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1. 发明专利

JPH09244025A ORIENTATION TREATMENT OF ORIENTED FILM AND APPARATUS THEREFOR 失效
公开(公告)号：JPH09244025A
公开(公告)日：1997-09-19
申请号：JP7527396
申请日：1996-03-04
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： ASAGI NORIO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337
摘要： PROBLEM TO BE SOLVED: To make it possible to lessen the generation of particles and to simplify treating stages by irradiating the unbaked oriented film formed on a substrate with an ion beam simultaneously with or after the impression of a magnetic field and executing the orientation treatment and curing of the oriented film by the irradiation. SOLUTION: A vacuum vessel 24 is internally equipped with a holder 8 for holding a substrate 2 with the oriented film to be subjected to the orientation treatment. The vessel is provided with a solenoid-like coil 16 which is disposed to enclose the holder 8 and impresses the magnetic field 18 from a prescribed direction on the oriented film 6 of the substrate 2 with the oriented film on the holder 8. The vessel is also provided with an ion source 20 for irradiating the oriented film 6 of the substrate 2 with the oriented film on the holder 8 with the ion beam 22. An exciting current is supplied to the coil 16 from a DC power source. The ion source 20 is arranged on nearly the central axis of the coil 16 to make the magnetic field by the coil 16 and the ion beam 22 from the ion source 20 incident on the oriented film 6 of the substrate 2 with the oriented film on the holder 8 nearly parallel with each other.

2. 发明专利

JPH09218408A ORIENTATION TREATMENT OF ORIENTED FILM 失效
公开(公告)号：JPH09218408A
公开(公告)日：1997-08-19
申请号：JP5103096
申请日：1996-02-13
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： ASAGI NORIO , NAKABAYASHI KIYOHIRO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337 , G02B1/12
摘要： PROBLEM TO BE SOLVED: To simplify a stage for an orientation treatment and to prevent the generation of particles at the time of the orientation treatment by simultaneously executing the baking and orientation treatment of the unbaked and oriented film by irradiation with an ion beam. SOLUTION: A vacuum vessel 20 which is evacuated to a prescribed vacuum degree, a holder 8 which is disposed in the vacuum chamber 20 and holds a substrate 2 with the oriented film to be subjected to the treatment and an ion source 12 which is mounted at the vacuum chamber 20 and irradiates the oriented film 6 of the substrate 2 with the oriented film on the holder 8 with the ion beam 14 are disposed. The holder 8 is constituted rotatable like an arrow A round a central shaft 10 in such a manner that the irradiation angle θof the ion beam 14 with the surface of the oriented film 6 may be changed. The oriented film 6 which is unbaked and is disposed on the substrate 4 is irradiated with the ion beam 14 in the vacuum atmosphere, by which the baking and orientation treatment of the oriented film 6 are simultaneously executed.

3. 发明专利

JPH08334768A ORIENTATION TREATMENT OF ORIENTED FILM 失效
公开(公告)号：JPH08334768A
公开(公告)日：1996-12-17
申请号：JP16281695
申请日：1995-06-05
申请人： II H C KK , NISSIN ELECTRIC CO LTD
发明人： EBARA TAIZO , NAKABAYASHI KIYOHIRO , ASAGI NORIO , KUWABARA SO
IPC分类号： G02F1/1337
摘要： PURPOSE: To obtain high orientability even for an oriented film which is hardly subjected to a rubbing treatment by irradiating this oriented film with ion beams. CONSTITUTION: A substrate 2 with the oriented film is formed by applying the oriented film 6 consisting of a high-polymer org. material, such as polyimide, on the surface of, for example, a glass substrate 4. The surface of the oriented film 6 is irradiated with the ion beams 14 by sharpening an irradiation angle θfrom diagonal above at the time of the orientation treatment. The orientation order angle of liquid crystals increases as the irradiation angle 6 is set smaller and, therefore, the setting of this angle at the smaller value is more preferable. The direction of the irradiation on the oriented film 6 with the ion beams and the rubbing direction to the oriented film 6 are set at nearly the same directions even if whichever treatment is execute first. Both treatment directions to the same oriented films 6 are eventually unified and the respective orientation treatments make up each other if both are set in nearly the same directions and, therefore, the same rubbing directions are more preferable for obtaining the higher orientability.

4. 发明专利

JPH06130389A ORIENTATION TREATMENT OF ORIENTED FILM 失效
公开(公告)号：JPH06130389A
公开(公告)日：1994-05-13
申请号：JP30646292
申请日：1992-10-19
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： ASAGI NORIO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337
摘要： PURPOSE:To suppress the generation of particles and static electricity at the time of an orientation treatment and to improve the yield of a liquid crystal display by irradiating the orienting film with an electron beam within a vacuum through a mask which has many mutually parallel slit holes. CONSTITUTION:On a holder 13 provided in a vacuum container 12, a substrate 2 with the oriented film to perform the orientation treatment is mounted. Further, an electron beam source 14 which orients to the holder 13 is provided in an upper direction of the mask 22 provided above the holder 13. When the oriented film 8 is irradiated with the electron beam 16 through the mask 22 having many mutually parallel slit holes 24, the surface of the oriented film 8 is fused and vaporized by means of thermal energy and many infinitesimal grooves are formed on the surface of the orienting film 8. When many grooves are formed, liquid crystal molecules are oriented along the grooves. Consequently, the orienting processing on oriented film can be performed by means of non-contact.

5. 发明专利

JPH06130393A ORIENTATION TREATMENT OF ORIENTED FILM 失效
公开(公告)号：JPH06130393A
公开(公告)日：1994-05-13
申请号：JP30663992
申请日：1992-10-20
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： ASAGI NORIO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337
摘要： PURPOSE:To provide the method for orientation treatment of an oriented film capable of suppressing the generation of particles and static electricity at the time of the orientation treatment. CONSTITUTION:The oriented film 8 formed on a glass substrate 4 is first irradiated with ion beams 16 drawn out of an ion source 14 within a vacuum vessel 12. Electrons 20 for neutralizing the positive charges by the ion beams 16 are supplied from a filament 18 to this oriented film 8 simultaneously therewith. The oriented film 8 treated in such a manner is irradiated with the electron beams 24 drawn out of an electron beam irradiation device 22.

6. 发明专利

JPH06130390A ORIENTATION TREATMENT OF ORIENTED FILM 失效
公开(公告)号：JPH06130390A
公开(公告)日：1994-05-13
申请号：JP30646392
申请日：1992-10-19
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： ASAGI NORIO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337
摘要： PURPOSE:To suppress the generation of particles and static electricity and to improve the yield of a liquid crystal display by irradiating an oriented film with excimer laser light through a mask which has many mutually parallel slit holes. CONSTITUTION:A lens 26 and the mask 22 are provided above a holder 13 and a laser light guide-in window 20 for guiding in the excimer laser light 18 outputted by an external excimer laser light source 16 is provided further above them. Then the oriented film 8 is irradiated with the excimer laser light 18 through the mask 22 which has the mutually parallel slit holes 24 and then the light energy is converted into machining energy by physical abrasion to form many infinitesimal grooves on the surface of the oriented film 8. Consequently, liquid crystal molecules are oriented along the grooves. Thus the orienting processing of the oriented film 8 can be performed by non-contact by the method which converts the light energy of the excimer laser light 18 into the machining energy.

7. 发明专利

JPH09244024A ORIENTATION TREATMENT OF ORIENTED FILM AND DEVICE THEREFOR 失效
公开(公告)号：JPH09244024A
公开(公告)日：1997-09-19
申请号：JP7527296
申请日：1996-03-04
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： ASAGI NORIO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337
摘要： PROBLEM TO BE SOLVED: To provide an orientation treating method capable of lessening the generation of particles and making treatment in the atm. and a device therefor. SOLUTION: This orientation treating method comprises heating an oriented film 6 which is baked and is formed on a substrate 4 by a heater 14 near to its transition temp., then, cooling the substrate down to room temp. A magnetic field of a prescribed direction is impressed on this oriented film 6 by a coil 16 after at least the oriented film 6 is heated near to the transition temp. before the oriented film is cooled down near to the room temp.

8. 发明专利

JPH09230350A ALIGNMENT LAYER TREATMENT OF ALIGNMENT LAYER AND DEVICE THEREFOR 失效
公开(公告)号：JPH09230350A
公开(公告)日：1997-09-05
申请号：JP5842796
申请日：1996-02-20
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： ASAGI NORIO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337
摘要： PROBLEM TO BE SOLVED: To make it possible to widen the visual field angle of a liquid crystal display by irradiating an alignment layer subjected to rubbing on its surface with an ion beam in vacuum while changing at least either of a bearing angle with the rubbing direction and the irradiation angle with the surface of the alignment layer. SOLUTION: A holder 8 which holds a substrate 2 with the alignment layer to be subjected to an alignment layer treatment is rotatable around a revolving shaft 10 in such a manner that the irradiation angle θ of the ion beam 14 with the surface of the alignment layer 6 may be changed. In addition, this holder is rotatable around a central axis 11 orthogonal to the revolving shaft 10 in such a manner that the bearing angle of the ion beam 14 with the rubbing directing may be changed. An ion source 12 for casting the ion beam 14 toward the layer 6 of the substrate 2 with the oriented film on the holder 8 and a filament 16 for supplying electrons 18 to the layer 6 are disposed above the holder 8. The layer 6 is irradiated with the ion beam 14 while at least either of the irradiation angle θ or the bearing angle is changed by using such device.

9. 发明专利

JPH09218409A ORIENTATION TREATMENT OF ORIENTED FILM AND APPARATUS THEREFOR 失效
公开(公告)号：JPH09218409A
公开(公告)日：1997-08-19
申请号：JP5103196
申请日：1996-02-13
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： ASAGI NORIO , NAKABAYASHI KIYOHIRO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337 , G02B1/12
摘要： PROBLEM TO BE SOLVED: To prevent the generation of particles at the time of an orientation treatment by subjecting the oriented film of a substrate with the oriented film formed with the oriented film for orienting liquid crystal molecules on its surface to irradiation with an ion beam and irradiation with UV rays. SOLUTION: This apparatus has a vacuum vessel 20, a holder 8 which is disposed in the vacuum vessel 20 and holds the substrate 2 with the oriented film to be subjected to the orientation treatment, an ion source 12 which is mounted at the vacuum vessel 20 and irradiates the oriented film 6 of the substrate 2 with the oriented film on the holder 8 with the ion beam 14 and a UV lamp 22 which is disposed in the vacuum vessel 20 and irradiates the oriented film 6 of the substrate 2 with the oriented film on the holder 8 with the UV rays. The oriented film 6 of the substrate 2 with the oriented film formed with the oriented film 6 for orienting the liquid crystal molecules on the substrate 4 is subjected to the irradiation with the ion beam 14 from the ion source 12 and the irradiation with the UV rays 24 from the UV lamp 22. Which of such irradiation may be earlier or the simultaneous irradiation is equally well.

10. 发明专利

JPH08234207A ORIENTATION TREATMENT OF ORIENTING FILM AND DEVICE THEREFOR 失效
公开(公告)号：JPH08234207A
公开(公告)日：1996-09-13
申请号：JP35358095
申请日：1995-12-28
申请人： NISSIN ELECTRIC CO LTD , II H C KK
发明人： NAKABAYASHI KIYOHIRO , ASAGI NORIO , KUWABARA SO , EBARA TAIZO
IPC分类号： G02F1/1337
摘要： PURPOSE: To provide a method for orientation treatment of an orienting film and a device therefor so that the angle of visibility of a liquid crystal display can be increased and production of particles can be decreased. CONSTITUTION: In this orientation treatment, the surface of an orienting film 6 formed on a substrate to orient liquid crystal molecules is rubbed in a certain direction D with a rubbing material. Then, the orienting film 6 is irradiated with ion beams 14 in vacuum in such a manner that the ion beams projected from obliquely above to the surface of the orienting film in the direction E different from the rubbing direction D of the rubbing material.

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