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    • 7. 发明申请
    • FABRICATION OF ANNULAR MICROFLUIDIC PROBE HEADS
    • 环形微流体探头的制造
    • WO2015132686A1
    • 2015-09-11
    • PCT/IB2015/051075
    • 2015-02-13
    • INTERNATIONAL BUSINESS MACHINES CORPORATIONIBM (CHINA) INVESTMENT COMPANY LTD.IBM RESEARCH GMBH
    • BUERGE, MarcelDELAMARCHE, EmmanuelKAIGALA, GovindLOVCHIK, Robert
    • B01J19/00
    • B01L3/502707B01L3/0255B01L2300/0645B01L2300/0803B01L2300/0887B01L2300/1827H01J49/167
    • A method of fabrication of microfluidic probe heads (100) is provided, the method comprising: providing (S16) a set of n microfluidic probe head layouts (14) on a same bilayer substrate (10, 10a) that comprises two layers (11, 12), said layouts being annularly distributed on that bilayer substrate, and wherein each of said layouts comprises: a first layer (110), which corresponds to a portion of one (11) of said two layers (11, 12) of the bilayer substrate; and a second layer (120), which corresponds to a portion of another one (12) of said two layers (11, 12) of the bilayer substrate; and comprises at least one microchannel (123, 124) defined by a groove open on an upper surface (120u) of the second layer (120) and closed by a portion of a lower surface (1101) of the first layer (110); machining (S20) a hole (16) substantially at the center of the bilayer substrate (10), to create a cylinder wall (18) that delimits said hole and intercepts each of the at least one microchannel of the layouts (14), such that said at least one microchannel (123, 124) of each of said layouts extends up to at least one respective aperture (121, 122) formed at an end of the groove at the level of said cylinder wall (18); and, finally, singulating (S30) each of the n layouts to obtain n microfluidic probe heads (100). MFP heads accordingly obtained are further provided.
    • 提供了一种制造微流体探针头(100)的方法,所述方法包括:在同一双层基板(10,10a)上提供(S16)一组n个微流体探针头布局(14),所述双层基板包括两层(11, 所述布局环形地分布在所述双层基板上,并且其中每个所述布局包括:第一层(110),其对应于所述双层的所述两个层(11,12)中的一个(11)的一部分 基质; 以及对应于所述双层基板的所述两层(11,12)中的另一层(12)的一部分的第二层(120)。 并且包括由在第二层(120)的上表面(120u)上开口并由第一层(110)的下表面(1101)的一部分封闭的凹槽限定的至少一个微通道(123,124)。 加工(S20)基本上在双层基板(10)的中心的孔(16),以形成限定所述孔并且拦截布局(14)的至少一个微通道中的每一个的气缸壁(18),例如 每个所述布局的至少一个微通道(123,124)延伸到形成在所述凹槽的在所述气缸壁(18)的水平处的端部处的至少一个相应的孔(121,122); 最后,对n个布局中的每一个进行单片化(S30)以获得n个微流体探针头(100)。 进一步提供相应获得的MFP头。