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    • 2. 发明专利
    • DE60219779D1
    • 2007-06-06
    • DE60219779
    • 2002-02-21
    • INTEL CORP
    • KUBOTA JIROTAKAHASHI KENJI
    • H01L23/485H01L21/60H01L21/603H05K3/24H05K3/34
    • A flip chip method of joining a chip and a substrate is described. A thermo-compression bonder is utilized to align the chip and substrate and apply a contact force to hold solder bumps on the substrate against metal bumps on the chip. The chip is rapidly heated from its non-native side by a pulse heater in the head of the bonder until the re-flow flow temperature of the solder bumps is reached. Proximate with reaching the re-flow temperature at the solder bumps, the contact force is released. The solder is held above its re-flow temperature for several seconds to facilitate wetting of the substrate's metal protrusions and joining. Metal caps comprised of a noble metal such as palladium is applied to the surface of the metal bumps to prevent the metal bumps (which generally comprise a highly-conductive and highly-reactive metal such as copper) from oxidizing in the elevated temperatures just prior to and during the re-flow operation.
    • 3. 发明专利
    • AT360888T
    • 2007-05-15
    • AT02713638
    • 2002-02-21
    • INTEL CORP
    • KUBOTA JIROTAKAHASHI KENJI
    • H01L21/60H01L23/485H05K3/24H05K3/34H01L21/603
    • A flip chip method of joining a chip and a substrate is described. A thermo-compression bonder is utilized to align the chip and substrate and apply a contact force to hold solder bumps on the substrate against metal bumps on the chip. The chip is rapidly heated from its non-native side by a pulse heater in the head of the bonder until the re-flow flow temperature of the solder bumps is reached. Proximate with reaching the re-flow temperature at the solder bumps, the contact force is released. The solder is held above its re-flow temperature for several seconds to facilitate wetting of the substrate's metal protrusions and joining. Metal caps comprised of a noble metal such as palladium is applied to the surface of the metal bumps to prevent the metal bumps (which generally comprise a highly-conductive and highly-reactive metal such as copper) from oxidizing in the elevated temperatures just prior to and during the re-flow operation.
    • 5. 发明专利
    • FLUXLESS FLIP CHIP INTERCONNECTION.
    • MY122941A
    • 2006-05-31
    • MYPI20020774
    • 2002-03-05
    • INTEL CORP
    • TAKAHASHI KENJIKUBOTA JIRO
    • H01L21/60H01L23/485H05K3/24H05K3/34
    • A FLIP CHIP METHOD OF JOINING A CHIP AND A SUBSTRATE IS DESCRIBED. A THERMO-COMPRESSION BONDER IS UTILIZED TO ALIGN THE CHIP (325) AND SUBSTRATE (315) AND APPLY A CONTACT FORCE TO HOLD SOLDER BUMPS (305) ON THE SUBSTRATE (315) AGAINST METAL BUMPS (320) ON THE CHIP (325). THE CHIP (325) IS RAPIDLY HEATED FROM ITS NON-NATIVE SIDE BY A PULSE HEATER IN THE HEAD OF THE BONDER UNTIL THE RE-FLOW FLOW TEMPERATURE OF THE SOLDER BUMPS (305) IS REACHED. PROXIMATE WITH REACHING THE RE-FLOW TEMPERATURE AT THE SOLDER BUMPS (305), THE CONTACT FORCE IS RELEASED. THE SOLDER IS HELD ABOVE ITS REFLOW TEMPERATURE FOR SEVERAL SECONDS TO FACILITATE WETTING OF THE SUBSTRATE'S METAL PROTRUSIONS AND JOINING. METAL CAPS COMPRISED OF A NOBLE METAL SUCH AS PALLADIUM IS APPLIED TO THE SURFACE OF THE METAL BUMPS (320) TO PREVENT THE METAL BUMPS (WHICH GENERALLY COMPRISE A HIGHLY-CONDUCTIVE AND HIGHLY-REACTIVE METAL SUCH AS COPPER) FROM OXIDIZING IN THE ELEVATED TEMPERATURES JUST PRIOR TO AND DURING THE RE-FLOW OPERATION. FIGURE 3
    • 8. 发明专利
    • DE60219779T2
    • 2007-12-27
    • DE60219779
    • 2002-02-21
    • INTEL CORP
    • KUBOTA JIROTAKAHASHI KENJI
    • H01L23/485H01L21/60H01L21/603H05K3/24H05K3/34
    • A flip chip method of joining a chip and a substrate is described. A thermo-compression bonder is utilized to align the chip and substrate and apply a contact force to hold solder bumps on the substrate against metal bumps on the chip. The chip is rapidly heated from its non-native side by a pulse heater in the head of the bonder until the re-flow flow temperature of the solder bumps is reached. Proximate with reaching the re-flow temperature at the solder bumps, the contact force is released. The solder is held above its re-flow temperature for several seconds to facilitate wetting of the substrate's metal protrusions and joining. Metal caps comprised of a noble metal such as palladium is applied to the surface of the metal bumps to prevent the metal bumps (which generally comprise a highly-conductive and highly-reactive metal such as copper) from oxidizing in the elevated temperatures just prior to and during the re-flow operation.