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1. 发明专利

AT477517T 未知
公开(公告)号：AT477517T
公开(公告)日：2010-08-15
申请号：AT02786917
申请日：2002-12-05
申请人： IBM
发明人： HUANG WU-SONG , LI WENJIE , MOREAU WAYNE , MEDEIROS DAVID , PETRILLO KAREN , LANG ROTBERT N , ANGELOPOULOS MARIE
IPC分类号： G03F7/004 , G03F7/039 , G03F7/30

2. 发明专利

AT416399T 未知
公开(公告)号：AT416399T
公开(公告)日：2008-12-15
申请号：AT06793243
申请日：2006-09-05
申请人： IBM
发明人： KOBURGER III , HOLMES STEVEN , HORAK DAVID , KIMMEL KURT , PETRILLO KAREN , ROBINSON CHRISTOPHER
IPC分类号： G03F7/20
摘要： An article including a microelectronic substrate is provided as an article usable during the processing of the microelectronic substrate. Such article includes a microelectronic substrate having a front surface, a rear surface opposite the front surface and a peripheral edge at boundaries of the front and rear surfaces. The front surface is a major surface of the article. A removable annular edge extension element having a front surface, a rear surface and an inner edge extending between the front and rear surfaces has the inner edge joined to the peripheral edge of the microelectronic substrate. In such way, a continuous surface is formed which includes the front surface of the edge extension element extending laterally from the peripheral edge of the microelectronic substrate and the front surface of the microelectronic substrate, the continuous surface being substantially co-planar and flat where the peripheral edge is joined to the inner edge.

3. 发明专利

DE602006004074D1 未知
公开(公告)号：DE602006004074D1
公开(公告)日：2009-01-15
申请号：DE602006004074
申请日：2006-09-05
申请人： IBM
发明人： KOBURGER CHARLES III , HOLMES STEVEN , HORAK DAVID , KIMMEL KURT , PETRILLO KAREN , ROBINSON CHRISTOPHER
IPC分类号： G03F7/20
摘要： An article including a microelectronic substrate is provided as an article usable during the processing of the microelectronic substrate. Such article includes a microelectronic substrate having a front surface, a rear surface opposite the front surface and a peripheral edge at boundaries of the front and rear surfaces. The front surface is a major surface of the article. A removable annular edge extension element having a front surface, a rear surface and an inner edge extending between the front and rear surfaces has the inner edge joined to the peripheral edge of the microelectronic substrate. In such way, a continuous surface is formed which includes the front surface of the edge extension element extending laterally from the peripheral edge of the microelectronic substrate and the front surface of the microelectronic substrate, the continuous surface being substantially co-planar and flat where the peripheral edge is joined to the inner edge.

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