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    • 3. 发明申请
    • Slit coater with a standby unit for a nozzle and a coating method using the same
    • 狭缝涂布机具有用于喷嘴的备用单元和使用其的涂布方法
    • US20060147620A1
    • 2006-07-06
    • US11211214
    • 2005-08-19
    • O KwonKang ChoJi NohJeong ParkJin Park
    • O KwonKang ChoJi NohJeong ParkJin Park
    • B05D5/12B05D5/06B05D3/12B05B15/02B05B15/06G02F1/133
    • H01L21/6715B05B15/55B05B15/555B05B15/62B05C5/0254
    • A slit coater with a standby unit for a nozzle and a coating method using the same prevents environmental pollution by solvent steam and simultaneously maintains the slit nozzle in an optimum state. When in standby and not performing a coating application, the slit nozzle is kept in a standby unit having a solvent atmosphere therein. The slit coater includes: a table on which an object to be processed is positioned; a slit nozzle for applying a coating solution onto a surface of the object; and a standby unit into which the slit nozzle is loaded when on standby, and having a shutter at the opening thereof to maintain an inner space in a substantially hermetically sealed solvent atmosphere. The atmosphere in the standby unit is configured to prevent hardening of the coating solution in the slit nozzle and thereby maintain the slit nozzle in the optimum state for providing coating applications.
    • 具有用于喷嘴的备用单元的狭缝涂布机和使用其的涂布方法防止溶剂蒸汽的环境污染,同时将狭缝喷嘴保持在最佳状态。 当处于待机状态并且不进行涂布时,狭缝喷嘴保持在其中具有溶剂气氛的备用单元中。 狭缝涂布机包括:待处理对象被放置在其上的工作台; 用于将涂布溶液施加到所述物体的表面上的狭缝喷嘴; 以及备用单元,其在备用时装入狭缝喷嘴,并且在其开口处具有挡板以将内部空间保持在基本上密封的溶剂气氛中。 备用单元中的气氛被配置为防止狭缝喷嘴中的涂布溶液的硬化,从而将狭缝喷嘴保持在用于提供涂布应用的最佳状态。
    • 4. 发明申请
    • Slit coater with a service unit for a nozzle and a coating method using the same
    • 狭缝涂布机具有用于喷嘴的维修单元和使用其的涂布方法
    • US20060147618A1
    • 2006-07-06
    • US11211211
    • 2005-08-19
    • O KwonKang ChoJi Noh
    • O KwonKang ChoJi Noh
    • B05D5/12B05D5/06B05D3/12B05B15/02G02F1/133
    • H01L21/6715B05B15/55B05B15/555B05C5/0254
    • A slit coater including a service unit and a coating method using the same prevents hardening of a coating solution at an outlet of the slit nozzle and maintains constant discharge conditions for the application of a uniform coating solution. The slit nozzle is kept in the service unit, which has a solvent atmosphere with cleaning solution spray nozzles and cleaning solution in an internal lower portion thereof. The slit nozzle periodically discharges dummy coating solution. The slit coater having the service unit includes a table on which an object to be processed is positioned, a slit nozzle unit for applying coating solution onto a surface of the object, and a service unit onto which the slit nozzle unit is loaded when the unit is in service, and having an inner space maintained in a substantially sealed solvent atmosphere.
    • 包括维修单元的狭缝涂布机和使用其的涂布方法防止了在狭缝喷嘴的出口处的涂布溶液的硬化,并且为了施加均匀的涂布溶液而保持恒定的排出条件。 狭缝喷嘴保持在维修单元中,其具有在其内部下部具有清洁溶液喷嘴和清洁溶液的溶剂气氛。 狭缝喷嘴周期性地排出假涂层溶液。 具有维修单元的狭缝涂布机包括:待处理物体所在的工作台,用于将涂布液涂布到物体的表面上的狭缝喷嘴单元;以及在单元上装载有狭缝喷嘴单元的维修单元 使用中,并且具有保持在基本上密封的溶剂气氛中的内部空间。