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    • 1. 发明申请
    • ATOM PROBE EVAPORATION PROCESSES
    • 原子探针蒸发过程
    • WO2007016299A3
    • 2008-01-31
    • PCT/US2006029324
    • 2006-07-28
    • IMAGO SCIENT INSTR CORPOLSON JESSE DLENZ DANIEL RPAYNE TIMOTHY R
    • OLSON JESSE DLENZ DANIEL RPAYNE TIMOTHY R
    • G01Q10/00G01Q60/00H01J37/305
    • G01Q60/00
    • The present invention relates to atom probe evaporation processes. For example, certain aspects are directed toward methods for controlling an evaporation process in an atom probe that includes initiating the atom probe evaporation process and monitoring a parameter associated with material being evaporated from a specimen. The method can further include controlling at least one characteristic of the atom probe evaporation process to attain a desired evaporation rate or characteristic. In selected embodiments, monitoring a parameter associated with material being evaporated can include monitoring an evaporation rate, mass-to- charge ratios of evaporated ions, a mass resolution, a composition of material being evaporated, and/or the like. In certain embodiments, controlling at least one characteristic can include controlling a pulse energy, a pulse frequency, a bias energy, and/or the like. In other embodiments, various portions of the above process can be computer implemented.
    • 本发明涉及原子探针蒸发方法。 例如,某些方面涉及用于控制原子探针中的蒸发过程的方法,其包括引发原子探针蒸发过程并监测与样品蒸发的材料相关的参数。 该方法还可以包括控制原子探针蒸发过程的至少一个特征以获得所需的蒸发速率或特性。 在选择的实施例中,监测与被蒸发的材料相关联的参数可以包括监测蒸发速率,蒸发离子的质荷比,质量分辨率,被蒸发的材料的组成和/或类似物。 在某些实施例中,控制至少一个特性可包括控制脉冲能量,脉冲频率,偏置能量等。 在其他实施例中,可以计算机实现上述过程的各个部分。