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1. 发明申请

WO2015092570A1 MULTISCALE PATTERNING OF A SAMPLE WITH APPARATUS HAVING BOTH THERMO-OPTICAL LITHOGRAPHY CAPABILITY AND THERMAL SCANNING PROBE LITHOGRAPHY CAPABILITY 审中-公开
标题翻译：具有两个热光学平移能力和热扫描探针能力的装置的样品的多尺度图案
公开(公告)号：WO2015092570A1
公开(公告)日：2015-06-25
申请号：PCT/IB2014/066007
申请日：2014-11-13
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , IBM RESEARCH GMBH , SWISSLITHO AG
发明人： DUERIG, Urs T. , FRINGES, Stefan , HOLZNER, Felix , KNOLL, Armin
IPC分类号： G03F7/20
CPC分类号： G03F7/70591 , G03F7/70383 , G03F7/7045 , G03F7/70458
摘要： The present invention is notably directed to apparatuses and methods for multiscale patterning of a sample (9). Such methods comprise: placing (S10) the sample (9) in an apparatus (10) having both thermo-optical lithography capability (20) and thermal scanning probe lithography capability (30); and patterning (S20, S30) two patterns (200, 300) onto the sample (9), respectively by: thermo-optical lithography (20, S20), wherein light ( l 1 , l 3 ) is emitted (S22) from a light source (2) onto the sample (9) to heat the latter and thereby write (S28) a first pattern (200) that is the largest of the two patterns (200, 300); and thermal scanning probe lithography (30, S30), wherein the sample (9) and a heated probe tip are brought in contact (S34) for writing (S38) a second pattern (300) that has substantially smaller critical dimensions than the first pattern (200).
摘要翻译：本发明特别涉及用于样品（9）的多尺度图案化的装置和方法。这样的方法包括：将样品（9）放置在具有热光学光刻能力（20）和热扫描探针光刻能力（30）的设备（10）中（S10）。以及通过以下方式分别将两个图案（S20,30a）图案化（20,30）到样品（9）上：热光学光刻（20,208），其中从（1），将光源（2）加载到样品（9）上以加热样品（9），从而写入（S28）两个图案（200,300）中最大的第一图案（200）; 和热扫描探针光刻（30,301），其中样品（9）和加热的探针针尖与第一图案（S38）接触（S34），第二图案（300）具有基本上小于第一图案的临界尺寸（200）。

2. 发明申请

WO2015036605A1 SCANNING PROBE NANOLITHOGRAPHY SYSTEM AND METHOD 审中-公开
标题翻译：扫描探针纳米尺度系统及方法
公开(公告)号：WO2015036605A1
公开(公告)日：2015-03-19
申请号：PCT/EP2014/069667
申请日：2014-09-16
申请人： SWISSLITHO AG , INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： HOLZNER, Felix , PAUL, Philip , ZIENTEK, Michal , KNOLL, Armin , RAWLINGS, Colin
IPC分类号： G03F7/00
CPC分类号： G03F7/70775 , G03F7/0002
摘要： A scanning probe nanolithography system comprising a probe to create nanostructures line (60) by line through writing said nanostructures (74) pixel by pixel along lines (61) on a sample. A positioning system is adapted to provide a positioning of the probe at a sequence of predetermined positions to the sample and its surface towards the probe and a control unit (50) is provided to control the positioning system for positioning the probe for a pixel-wise writing of said lines (61) through a writing unit. It further comprises a sensor unit adapted to detect a predetermined property of the written nanostructure (74), the sensor unit being connected to the control unit to adapt the control signals to be provided to the writing unit for writing the following line (61; 62) based on the measured signals (65; 66) of the predetermined property.
摘要翻译：一种扫描探针纳米光刻系统，其包括通过在样品上沿线（61）逐像素地写入所述纳米结构（74）而通过线形成纳米结构线（60）的探针。定位系统适于提供探针在预定位置的序列上的位置，使得样品及其表面朝向探针，并且提供控制单元（50）以控制定位系统以将探针定位成像素方向通过写入单元写入所述线（61）。它还包括适于检测书写的纳米结构（74）的预定特性的传感器单元，所述传感器单元连接到所述控制单元，以使得要提供给所述写入单元的控制信号用于写入以下行（61; 62 ）基于预定特性的测量信号（65; 66）。

3. 发明公开

EP3047335A1 SCANNING PROBE NANOLITHOGRAPHY SYSTEM AND METHOD 审中-公开
标题翻译：光栅PROBE纳米光刻系统和方法
公开(公告)号：EP3047335A1
公开(公告)日：2016-07-27
申请号：EP14766179.7
申请日：2014-09-16
申请人： SwissLitho AG , International Business Machines Corporation
发明人： HOLZNER, Felix , PAUL, Philip , ZIENTEK, Michal , KNOLL, Armin , RAWLINGS, Colin
IPC分类号： G03F7/00
摘要： A scanning probe nanolithography system comprising a probe to create nanostructures line (60) by line through writing said nanostructures (74) pixel by pixel along lines (61) on a sample. A positioning system is adapted to provide a positioning of the probe at a sequence of predetermined positions to the sample and its surface towards the probe and a control unit 50 is provided to control the positioning system for positioning the probe for a pixelwise writing of said lines (61) through a writing unit. It further comprises a sensor unit adapted to detect a predetermined property of the written nanostructure (74), the sensor unit being connected to the control unit to adapt the control signals to be provided to the writing unit for writing the following line (61; 62) based on the measured signals (65; 66) of the predetermined property.

4. 发明申请

WO2022142763A1 NANOPARTICLE TRAPPING AND TRANSPORT TECHNIQUES 审中-公开
公开(公告)号：WO2022142763A1
公开(公告)日：2022-07-07
申请号：PCT/CN2021/130094
申请日：2021-11-11
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , IBM (CHINA) CO., LIMITED
发明人： RUGGERI, Francesca , KNOLL, Armin , SCHWEMMER, Christian Michael , PARATORE, Federico , WOLF, Heiko , NICOLLIER, Philippe Marc
IPC分类号： G01N27/26 , B01L3/00
摘要： A nanoparticle trapping device, comprises: a dielectric layer (13), an electrically insulating lid (14), a plurality of trapping electrodes (121,122,123,124), and electrical circuit connectors (195,196). The dielectric layer (13) has an exposed surface, which is structured to form a set of recesses (131,132,133,134) in the dielectric layer (13). The recesses (131,132,133,134) are dimensioned so as to allow nanoparticles (e.g. biomolecules) to be trapped. The electrically insulating lid (14) extends above the exposed surface of the dielectric layer (13). A flow path is defined between the lid (14) and the exposed surface, such that a liquid can be introduced in the flow path. The trapping electrodes (121,122,123,124) are arranged opposite the lid (14) with respect to the exposed surface to face respective ones of the recesses (131,132,133,134). This arrangement defines pairs, such that each pair associates one of the trapping electrodes with a respective one of the recesses (131,132,133,134).

5. 发明申请

WO2007096359A2 METHOD FOR HIGH DENSITY DATA STORAGE AND IMAGING 审中-公开
标题翻译：高密度数据存储和成像方法
公开(公告)号：WO2007096359A2
公开(公告)日：2007-08-30
申请号：PCT/EP2007/051622
申请日：2007-02-20
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION , IBM UNITED KINGDOM LIMITED , HEDRICK, James, Lupton , FROMMER, Jane, Elizabeth , WINDELN, Johannes , DUERIG, Urs , LEE, Victor, Yee-Way , GOTSMANN, Bernd , MILLER, Robert, Dennis , HAGBERG, Erik , MAGBITANG, Teddie , KNOLL, Armin , PRATT, Russell, Clayton , WADE, Charles
发明人： HEDRICK, James, Lupton , FROMMER, Jane, Elizabeth , WINDELN, Johannes , DUERIG, Urs , LEE, Victor, Yee-Way , GOTSMANN, Bernd , MILLER, Robert, Dennis , HAGBERG, Erik , MAGBITANG, Teddie , KNOLL, Armin , PRATT, Russell, Clayton , WADE, Charles
CPC分类号： G11B9/149 , B82Y10/00 , C08G73/101 , C08G73/1046 , C08G73/105 , C08G73/1053 , C08G73/1064 , G11B9/1409 , G11B9/1454 , G11B11/007 , G11B2005/0021 , Y10T428/265 , Y10T428/31721
摘要： An approach is presented for designing a polymeric layer for nanometer scale thermo-mechanical storage devices. Cross-linked polyimide oligomers are used as the recording layers in atomic force data storage device, giving significantly improved performance when compared to previously reported cross-linked and linear polymers. The cross-linking of the polyimide oligomers may be tuned to match thermal and force parameters required in read-write-erase cycles. Additionally, the cross-linked polyimide oligomers are suitable for use in nano-scale imaging.
摘要翻译：提出了一种用于设计用于纳米级热机械存储装置的聚合物层的方法。交联聚酰亚胺低聚物用作原子力数据存储装置中的记录层，与先前报道的交联和线性聚合物相比，显着提高了性能。可以调整聚酰亚胺低聚物的交联以匹配读写擦除周期中所需的热和强度参数。另外，交联聚酰亚胺低聚物适用于纳米级成像。

6. 发明授权

EP3047335B1 SCANNING PROBE NANOLITHOGRAPHY SYSTEM AND METHOD 有权
公开(公告)号：EP3047335B1
公开(公告)日：2020-01-08
申请号：EP14766179.7
申请日：2014-09-16
申请人： SwissLitho AG
发明人： HOLZNER, Felix , PAUL, Philip , ZIENTEK, Michal , KNOLL, Armin , RAWLINGS, Colin
IPC分类号： G03F7/00

7. 发明授权

EP1994078B1 METHOD FOR HIGH DENSITY DATA STORAGE AND IMAGING 有权
标题翻译：保存方法和画面高POET DATA
公开(公告)号：EP1994078B1
公开(公告)日：2009-07-01
申请号：EP07726443.0
申请日：2007-02-20
申请人： International Business Machines Corporation
发明人： HEDRICK, James Lupton , FROMMER, Jane Elizabeth , WINDELN, Johannes , DUERIG, Urs , LEE, Victor Yee-Way , GOTSMANN, Bernd c/o IBM United Kingdom Limited , MILLER, Robert Dennis , HAGBERG, Erik , MAGBITANG, Teddie , KNOLL, Armin , PRATT, Russell Clayton , WADE, Charles
IPC分类号： C08G73/12 , G11B9/00
CPC分类号： G11B9/149 , B82Y10/00 , C08G73/101 , C08G73/1046 , C08G73/105 , C08G73/1053 , C08G73/1064 , G11B9/1409 , G11B9/1454 , G11B11/007 , G11B2005/0021 , Y10T428/265 , Y10T428/31721
摘要： An approach is presented for designing a polymeric layer for nanometer scale thermo-mechanical storage devices. Cross-linked polyimide oligomers are used as the recording layers in atomic force data storage device, giving significantly improved performance when compared to previously reported cross-linked and linear polymers. The cross-linking of the polyimide oligomers may be tuned to match thermal and force parameters required in read-write-erase cycles. Additionally, the cross-linked polyimide oligomers are suitable for use in nano-scale imaging.

8. 发明公开

EP1994078A2 METHOD FOR HIGH DENSITY DATA STORAGE AND IMAGING 有权
标题翻译：保存方法和画面高POET DATA
公开(公告)号：EP1994078A2
公开(公告)日：2008-11-26
申请号：EP07726443.0
申请日：2007-02-20
申请人： International Business Machines Corporation
发明人： HEDRICK, James Lupton , FROMMER, Jane Elizabeth , WINDELN, Johannes , DUERIG, Urs , LEE, Victor Yee-Way , GOTSMANN, Bernd , MILLER, Robert Dennis , HAGBERG, Erik , MAGBITANG, Teddie , KNOLL, Armin , PRATT, Russell Clayton , WADE, Charles
IPC分类号： C08G73/12 , G11B9/00
CPC分类号： G11B9/149 , B82Y10/00 , C08G73/101 , C08G73/1046 , C08G73/105 , C08G73/1053 , C08G73/1064 , G11B9/1409 , G11B9/1454 , G11B11/007 , G11B2005/0021 , Y10T428/265 , Y10T428/31721
摘要： An approach is presented for designing a polymeric layer for nanometer scale thermo-mechanical storage devices. Cross-linked polyimide oligomers are used as the recording layers in atomic force data storage device, giving significantly improved performance when compared to previously reported cross-linked and linear polymers. The cross-linking of the polyimide oligomers may be tuned to match thermal and force parameters required in read-write-erase cycles. Additionally, the cross-linked polyimide oligomers are suitable for use in nano-scale imaging.

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