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    • 1. 发明授权
    • Ultra-sensitive metal oxide gas sensor and fabrication method thereof
    • 超敏感金属氧化物气体传感器及其制造方法
    • US07640789B2
    • 2010-01-05
    • US11644121
    • 2006-12-22
    • Il-Doo KimJae-Min HongDong-Young KimSeong-Mu JoAvner RothschildHarry L. Tuller
    • Il-Doo KimJae-Min HongDong-Young KimSeong-Mu JoAvner RothschildHarry L. Tuller
    • G01N27/26B05D3/00
    • G01N27/127
    • A method for fabricating an ultra-sensitive metal oxide gas sensor is disclosed, which comprises the steps of spinning a mixture solution including a metal oxide precursor and a polymer onto a sensor electrode to form a metal oxide precursor-polymer composite fiber; thermally compressing or thermally pressurizing the composite fiber; and thermally treating the thermally compressed or thermally pressurized composite fiber to remove the polymer from the composite fiber. Since the gas sensor includes a macro pore between nanofibers and a meso pore between nano-rods and/or nano-grains, gas diffusion and surface area can be maximized. Also, the ultra-sensitive sensor having high stability in view of mechanical, thermal, and electrical aspects can be obtained through rapid increase of adhesion between the metal oxide thin layer and the sensor electrode.
    • 公开了一种用于制造超敏感金属氧化物气体传感器的方法,其包括将包含金属氧化物前体和聚合物的混合溶液旋转到传感器电极上以形成金属氧化物前体 - 聚合物复合纤维的步骤; 热压缩或热加压复合纤维; 并热处理热压缩或热加压的复合纤维以从复合纤维中除去聚合物。 由于气体传感器包括纳米纤维与纳米棒和/或纳米颗粒之间的中孔的宏观孔隙,所以气体扩散和表面积可以最大化。 此外,通过快速增加金属氧化物薄层和传感器电极之间的粘附力,可以获得机械,热和电学方面具有高稳定性的超灵敏传感器。
    • 5. 发明申请
    • Ultra-sensitive metal oxide gas sensor and fabrication method thereof
    • 超敏感金属氧化物气体传感器及其制造方法
    • US20070261959A1
    • 2007-11-15
    • US11644121
    • 2006-12-22
    • ll-Doo KimJae-Min HongDong-Young KimSeong-Mu JoAvner RothschildHarry Tuller
    • ll-Doo KimJae-Min HongDong-Young KimSeong-Mu JoAvner RothschildHarry Tuller
    • B05D3/00G01N27/26
    • G01N27/127
    • A method for fabricating an ultra-sensitive metal oxide gas sensor is disclosed, which comprises the steps of spinning a mixture solution including a metal oxide precursor and a polymer onto a sensor electrode to form a metal oxide precursor-polymer composite fiber; thermally compressing or thermally pressurizing the composite fiber; and thermally treating the thermally compressed or thermally pressurized composite fiber to remove the polymer from the composite fiber. Since the gas sensor includes a macro pore between nanofibers and a meso pore between nano-rods and/or nano-grains, gas diffusion and surface area can be maximized. Also, the ultra-sensitive sensor having high stability in view of mechanical, thermal, and electrical aspects can be obtained through rapid increase of adhesion between the metal oxide thin layer and the sensor electrode.
    • 公开了一种用于制造超敏感金属氧化物气体传感器的方法,其包括将包含金属氧化物前体和聚合物的混合溶液旋转到传感器电极上以形成金属氧化物前体 - 聚合物复合纤维的步骤; 热压缩或热加压复合纤维; 并热处理热压缩或热加压的复合纤维以从复合纤维中除去聚合物。 由于气体传感器包括纳米纤维与纳米棒和/或纳米颗粒之间的中孔的宏观孔隙,所以气体扩散和表面积可以最大化。 此外,通过快速增加金属氧化物薄层和传感器电极之间的粘附力,可以获得机械,热和电学方面具有高稳定性的超灵敏传感器。