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    • 8. 发明公开
    • CROSS FLOW METALIZING OF COMPACT DISCS
    • 交叉流动金属化密封圆盘
    • EP0797687A1
    • 1997-10-01
    • EP95944481.0
    • 1995-12-13
    • TAPEMATIC S.P.A.Schwartz, VladimirBierwagen, Klaus
    • SCHWARTZ, VladimirBIERWAGEN, Klaus
    • C23C14G11B7
    • C23C14/568C23C14/56
    • A cross flow system for metalizing compact discs, capable of being interposed in-line in the production of the compact discs after premastering, mastering, electroforming, and molding includes a vacuum chamber having diametrically opposed vacuum locks (98, 106) and multiple metallization sources (80, 82) in the form of magnetrons, with a preferred cross flow including the introduction of a disc to be metalized through one lock (98, 106) and the exit of the metalized disc through the diametrically opposite lock (98, 106). The double lock (98, 106) diametrically opposed cross flow system eliminates the problems of throughput limitations, high rate deposition, substrate pitting, and software complexity due to indexing which makes prior systems both costly and inefficient. The system also permits processing of more than one substrate or compact disc title such that multiple titled compact discs can be processed simultaneously.
    • 用于金属化压缩盘的交叉流动系统能够在预制,母盘制作,电铸和模制之后在线生产压缩盘的过程中插入,包括具有直径相对的真空锁(98,106)和多个金属化源 (80,82),具有优选的横向流动,包括通过一个锁(98,106)引入待金属化的盘并且通过直径上相对的锁(98,106)将金属化盘退出, 。 双锁(98,106)直径方向相反的横流系统消除了由于索引造成的吞吐量限制,高速率沉积,基板凹陷和软件复杂性的问题,这使得现有系统既昂贵又低效。 该系统还允许处理多个基片或光盘标题,以便可以同时处理多个标题光盘。
    • 9. 发明申请
    • OPTICAL DETECTION OF TRACER GASES IN A GAS DISCHARGE CELL HAVING UNEXPOSED ELECTRODES
    • 具有不同电极的放电电池中的示踪气体的光学检测
    • WO2017064265A1
    • 2017-04-20
    • PCT/EP2016/074743
    • 2016-10-14
    • INFICON GMBH
    • SCHWARTZ, VladimirCHERNODBROD, Boris
    • G01N21/31G01N21/67G01N21/68G01M3/00G01M3/38G01M3/20G01N21/33G01N1/22H05H1/00
    • G01N21/3103G01M3/202G01M3/226G01N21/67G01N21/68G01N2021/3125H05H1/2406H05H2001/2456
    • Tracer gas sensing device comprising a gas discharge cell (12) having cell walls (14) defining a discharge volume (30) and a tracer gas inlet (16) into the discharge volume (30), an optical spectrometer arrangement having a radiation source (26) on a first side of the discharge cell for emitting radiation into the discharge cell and a radiation detector (28) on a second side of the discharge cell opposite to the first side for detecting radiation which was emitted by the radiation source (26) through the discharge volume (30), and electrodes (32) on opposing sides of the discharge cell for generating a plasma within the discharge cell, said electrodes (32) being unexposed plasma electrodes (32). The discharge cell may be a dielectric barrier discharge cell and the electrodes may be powered by an AC power source. Furthermore, at least one magnet may be positioned behind each electrode to minimize losses of plasma electrons on the discharge cell walls. Either tracer or buffer gas may be helium, hydrogen, oxygen, neon, nitrogen or combinations thereof.
    • 示踪气体传感装置包括气体放电单元(12),该气体放电单元具有限定放电容积(30)的单元壁(14)和进入放电容积(30)的示踪气体入口(16); 光谱仪装置,其具有在放电室的第一侧上的用于向放电室发射辐射的辐射源(26)以及在放电室的与第一侧相对的第二侧上的放射线检测器(28),用于检测 由放射源(26)通过放电容积(30)发射的放电单元和用于在放电单元内产生等离子体的放电单元的相对侧上的电极(32),所述电极(32)是未暴露的等离子体电极(32)。 放电单元可以是电介质阻挡放电单元,并且电极可以由AC电源供电。 此外,至少一个磁体可以位于每个电极后面以最小化放电单元壁上的等离子体电子的损失。 示踪剂或缓冲气体可以是氦气,氢气,氧气,氖气,氮气或其组合。