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    • 1. 发明授权
    • Electrostatic RF MEMS switches
    • 静电RF MEMS开关
    • US07122942B2
    • 2006-10-17
    • US10951612
    • 2004-09-29
    • In-sang SongYoung-il KimMoon-chul LeeDong-ha ShimYoung-tack HongSun-hee ParkKuang-woo Nam
    • In-sang SongYoung-il KimMoon-chul LeeDong-ha ShimYoung-tack HongSun-hee ParkKuang-woo Nam
    • H01L41/08
    • H01P1/127H01H57/00H01H59/0009H01H2057/006
    • A micro switch having a dielectric layer having a movement region formed on a substrate, a conductive layer formed on a predetermined portion of the movement region, a dielectric film formed on the conductive layer, first and second electric conductors formed a predetermined distance above the dielectric film, one or two lower electrodes formed on the movement region, and one or two upper electrodes formed a predetermined distance above the two lower electrodes, the one or two upper electrodes moving the conductive layer and the dielectric film upwards when an electrostatic force occurs between the upper and lower electrodes, and capacitively coupled with the first and second electric conductors to allow a current to flow between the first and second electric conductors. Such a micro switch has a high on/off ratio and isolation degree and a simple structure, and can be fabricated in a very easy process.
    • 一种具有介电层的微型开关,具有形成在基板上的移动区域,形成在所述移动区域的预定部分上的导电层,形成在所述导电层上的电介质膜,在所述电介质上形成预定距离的第一和第二导电体 膜,形成在移动区域上的一个或两个下电极,以及在两个下电极之上形成预定距离的一个或两个上电极,一个或两个上电极在静电力发生时向上移动导电层和电介质膜 上电极和下电极,并且与第一和第二电导体电容耦合以允许电流在第一和第二电导体之间流动。 这种微型开关具有高的开/关比和隔离度和简单的结构,并且可以在非常容易的过程中制造。
    • 6. 发明申请
    • Apparatus for detecting bio-bonding and method thereof
    • 用于检测生物粘合的装置及其方法
    • US20060073502A1
    • 2006-04-06
    • US11225507
    • 2005-09-13
    • Sung-hee LeeJung-ho KangYoung-il KimMoon-chul LeeTae-sik Park
    • Sung-hee LeeJung-ho KangYoung-il KimMoon-chul LeeTae-sik Park
    • C12Q1/68C12M1/34
    • G01N33/5438G01N33/553
    • An apparatus and method for detecting a bio-bonding includes monitoring of a change of an electrical property before and after bio-bonding. The apparatus includes a signal transducer section having a substrate, a metallic thin film stepped on a surface of a certain region of the substrate, probe biomolecules formed on the metallic thin film, an input port connected with one side of the signal transducer section and into which a signal for monitoring an electrical property of the signal transducer section is input and a detector section for characteristic quantity connected with the other side of the signal transducer section so as to monitor an electrical property of the signal transducer section. The probe biomolecules are immobilized on the metallic thin film. The bio-bonding is detected through monitoring the electrical property of the signal transducer section before and after the bio-bonding.
    • 用于检测生物粘合的装置和方法包括监测生物粘合之前和之后的电特性的变化。 该装置包括:信号传感器部,具有基板,在基板的特定区域的台阶上阶梯状的金属薄膜,形成在金属薄膜上的探针生物分子,与信号换能器部的一侧连接的输入口, 输入用于监视信号换能器部分的电气性能的信号,以及用于与信号换能器部分的另一侧连接的特征量的检测器部分,以监测信号换能器部分的电气特性。 探针生物分子固定在金属薄膜上。 通过在生物粘合之前和之后监测信号传感器部分的电性能来检测生物粘合。