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1. 发明授权

US07927988B2 Method of fabricating semiconductor device 有权
标题翻译：制造半导体器件的方法
公开(公告)号：US07927988B2
公开(公告)日：2011-04-19
申请号：US12488577
申请日：2009-06-21
申请人： In-Gyoo Kim , O-Kyun Kwon , Dong-Woo Suh , Gyung-Ock Kim
发明人： In-Gyoo Kim , O-Kyun Kwon , Dong-Woo Suh , Gyung-Ock Kim
IPC分类号： H01L21/425
CPC分类号： H01L21/2007 , H01L21/76251
摘要： Provided is a method of fabricating a semiconductor device. The method includes forming a first layer, a second layer, an ion implantation layer between the first and second layers, and an anti-oxidation layer on the second layer, and performing a heat treating process to form an insulating layer between the first and second layers while preventing loss of the second layer using the anti-oxidation layer.
摘要翻译：提供一种制造半导体器件的方法。该方法包括在第一层和第二层之间形成第一层，第二层，离子注入层和第二层上的抗氧化层，并进行热处理工艺以在第一层和第二层之间形成绝缘层同时防止使用抗氧化层损失第二层。

2. 发明申请

US20100159674A1 METHOD OF FABRICATING SEMICONDUCTOR DEVICE 有权
标题翻译：制造半导体器件的方法
公开(公告)号：US20100159674A1
公开(公告)日：2010-06-24
申请号：US12488577
申请日：2009-06-21
申请人： In-Gyoo Kim , O-Kyun Kwon , Dong-Woo Suh , Gyung-Ock Kim
发明人： In-Gyoo Kim , O-Kyun Kwon , Dong-Woo Suh , Gyung-Ock Kim
IPC分类号： H01L21/20
CPC分类号： H01L21/2007 , H01L21/76251
摘要： Provided is a method of fabricating a semiconductor device. The method includes forming a first layer, a second layer, an ion implantation layer between the first and second layers, and an anti-oxidation layer on the second layer, and performing a heat treating process to form an insulating layer between the first and second layers while preventing loss of the second layer using the anti-oxidation layer.
摘要翻译：提供一种制造半导体器件的方法。该方法包括在第一层和第二层之间形成第一层，第二层，离子注入层和第二层上的抗氧化层，并进行热处理工艺，以在第一层和第二层之间形成绝缘层同时防止使用抗氧化层损失第二层。

3. 发明授权

US08017420B2 Method of forming optical waveguide 有权
标题翻译：光波导形成方法
公开(公告)号：US08017420B2
公开(公告)日：2011-09-13
申请号：US12491443
申请日：2009-06-25
申请人： In-Gyoo Kim , Dong-Woo Suh , Gyung-Ock Kim
发明人： In-Gyoo Kim , Dong-Woo Suh , Gyung-Ock Kim
IPC分类号： H01L21/00
CPC分类号： G02B6/136 , G02B6/132
摘要： Provided is a method of forming optical waveguide. The method includes forming a trench on a semiconductor substrate to define an active portion, and partially oxidizing the active portion. An non-oxidized portion of the active portion is included in a core through which an optical signal passes, and an oxidized portion of the active portion is included in a cladding.
摘要翻译：提供一种形成光波导的方法。该方法包括在半导体衬底上形成沟槽以限定有源部分，并部分氧化活性部分。有源部分的非氧化部分包括在光信号通过的芯中，有源部分的氧化部分包含在包层中。

4. 发明申请

US20100144075A1 METHOD OF FORMING OPTICAL WAVEGUIDE 有权
标题翻译：形成光波导的方法
公开(公告)号：US20100144075A1
公开(公告)日：2010-06-10
申请号：US12491443
申请日：2009-06-25
申请人： In-Gyoo Kim , Dong-Woo Suh , Gyung-Ock Kim
发明人： In-Gyoo Kim , Dong-Woo Suh , Gyung-Ock Kim
IPC分类号： H01L33/00
CPC分类号： G02B6/136 , G02B6/132
摘要： Provided is a method of forming optical waveguide. The method includes forming a trench on a semiconductor substrate to define an active portion, and partially oxidizing the active portion. An non-oxidized portion of the active portion is included in a core through which an optical signal passes, and an oxidized portion of the active portion is included in a cladding.
摘要翻译：提供一种形成光波导的方法。该方法包括在半导体衬底上形成沟槽以限定有源部分，并部分氧化活性部分。有源部分的非氧化部分包括在光信号通过的芯中，有源部分的氧化部分包含在包层中。

5. 发明申请

US20100301448A1 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME 有权
标题翻译：半导体器件及其形成方法
公开(公告)号：US20100301448A1
公开(公告)日：2010-12-02
申请号：US12847974
申请日：2010-07-30
申请人： O-Kyun KWON , Dong-Woo Suh , Junghyung Pyo , Gyung-Ock Kim
发明人： O-Kyun KWON , Dong-Woo Suh , Junghyung Pyo , Gyung-Ock Kim
IPC分类号： H01L27/12
CPC分类号： H01L21/76267 , H01L21/76283
摘要： Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.
摘要翻译：提供半导体及其形成方法。该方法包括在衬底中局部形成掩埋绝缘层。蚀刻衬底以形成露出掩埋绝缘层的开口，并且在掩埋绝缘层上形成从衬底至少一个方向间隔开的硅图案。形成第一绝缘层以包围硅图案。

6. 发明授权

US08183633B2 Semiconductor device and method for forming the same 有权
标题翻译：半导体装置及其形成方法
公开(公告)号：US08183633B2
公开(公告)日：2012-05-22
申请号：US12847974
申请日：2010-07-30
申请人： O-Kyun Kwon , Dong-Woo Suh , Jung-Hyung Pyo , Gyung-Ock Kim
发明人： O-Kyun Kwon , Dong-Woo Suh , Jung-Hyung Pyo , Gyung-Ock Kim
IPC分类号： H01L27/12
CPC分类号： H01L21/76267 , H01L21/76283
摘要： Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.
摘要翻译：提供半导体及其形成方法。该方法包括在衬底中局部形成掩埋绝缘层。蚀刻衬底以形成露出掩埋绝缘层的开口，并且在掩埋绝缘层上形成从衬底至少一个方向间隔开的硅图案。形成第一绝缘层以包围硅图案。

7. 发明授权

US07790567B2 Semiconductor device and method for forming the same 有权
标题翻译：半导体装置及其形成方法
公开(公告)号：US07790567B2
公开(公告)日：2010-09-07
申请号：US12130877
申请日：2008-05-30
申请人： O-Kyun Kwon , Dong-Woo Suh , Jung-Hyung Pyo , Gyung-Ock Kim
发明人： O-Kyun Kwon , Dong-Woo Suh , Jung-Hyung Pyo , Gyung-Ock Kim
IPC分类号： H01L21/76
CPC分类号： H01L21/76267 , H01L21/76283
摘要： Provided is a semiconductor and a method for forming the same. The method includes forming a buried insulating layer locally in a substrate. The substrate is etched to form an opening exposing the buried insulating layer, and a silicon pattern spaced in at least one direction from the substrate is formed on the buried insulating layer. A first insulating layer is formed to enclose the silicon pattern.
摘要翻译：提供半导体及其形成方法。该方法包括在衬底中局部形成掩埋绝缘层。蚀刻衬底以形成露出掩埋绝缘层的开口，并且在掩埋绝缘层上形成从衬底至少一个方向间隔开的硅图案。形成第一绝缘层以包围硅图案。

8. 发明申请

US20100270589A1 PHOTODETECTORS CONVERTING OPTICAL SIGNAL INTO ELECTRICAL SIGNAL 审中-公开
标题翻译：光电转换成电信号的光电信号
公开(公告)号：US20100270589A1
公开(公告)日：2010-10-28
申请号：US12741258
申请日：2008-05-08
申请人： Dong-Woo Suh , Gyung-Ock Kim , Sang-Hun Kim
发明人： Dong-Woo Suh , Gyung-Ock Kim , Sang-Hun Kim
IPC分类号： H01L31/10 , H01L31/0248
CPC分类号： H01L31/105 , H01L31/028 , H01L31/1812 , Y02E10/547
摘要： Provided is a photodetector converting an optical signal into an electrical signal. The photodetector includes: a plurality of semiconductor layers sequentially stacked on a substrate; a plurality of photoelectric conversion units formed in the semiconductor layers, respectively, and having different spectral sensitivities from each other; and buffer layers interposed between the adjacent semiconductor layers, respectively. Each of the buffer layers alleviates stress between the adjacent semiconductor layers.
摘要翻译：提供了将光信号转换为电信号的光电检测器。光电检测器包括：顺序堆叠在基板上的多个半导体层; 分别形成在所述半导体层中并具有彼此不同的光谱灵敏度的多个光电转换单元; 以及分别介于相邻半导体层之间的缓冲层。每个缓冲层减轻相邻半导体层之间的应力。

9. 发明申请

US20050008294A1 Highly efficient focusing waveguide grating coupler using leaky mode 失效
标题翻译：使用泄漏模式的高效聚焦波导光栅耦合器
公开(公告)号：US20050008294A1
公开(公告)日：2005-01-13
申请号：US10749349
申请日：2003-12-31
申请人： Yongwoo Park , Yeungjoon Sohn , Mun-Cheol Paek , Dong-Woo Suh , Hojun Ryu , Hyeon-Bong Pyo
发明人： Yongwoo Park , Yeungjoon Sohn , Mun-Cheol Paek , Dong-Woo Suh , Hojun Ryu , Hyeon-Bong Pyo
IPC分类号： G02B6/28 , G02B6/122 , G02B6/124 , G02B6/34
CPC分类号： G02B6/34 , G02B6/122 , G02B6/124
摘要： Provided is a focusing waveguide grating coupler using a leaky mode which can form single output beam while relieving the dependency on manufacturing processes. The focusing waveguide grating coupler of the present research includes: a substrate having a first refraction index n1; a first core layer having a second refraction index n2, the first core layer being formed on the substrate; a second core layer having a third refraction index n3, the second core layer being formed on the first core layer apart from the first core layer with a space d in between; a first cladding layer having a fourth refraction index n4, the first cladding layer being formed on the second core layer; a second cladding layer having a fifth refraction index n5, the second cladding layer being formed on the first cladding layer and inserted between the first core layer and the second core layer; and a Fresnel lens positioned on the second cladding layer, wherein the refractive indexes satisfy conditions of n5>(n2, n3)>n1 and n5>n4; and light inputted through the first and second core layers to the Fresnel lens as radiated leaky beam by a leaky mode formed according to the conditions, and the leaky beam forms an optical focus by performing single directional coupling.
摘要翻译：提供了一种使用泄漏模式的聚焦波导光栅耦合器，其可以形成单个输出光束，同时减轻对制造工艺的依赖性。本研究的聚焦波导光栅耦合器包括：具有第一折射率n1的衬底; 具有第二折射率n2的第一芯层，所述第一芯层形成在所述基板上; 具有第三折射率n3的第二芯层，所述第二芯层与所述第一芯层分开形成在所述第一芯层上，其间具有空间d; 具有第四折射率n4的第一包层，所述第一包层形成在所述第二芯层上; 具有第五折射率n5的第二包层，所述第二包层形成在所述第一包层上并插入在所述第一芯层和所述第二芯层之间; 和位于第二包覆层上的菲涅尔透镜，其中折射率满足n5>（n2，n3）> n1和n5> n4的条件; 以及通过第一和第二核心层通过根据条件形成的泄漏模式作为辐射泄漏波束通过第一和第二核心层输入到菲涅耳透镜的光，并且通过执行单向耦合来形成光学焦点。

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