPOLSTER, TobiasVON KOBLINSKI, Carsten
    • H01L21/78H01L21/56
    • In an embodiment, a method includes forming at least one trench in non-device regions of a first surface of a semiconductor wafer, the non-device regions being arranged between component positions, the component positions including device regions and a first metallization structure, applying a first polymer layer to the first surface of a semiconductor wafer such that the trenches and edge regions of the component positions are covered with the first polymer layer and such that at least a portion of the first metallization structure is uncovered by the first polymer layer, removing portions of a second surface of the semiconductor wafer, the second surface opposing the first surface, revealing portions of the first polymer layer in the non-device regions and producing a worked second surface and inserting a separation line through the first polymer layer in the non-device regions to form a plurality of separate semiconductor dies.
    • 在一个实施例中,一种方法包括在半导体晶片的第一表面的非器件区中形成至少一个沟槽,所述非器件区布置在部件位置之间,所述部件位置包括器件 区域和第一金属化结构,将第一聚合物层施加到半导体晶片的第一表面,使得部件位置的沟槽和边缘区域被第一聚合物层覆盖并且使得第一金属化结构的至少一部分 没有被第一聚合物层覆盖,除去半导体晶片的第二表面的一部分,第二表面与第一表面相对,在非器件区域中露出第一聚合物层的部分并且产生工作的第二表面并且将分离 穿过非器件区域中的第一聚合物层以形成多个单独的半导体管芯。