会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明申请
    • METHOD FOR PRODUCING A CRYSTALLIZED CERAMIC LAYER BY MEANS OF LASER ANNEALING
    • 制造方法的结晶陶瓷层通过激光退火
    • WO0143179A3
    • 2002-05-10
    • PCT/DE0004313
    • 2000-12-04
    • FORSCHUNGSZENTRUM JUELICH GMBHWASER RAINERBALDUS OLIVERKRASSER WOLFGANG
    • WASER RAINERBALDUS OLIVERKRASSER WOLFGANG
    • H01L21/314H01L21/316H01L21/3105
    • H01L21/31691
    • The invention relates to a method for producing a crystallized ceramic layer by means of laser annealing, whereby: a generating device (10), which has at least one pulse laser (22), generates a first laser beam (16) and a second laser beam (18) that is spatially separate therefrom; a shifting device (12) temporally shifts the second laser beam (18) with regard to the first laser beam (16); a combining device (14) combines both spatially separate laser beams (16, 18) to form an output beam (20), whereby the pulse duration of the output beam (20) is controlled by controlling the temporal shifting of the second laser beam (18) with regard to the first laser beam (16), and; the temperature profile in the ceramic layer is adjusted by controlling the pulse duration of the output beam (20). The invention also relates to a laser system which is especially developed for carrying out said method and which comprises: a generating device (10), which has at least one pulse laser (22) and which is provided for generating a first laser beam (16) and a second laser beam (18) that is spatially separate therefrom; a shifting device (12) which is provided for temporally shifting the second laser beam (18) with regard to the first laser beam (16), and comprises; a combining device (14) which is provided for combining both spatially separate laser beams (16, 18) to form an output beam (20).
    • 本发明涉及一种方法,用于制造通过激光退火结晶陶瓷层,其特征在于,发生装置(10),(22),其生成第一激光束(16),并且该空间上分离的第二激光束(18),至少一个脉冲激光器的一个 ; 一个位移装置(12)移动,相对于第一激光束(16)时所述第二激光束(18); 一个合并装置(14),所述两个激光束在空间上分离(16,18)成一输出光束(20)引出,其特征在于,通过控制第一激光束相对的第二激光束(18)的时间偏移的输出光束(20)的脉冲持续时间(16)控制的 会; 并且通过控制输出光束(20)的脉冲持续时间在陶瓷层的温度分布进行调整。 本发明还涉及一种激光系统,特别是用于进行该方法,包括产生装置(10),其设计,其包括至少一个脉冲激光器(22),并且被设计成使得其包括第一激光束(16),并且该空间上分离的激光束的第二 生成(18); 一个位移装置(12),其从所述第一激光束形成为使得它在时间(16)移动所述第二激光束(18); 和合并装置,该装置形成为使得它结合了两束激光束在空间上分离(16,18)成一输出光束(20)(14)。