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1. 发明专利

JP2009047675A Gas sensor, gas sensing module therefor, and gas measuring system using them 有权
标题翻译：气体传感器，其气体感应模块及其使用的气体测量系统
公开(公告)号：JP2009047675A
公开(公告)日：2009-03-05
申请号：JP2007316222
申请日：2007-12-06
申请人： Ideal Star Inc , Tokyo Univ Of Science , 学校法人東京理科大学 , 株式会社イデアルスター
发明人： KASAMA YASUHIKO , OMOTE KENJI , YOKOO KUNIYOSHI , MIZOBUCHI YUZO , OIZUMI HARUNA , SAIDA MORIHIKO , MIZOGAMI KAZUAKI , FURUKAWA TAKEO , SAGAMI HIROYUKI
IPC分类号： G01N27/22
摘要： PROBLEM TO BE SOLVED: To provide an ultracompact gas sensor which can be arranged for separated gas piping in semiconductor manufacturing equipment, and provide a gas measuring system using the gas sensor. SOLUTION: The gas sensor includes: a gas sensing element having a dielectric semiconductor and changing its conductivity in response to a gas adsorption state; and a pair of electrodes being electrically connected to the gas sensing element. The gas absorption state of the gas sensing element can be sensed from an electric response varying in response to a voltage which is applied to the pair of electrodes and has periodical changes including polarity reversals. More preferably, the gas sensor has a configuration of connecting a capacitance section to the gas sensing element in series. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种能够设置在半导体制造装置中的分离气体配管的超小型气体传感器，并且提供使用气体传感器的气体测量系统。气体传感器包括：具有电介质半导体并响应于气体吸附状态改变其导电性的气体感测元件; 并且一对电极电连接到气体感测元件。气体检测元件的气体吸收状态可以从响应于施加到该对电极的电压变化并且具有包括极性反转的周期性变化的电响应来感测。更优选地，气体传感器具有将电容部连接到气体感测元件的结构。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2007161495A Method and apparatus for producing fullerene-based material 审中-公开
标题翻译：用于生产富勒烯基材料的方法和装置
公开(公告)号：JP2007161495A
公开(公告)日：2007-06-28
申请号：JP2005355571
申请日：2005-12-09
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： KASAMA YASUHIKO , OMOTE KENJI , MAKITA RITSURO , YOKOO KUNIYOSHI
IPC分类号： C01B31/02
摘要： PROBLEM TO BE SOLVED: To solve the problem that, in a method for producing a fullerene-based material by background technique, the recovery rate of fullerene is low, because when fullerene vapor sublimed by heating in an oven is blown on a tabular deposition substrate, the fullerene vapor spouts widely from the tip of an injection pipe, accordingly much fullerene adheres to the inner wall of a vacuum chamber or is exhausted by a vacuum apparatus without depositing on the substrate.
SOLUTION: The shape of a deposition substrate is made cupped, whereby the scattering amount of fullerene vapor can be reduced by the lateral portion of the substrate and the recovery rate of fullerene can be enhanced.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题为了解决在背景技术的富勒烯类材料的制造方法中，富勒烯的回收率低的问题，因为当通过在烘箱中加热而升华的富勒烯蒸气吹到富勒烯蒸气从注射管的尖端广泛地喷出，因此富勒烯很多附着在真空室的内壁上，或者由真空装置排出而不沉积在基底上。解决方案：沉积衬底的形状被制成杯状，由此可以通过衬底的侧面部分减少富勒烯蒸汽的散射量，并且可以提高富勒烯的回收率。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2006286620A Linear light emitting device and display device 审中-公开
标题翻译：线性发光装置和显示装置
公开(公告)号：JP2006286620A
公开(公告)日：2006-10-19
申请号：JP2006063656
申请日：2006-03-09
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： YOKOO KUNIYOSHI , KASAMA YASUHIKO , OMOTE KENJI
IPC分类号： H01J65/00 , H01J11/18
CPC分类号： H01J11/18 , H01J9/241
摘要： PROBLEM TO BE SOLVED: To solve a problem that a film forming device using high vacuum, an advanced micro-machining device, a complicated manufacturing process and high manufacturing cost are required for manufacturing a currently widely used large display panel produced on a flat substrate.
SOLUTION: A dielectric film and a phosphor film are deposited on an inner surface of a hollow wire body for forming a linear light emitting device provided with an electrode. Then, the light emitting device is weaved for forming a display panel. The large display panel can be manufactured by a comparatively simple device and a simple process, which is effective in reduction of the manufacturing cost. The linear light emitting device can locally emit light of various colors and intensity. The display device can be manufactured at a low cost by weaving the linear light emitting device without using an expensive manufacturing device and a complicated process.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题为了解决制造现有广泛使用的大型显示面板的问题，需要使用高真空的成膜装置，先进的微加工装置，复杂的制造工艺和高的制造成本平面基板。解决方案：电介质膜和荧光膜沉积在中空线体的内表面上，用于形成设置有电极的线性发光器件。然后，编织发光器件以形成显示面板。大型显示面板可以通过比较简单的装置和简单的工艺制造，这有助于降低制造成本。线性发光装置可以局部地发出各种颜色和强度的光。可以通过编织线性发光器件而不使用昂贵的制造装置和复杂的工艺来以低成本制造显示装置。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2006253122A Plasma source, ion source, and ion generation method 审中-公开
标题翻译：等离子体源，离子源和离子生成方法
公开(公告)号：JP2006253122A
公开(公告)日：2006-09-21
申请号：JP2006030536
申请日：2006-02-08
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： KASAMA YASUHIKO , OMOTE KENJI , YOKOO KUNIYOSHI , KOMATSU KENICHIRO
IPC分类号： H01J27/26 , C01B31/02 , H01J37/08 , H05H1/24
CPC分类号： H01J27/26 , H01J37/08 , H01J37/3171
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing endohedral fullerene of a quantity sufficient for using it as an industrial material, and to provide a plasma source capable of extracting plasma with a high ionic current for synthesizing a large volume of included fullerene. SOLUTION: A metal plate having a plurality of openings, such as a metallic mesh is used for a thermal electrode. In addition, since the surface area of thermal electrode in contact with steam is increased markedly, by stacking a plurality of the thermal electrodes, ionization efficiency is improved, and a large ion current can be extracted. By forming the thermal electrode with a thin tungsten wire or the like, heat can be generated, by carrying a current to the thermal electrode itself without heating the thermal electrode by a heater, and the effect of improving the utilization efficiency of thermal energy is obtained. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种足以使用其作为工业材料的量的内置富勒烯的制造方法，并提供能够以高离子电流提取等离子体的等离子体源，以合成大量的包含富勒烯。解决方案：具有多个开口的金属板，例如金属网，用于热电极。此外，由于与蒸汽接触的热电极的表面积显着增加，通过堆叠多个热电极，电离效率提高，可以提取大的离子电流。通过形成具有细钨丝等的热电极，可以通过在不用加热器对热电极进行加热的情况下，向热电极本身携带电流而产生热量，并且获得提高热能利用效率的效果。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2005139022A Method and apparatus for producing inclusion fullerene 有权
标题翻译：用于生产包装的方法和装置
公开(公告)号：JP2005139022A
公开(公告)日：2005-06-02
申请号：JP2003376326
申请日：2003-11-05
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： KASAMA YASUHIKO , OMOTE KENJI , YOKOO KUNIYOSHI
IPC分类号： B82B3/00 , C01B31/02
CPC分类号： B82Y30/00
摘要： PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing an inclusion fullerene, wherein the yields of the inclusion fullerene can be markedly improved not only because the inclusion fullerene can be obtained also in the central part of a hot plate, but also because fullerene is fed along the plasma stream effluence direction, and wherein the entire apparatus size can be reduced because the distance between the fullerene feed position and the hot plate can be reduced.
SOLUTION: A plasma stream 2 of atoms to be included is formed in a vacuum chamber 1 by feeding the atoms toward a hot plate 3. Fullerene is fed into the vacuum chamber 1 along the direction of effluence of the plasma stream 2. Inclusion fullerene is deposited on a deposition plate 5 placed downstream of the plasma stream 2 by applying a biased voltage to the plate 5.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：待解决的问题：为了提供一种夹杂物富勒烯的制造方法和装置，其中夹杂物富勒烯的收率可以显着提高，这不仅因为也可以在热板的中心部分获得夹杂物富勒烯，而且因为富勒烯沿着等离子体流流出方向进料，并且其中可以减少整个装置尺寸，因为可以减少富勒烯进料位置和热板之间的距离。解决方案：通过将原子供给热板3，在真空室1中形成待包含的原子的等离子体流2.富勒烯沿着等离子体流2的流出方向进料到真空室1中。通过向板5施加偏置电压，将包含的富勒烯沉积在放置在等离子体流2下游的沉积板5上。（C）2005，JPO＆NCIPI

6. 发明专利

JP2004241161A Electron emitting source and its manufacturing method and its display device 审中-公开
公开(公告)号：JP2004241161A
公开(公告)日：2004-08-26
申请号：JP2003026533
申请日：2003-02-03
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： YOKOO KUNIYOSHI , MIMURA SHUSUKE , OMOTE KENJI
IPC分类号： H01J9/02 , H01J1/304 , H01J29/04 , H01J31/12
摘要： PROBLEM TO BE SOLVED: To provide an electron emitting source that can be formed easily in a large area and has an electron emitting efficiency same as Spindt type electron source, and has superior electron emitting characteristics same as that of lamination type electron source such as MIM and BSD (little dependency on vacuum, small emitting angle of emitted electrons, stable current by emitted electrons and little noise, low impressing voltage for emitting electrons), and its manufacturing method. SOLUTION: The electron emitting source has a lamination structure in which a lower electrode 1002, an electron emitting layer 1003, an insulating membrane 1004, and an upper electrode 1005 are laminated sequentially, and the insulating membrane 1004 and the upper electrode 1005 have numerous hole parts 1006, and the electron emitting layer 1003 is a thin film made of a carbonaceous material. COPYRIGHT: (C)2004,JPO&NCIPI

7. 发明专利

JP2006193761A Vaporizer, and plasma treatment device having vaporizer 有权
标题翻译：蒸发器和具有蒸发器的等离子体处理装置
公开(公告)号：JP2006193761A
公开(公告)日：2006-07-27
申请号：JP2005004175
申请日：2005-01-11
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： YOKOO KUNIYOSHI , KASAMA YASUHIKO , OMOTE KENJI , KOMATSU KENICHIRO
IPC分类号： C23C14/24
摘要： PROBLEM TO BE SOLVED: To provide a vaporizer capable of smoothly leading a material in the predetermined direction without raising any problem that a solid material or a liquid material is solidified or liquefied and stuffed during the vaporization.
SOLUTION: Fullerene 101 is stored in a vaporization unit 107. A delivery part composed of a high-temperature maintaining chamber 203 and an outlet 106 is provided on an upper part of the vaporization unit 107. A wall 104 of the delivery part is formed of a material having the thermal conductivity higher than that of a wall part 102 of the vaporization unit 107. A first heater 103 wound around the outer periphery of the vaporization unit 107 is conducted to raise the temperature of the vaporization unit 107 to 400-600°C. A second heater 105 wound around the outer periphery of the high-temperature maintaining chamber 203 of the delivery part is also conducted to raise the temperature of the high-temperature maintaining chamber 203 to 600-800°C. The temperature of the high-temperature maintaining chamber 203 is uniformly expanded over the entire wall of the delivery part, vaporized fullerene gas is smoothly delivered without raising any problem that the vaporized fullerene gas is solidified or liquefied, and stuffed inside the outlet 106 or not delivered in the desired direction.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够在预定方向上平滑地引导材料的蒸发器，而不会引起固体材料或液体材料在蒸发期间固化或液化并填充的任何问题。富勒烯101储存在蒸发单元107中。由蒸发单元107的上部设置由高温保持室203和出口106构成的输送部。输送部的壁104 由具有高于蒸发单元107的壁部102的导热率的材料形成。围绕蒸发单元107的外周缠绕的第一加热器103被引导以将蒸发单元107的温度升高到400 -600℃。卷绕在输送部的高温保持室203的外周的第二加热器105也被进行，以将高温保持室203的温度升高到600-800℃。高温保持室203的温度在输送部的整个壁上均匀地膨胀，蒸发的富勒烯气体被平稳地输送，而不会引起蒸发的富勒烯气固化或液化的问题，并且填充在出口106内部按期望的方向送达。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2006111460A Method and apparatus for producing inclusion fullerene 审中-公开
标题翻译：用于生产包装的方法和装置
公开(公告)号：JP2006111460A
公开(公告)日：2006-04-27
申请号：JP2004297385
申请日：2004-10-12
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： YOKOO KUNIYOSHI , KASAMA YASUHIKO , OMOTE KENJI
IPC分类号： C01B31/02
CPC分类号： B82Y40/00 , C01B32/15 , C01B32/152
摘要： PROBLEM TO BE SOLVED: To solve problems that it is difficult to massively refine an inclusion fullerene into high purity because the inclusion fullerene cannot be efficiently separated from a vacant fullerene although a solvent extraction method or a liquid chromatography method has been used so far as the method for refining the inclusion fullerene.
SOLUTION: This method comprises ionizing inclusion fullerene products to form plasma comprising an inclusion fullerene ion and an impurity ion, and selectively depositing the inclusion fullerene ion onto a substrate on which a biased voltage is impressed. By virtue of this, it becomes possible to efficiently refine the inclusion fullerene of high purity.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决问题：为了解决难以大量精炼含有富勒烯的问题，因为尽管使用了溶剂萃取法或液相色谱法，但是由于夹带富勒烯不能有效地从空的富勒烯中分离出来作为精炼夹心富勒烯的方法。解决方案：该方法包括电离夹杂富勒烯产物以形成包含富勒烯离子和杂质离子的等离子体，并且将夹杂物富勒烯离子选择性沉积到其上施加偏置电压的基板上。由此，能够高效地精制高纯度的夹杂物富勒烯。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2012049141A Plasma source, ion source, and ion generation method 审中-公开
标题翻译：等离子体源，离子源和离子生成方法
公开(公告)号：JP2012049141A
公开(公告)日：2012-03-08
申请号：JP2011225805
申请日：2011-10-13
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： KASAMA YASUHIKO , OMOTE KENJI , YOKOO KUNIYOSHI
IPC分类号： H05H1/24 , C01B31/02 , H01J27/02 , H01J37/08
摘要： PROBLEM TO BE SOLVED: To solve the problem that ionization probability is low, and a sufficient ion current is not obtained, although a contact ionization type plasma source used for the manufacture of a inclusive fullerene, or the like generates a metal ion by jetting a metal vapor of an ion generation target to a flat disk-shaped tungsten heating metal body.SOLUTION: An electron of a metal atom is excited by irradiating, with light, a metal vapor of an ion generation target on a heating metal body. Re, Os, or Ir having a large work function is used as a heating metal body material. Furthermore, a surface of the heating metal body is processed into an uneven shape, and thereby, it is possible to increase ionization probability, and extract a large ion current.
摘要翻译：要解决的问题为了解决电离概率低的问题，并且没有获得足够的离子电流，尽管用于制造包含的富勒烯等的接触电离型等离子体源产生金属离子通过将离子产生靶的金属蒸气喷射到平坦的盘状钨加热金属体上。解决方案：通过用光将离子产生靶的金属蒸气照射在加热金属体上来激发金属原子的电子。使用具有大功函数的Re，Os或Ir作为加热金属体材料。此外，加热金属体的表面被加工成不均匀的形状，从而可以增加电离概率，并提取大的离子电流。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2006049102A Plasma ion source for metal-containing carbon cluster manufacturing apparatus 审中-公开
标题翻译：含金属聚集体制造设备的等离子体源
公开(公告)号：JP2006049102A
公开(公告)日：2006-02-16
申请号：JP2004228799
申请日：2004-08-05
申请人： Ideal Star Inc , 株式会社イデアルスター
发明人： YOKOO KUNIYOSHI , KASAMA YASUHIKO , OMOTE KENJI , KOMATSU KENICHIRO
IPC分类号： H05H1/24 , H01J37/32 , H01L21/265
CPC分类号： H01L21/265 , H01J27/26 , H01J37/32009
摘要： PROBLEM TO BE SOLVED: To provide a plasma ion source suitable for manufacturing metal-containing carbon cluster. SOLUTION: In the plasma ion source, element to be contained is made to contact with a metal electrode at a high temperature in the vacuum vessel (ion chamber) to be ionized. Thermoelectrons generated from high-temperature portions are accelerated and made to collide with neutral elements which are not ionized, in spite of contacting to increase ionization ratio. The ion chamber has an ion extraction electrode portion, in which the charged ions are extracted from the plasma produced in the ion chamber to be provided as an ion beam to a containing process portion requiring the ions. COPYRIGHT: (C)2006,JPO&NCIPI

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