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    • 1. 发明专利
    • EXHAUST GAS TREATMENT DEVICE FOR SPACE USE
    • JPH0361200A
    • 1991-03-15
    • JP19405989
    • 1989-07-28
    • ISHIKAWAJIMA HARIMA HEAVY IND
    • HASHIMOTO TAKANORI
    • B64G1/46
    • PURPOSE:To achieve electric power saving in a small size by constituting the device so that when the concentration of exhaust gas exceeds the limit stipulated in the regulation of exhaust gas, an adsorption cylinder is operated, and when the concentration is within the allowable range, the adsorption cylinder is bypassed to discharge the exhaust gas into space, while when the adsorption cylinder is in a saturated condition, respective inlet, outlet, and bypass open/close valves are closed. CONSTITUTION:When the pressure value from a pressure sensor 9 exceeds the limit stipulated in the regulation of exhaust gas, a control unit 11 closes a bypass open/close valve 8 to pass the exhaust gas through an adsorption cylinder 5, and after harmful substances such as silane have been removed by physical adsorption and chemical impregnation, the exhaust gas is discharged through an exhaust gas line 3 into space. When the pressure value is within the range of exhaust gas regulation, the bypass open/close valve 8 is opened and also an inlet open/close valve 4 is closed, so that the exhaust gas is directly discharged without passing through the adsorption cylinder 5. And, when the saturated condition of the adsorption cylinder 5 is detected from the detected value of a constituent sensor 10, respective open/close valves 4, 6, 8 are closed. By this constitution, miniaturization and electric power saving can be achieved.